LU73127A1 - - Google Patents
Info
- Publication number
- LU73127A1 LU73127A1 LU73127A LU73127A LU73127A1 LU 73127 A1 LU73127 A1 LU 73127A1 LU 73127 A LU73127 A LU 73127A LU 73127 A LU73127 A LU 73127A LU 73127 A1 LU73127 A1 LU 73127A1
- Authority
- LU
- Luxembourg
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD18020974A DD113247A1 (de) | 1974-07-31 | 1974-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU73127A1 true LU73127A1 (de) | 1976-04-13 |
Family
ID=5496751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU73127A LU73127A1 (de) | 1974-07-31 | 1975-07-31 |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5825739B2 (de) |
| BE (1) | BE831989A (de) |
| DD (1) | DD113247A1 (de) |
| DE (1) | DE2527269A1 (de) |
| IT (1) | IT1036929B (de) |
| LU (1) | LU73127A1 (de) |
| SU (1) | SU652237A1 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4444538C2 (de) * | 1994-12-14 | 2001-02-01 | Ardenne Anlagentech Gmbh | Einrichtung zur langzeitstabilen Verdampfung von Elementen und Verbindungen für die reaktive Abscheidung auf bewegten Substraten, vorzugsweise breiten Bändern |
| JP5649431B2 (ja) * | 2010-12-16 | 2015-01-07 | 株式会社神戸製鋼所 | プラズマｃｖｄ装置 |
| DE102021103354A1 (de) | 2021-02-12 | 2022-08-18 | VON ARDENNE Asset GmbH & Co. KG | Verfahren, Steuervorrichtung und Speichermedium |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1308291A (en) * | 1968-12-02 | 1973-02-21 | Parsons & Co Sir Howard G | Evaporation sources for depositing thin films |
| JPS5315837B2 (de) * | 1974-04-16 | 1978-05-27 |
-
1974
- 1974-07-31 DD DD18020974A patent/DD113247A1/xx unknown
-
1975
- 1975-06-19 DE DE19752527269 patent/DE2527269A1/de not_active Withdrawn
- 1975-07-21 IT IT5060375A patent/IT1036929B/it active
- 1975-07-25 SU SU752156945A patent/SU652237A1/ru active
- 1975-07-31 LU LU73127A patent/LU73127A1/xx unknown
- 1975-07-31 BE BE158832A patent/BE831989A/xx unknown
- 1975-07-31 JP JP50093665A patent/JPS5825739B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5149183A (ja) | 1976-04-28 |
| SU652237A1 (ru) | 1979-03-15 |
| BE831989A (fr) | 1975-11-17 |
| DD113247A1 (de) | 1975-05-20 |
| IT1036929B (it) | 1979-10-30 |
| DE2527269A1 (de) | 1976-02-12 |
| JPS5825739B2 (ja) | 1983-05-30 |