LV14503A - Substrāta apstrādes sistēma - Google Patents
Substrāta apstrādes sistēmaInfo
- Publication number
- LV14503A LV14503A LVP-11-94A LV110094A LV14503A LV 14503 A LV14503 A LV 14503A LV 110094 A LV110094 A LV 110094A LV 14503 A LV14503 A LV 14503A
- Authority
- LV
- Latvia
- Prior art keywords
- transport
- equipment
- arrangement
- treating substrates
- substrates
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S198/00—Conveyors: power-driven
- Y10S198/95—Conveyor transverses wall aperture
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
Izgudrojums attiecas uz substrātu apstrādes sistēmu substrātu apstrādāšanai, kas ietver sistēmas kameru, kuru ierobežo kameras sienas (1), un arī vismaz vienu substrātu apstrādes ierīci un transportēšanas ierīci sistēmas kameras iekšpusē. Minētajai transportēšanas ierīcei ir komplekts viens aiz otra transportēšanas virzienā ierīkotu transportēšanas veltņu (3) substrātu vertikālai vai horizontālai transportēšanai. Transportēšanas ierīce ir raksturīga ar to, ka vismaz pirmās grupas transportēšanas veltņiem (3), kuri ierīkoti tieši viens aiz otra, katram ir pašam sava piedziņas ierīce (6). (Fig.1).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201010031245 DE102010031245B4 (de) | 2010-07-12 | 2010-07-12 | Substratbehandlungsanlage |
Publications (2)
Publication Number | Publication Date |
---|---|
LV14503A true LV14503A (lv) | 2012-04-20 |
LV14503B LV14503B (lv) | 2012-09-20 |
Family
ID=45372656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
LVP-11-94A LV14503B (lv) | 2010-07-12 | 2011-07-06 | Substrāta apstrādes sistēma |
Country Status (4)
Country | Link |
---|---|
US (1) | US8851274B2 (lv) |
JP (1) | JP2012020881A (lv) |
DE (1) | DE102010031245B4 (lv) |
LV (1) | LV14503B (lv) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011116136B4 (de) * | 2011-10-15 | 2021-05-12 | Onejoon Gmbh | Anlage zur Behandlung von Werkstücken |
DE102013103133B4 (de) * | 2013-03-27 | 2021-09-02 | VON ARDENNE Asset GmbH & Co. KG | Schleusenbereich einer Vakuumbehandlungsanlage |
DE102014222382B4 (de) | 2014-11-03 | 2021-08-26 | Singulus Technologies Ag | Verfahren und Vorrichtung zur Zugbildung von Gegenständen in Transportanlagen |
CN104828614B (zh) * | 2015-05-14 | 2017-03-22 | 南通慧宁机电科技有限公司 | 一种橡胶带剪切机上的输送带纠偏装置 |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3867748A (en) * | 1974-03-07 | 1975-02-25 | Libbey Owens Ford Co | Supporting and driving frangible rollers |
US4343395A (en) * | 1977-11-10 | 1982-08-10 | Holcroft & Co. | Roller hearth furnace |
US4596527A (en) * | 1984-01-13 | 1986-06-24 | Inax Corporation | Roller tunnel kiln |
JPH0615365B2 (ja) * | 1986-03-28 | 1994-03-02 | 日電アネルバ株式会社 | 移送装置 |
JPH0511765U (ja) | 1991-07-26 | 1993-02-12 | 西芝電機株式会社 | 気密隔壁を介する動力発生・伝達装置 |
IT1280142B1 (it) * | 1995-03-15 | 1998-01-05 | Danieli Off Mecc | Via a rulli di arrivo al pinch-roll dell'aspo avvolgitore di un treno di nastri a caldo |
JPH0982775A (ja) * | 1995-09-11 | 1997-03-28 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
US6959804B2 (en) * | 2002-07-19 | 2005-11-01 | Magstar Technologies, Inc. | Conveyor assembly |
JP4363064B2 (ja) * | 2003-03-07 | 2009-11-11 | 株式会社安川電機 | 真空内駆動装置およびこれを用いた基板搬送装置 |
US7458763B2 (en) * | 2003-11-10 | 2008-12-02 | Blueshift Technologies, Inc. | Mid-entry load lock for semiconductor handling system |
DE102004008598B4 (de) * | 2004-02-21 | 2006-12-28 | Applied Films Gmbh & Co. Kg | Verfahren für den Betrieb einer Inline-Beschichtungsanlage |
JP4582450B2 (ja) * | 2005-02-23 | 2010-11-17 | 株式会社アルバック | 真空成膜装置の搬送機構 |
DE102005016406A1 (de) | 2005-04-08 | 2006-10-19 | Von Ardenne Anlagentechnik Gmbh | Transporteinrichtung, insbesondere zum Transport flächiger Substrate durch eine Beschichtungsanlage |
JP4711218B2 (ja) * | 2005-04-08 | 2011-06-29 | 日本精工株式会社 | モータシステム |
DE102005024180B4 (de) * | 2005-05-23 | 2009-11-19 | Von Ardenne Anlagentechnik Gmbh | Transferkammer und Vakuumbeschichtungsanlage |
JP4848845B2 (ja) * | 2006-06-01 | 2011-12-28 | 株式会社安川電機 | 真空ロボット、処理装置、モータの製造方法、およびモータ |
EP1870487B1 (de) * | 2006-06-22 | 2009-07-29 | Applied Materials GmbH & Co. KG | Vakuumbeschichtungsanlage |
JP2008297584A (ja) * | 2007-05-30 | 2008-12-11 | Canon Anelva Corp | 成膜装置 |
JP2011514652A (ja) * | 2007-07-17 | 2011-05-06 | ブルックス オートメーション インコーポレイテッド | チャンバ壁に一体化されたモータを伴う基板処理装置 |
DE102007052524B4 (de) | 2007-11-01 | 2012-05-31 | Von Ardenne Anlagentechnik Gmbh | Transportmittel und Vakuumbeschichtungsanlage für Substrate unterschiedlicher Größe |
DE102007058052B4 (de) | 2007-11-30 | 2013-12-05 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsanlage |
DE102008019427A1 (de) | 2008-04-17 | 2009-10-29 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Vorrichtung zur Diffusionsbehandlung von Werkstücken |
KR20100045124A (ko) * | 2008-10-23 | 2010-05-03 | 삼성전자주식회사 | 스퍼터 트레이 이송 시스템 |
-
2010
- 2010-07-12 DE DE201010031245 patent/DE102010031245B4/de not_active Expired - Fee Related
-
2011
- 2011-07-06 LV LVP-11-94A patent/LV14503B/lv unknown
- 2011-07-11 JP JP2011152687A patent/JP2012020881A/ja active Pending
- 2011-07-12 US US13/180,944 patent/US8851274B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US8851274B2 (en) | 2014-10-07 |
JP2012020881A (ja) | 2012-02-02 |
LV14503B (lv) | 2012-09-20 |
US20120006656A1 (en) | 2012-01-12 |
DE102010031245A8 (de) | 2012-04-12 |
DE102010031245A1 (de) | 2012-01-12 |
DE102010031245B4 (de) | 2013-04-11 |
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