LV14503A - Substrāta apstrādes sistēma - Google Patents

Substrāta apstrādes sistēma

Info

Publication number
LV14503A
LV14503A LVP-11-94A LV110094A LV14503A LV 14503 A LV14503 A LV 14503A LV 110094 A LV110094 A LV 110094A LV 14503 A LV14503 A LV 14503A
Authority
LV
Latvia
Prior art keywords
transport
equipment
arrangement
treating substrates
substrates
Prior art date
Application number
LVP-11-94A
Other languages
English (en)
Other versions
LV14503B (lv
Inventor
Henrik Obst
Original Assignee
Von Ardenne Anlagentechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Von Ardenne Anlagentechnik Gmbh filed Critical Von Ardenne Anlagentechnik Gmbh
Publication of LV14503A publication Critical patent/LV14503A/lv
Publication of LV14503B publication Critical patent/LV14503B/lv

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S198/00—Conveyors: power-driven
    • Y10S198/95—Conveyor transverses wall aperture

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Furnace Charging Or Discharging (AREA)

Abstract

Izgudrojums attiecas uz substrātu apstrādes sistēmu substrātu apstrādāšanai, kas ietver sistēmas kameru, kuru ierobežo kameras sienas (1), un arī vismaz vienu substrātu apstrādes ierīci un transportēšanas ierīci sistēmas kameras iekšpusē. Minētajai transportēšanas ierīcei ir komplekts viens aiz otra transportēšanas virzienā ierīkotu transportēšanas veltņu (3) substrātu vertikālai vai horizontālai transportēšanai. Transportēšanas ierīce ir raksturīga ar to, ka vismaz pirmās grupas transportēšanas veltņiem (3), kuri ierīkoti tieši viens aiz otra, katram ir pašam sava piedziņas ierīce (6). (Fig.1).
LVP-11-94A 2010-07-12 2011-07-06 Substrāta apstrādes sistēma LV14503B (lv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201010031245 DE102010031245B4 (de) 2010-07-12 2010-07-12 Substratbehandlungsanlage

Publications (2)

Publication Number Publication Date
LV14503A true LV14503A (lv) 2012-04-20
LV14503B LV14503B (lv) 2012-09-20

Family

ID=45372656

Family Applications (1)

Application Number Title Priority Date Filing Date
LVP-11-94A LV14503B (lv) 2010-07-12 2011-07-06 Substrāta apstrādes sistēma

Country Status (4)

Country Link
US (1) US8851274B2 (lv)
JP (1) JP2012020881A (lv)
DE (1) DE102010031245B4 (lv)
LV (1) LV14503B (lv)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011116136B4 (de) * 2011-10-15 2021-05-12 Onejoon Gmbh Anlage zur Behandlung von Werkstücken
DE102013103133B4 (de) * 2013-03-27 2021-09-02 VON ARDENNE Asset GmbH & Co. KG Schleusenbereich einer Vakuumbehandlungsanlage
DE102014222382B4 (de) 2014-11-03 2021-08-26 Singulus Technologies Ag Verfahren und Vorrichtung zur Zugbildung von Gegenständen in Transportanlagen
CN104828614B (zh) * 2015-05-14 2017-03-22 南通慧宁机电科技有限公司 一种橡胶带剪切机上的输送带纠偏装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3867748A (en) * 1974-03-07 1975-02-25 Libbey Owens Ford Co Supporting and driving frangible rollers
US4343395A (en) * 1977-11-10 1982-08-10 Holcroft & Co. Roller hearth furnace
US4596527A (en) * 1984-01-13 1986-06-24 Inax Corporation Roller tunnel kiln
JPH0615365B2 (ja) * 1986-03-28 1994-03-02 日電アネルバ株式会社 移送装置
JPH0511765U (ja) 1991-07-26 1993-02-12 西芝電機株式会社 気密隔壁を介する動力発生・伝達装置
IT1280142B1 (it) * 1995-03-15 1998-01-05 Danieli Off Mecc Via a rulli di arrivo al pinch-roll dell'aspo avvolgitore di un treno di nastri a caldo
JPH0982775A (ja) * 1995-09-11 1997-03-28 Dainippon Screen Mfg Co Ltd 基板処理装置
US6959804B2 (en) * 2002-07-19 2005-11-01 Magstar Technologies, Inc. Conveyor assembly
JP4363064B2 (ja) * 2003-03-07 2009-11-11 株式会社安川電機 真空内駆動装置およびこれを用いた基板搬送装置
US7458763B2 (en) * 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
DE102004008598B4 (de) * 2004-02-21 2006-12-28 Applied Films Gmbh & Co. Kg Verfahren für den Betrieb einer Inline-Beschichtungsanlage
JP4582450B2 (ja) * 2005-02-23 2010-11-17 株式会社アルバック 真空成膜装置の搬送機構
DE102005016406A1 (de) 2005-04-08 2006-10-19 Von Ardenne Anlagentechnik Gmbh Transporteinrichtung, insbesondere zum Transport flächiger Substrate durch eine Beschichtungsanlage
JP4711218B2 (ja) * 2005-04-08 2011-06-29 日本精工株式会社 モータシステム
DE102005024180B4 (de) * 2005-05-23 2009-11-19 Von Ardenne Anlagentechnik Gmbh Transferkammer und Vakuumbeschichtungsanlage
JP4848845B2 (ja) * 2006-06-01 2011-12-28 株式会社安川電機 真空ロボット、処理装置、モータの製造方法、およびモータ
EP1870487B1 (de) * 2006-06-22 2009-07-29 Applied Materials GmbH & Co. KG Vakuumbeschichtungsanlage
JP2008297584A (ja) * 2007-05-30 2008-12-11 Canon Anelva Corp 成膜装置
JP2011514652A (ja) * 2007-07-17 2011-05-06 ブルックス オートメーション インコーポレイテッド チャンバ壁に一体化されたモータを伴う基板処理装置
DE102007052524B4 (de) 2007-11-01 2012-05-31 Von Ardenne Anlagentechnik Gmbh Transportmittel und Vakuumbeschichtungsanlage für Substrate unterschiedlicher Größe
DE102007058052B4 (de) 2007-11-30 2013-12-05 Von Ardenne Anlagentechnik Gmbh Vakuumbeschichtungsanlage
DE102008019427A1 (de) 2008-04-17 2009-10-29 Von Ardenne Anlagentechnik Gmbh Verfahren und Vorrichtung zur Diffusionsbehandlung von Werkstücken
KR20100045124A (ko) * 2008-10-23 2010-05-03 삼성전자주식회사 스퍼터 트레이 이송 시스템

Also Published As

Publication number Publication date
US8851274B2 (en) 2014-10-07
JP2012020881A (ja) 2012-02-02
LV14503B (lv) 2012-09-20
US20120006656A1 (en) 2012-01-12
DE102010031245A8 (de) 2012-04-12
DE102010031245A1 (de) 2012-01-12
DE102010031245B4 (de) 2013-04-11

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