IT1036929B - Dispositivo per il rivestimento di sottostrati con materiali in forma di vapori - Google Patents

Dispositivo per il rivestimento di sottostrati con materiali in forma di vapori

Info

Publication number
IT1036929B
IT1036929B IT5060375A IT5060375A IT1036929B IT 1036929 B IT1036929 B IT 1036929B IT 5060375 A IT5060375 A IT 5060375A IT 5060375 A IT5060375 A IT 5060375A IT 1036929 B IT1036929 B IT 1036929B
Authority
IT
Italy
Prior art keywords
vapors
materials
coating substrates
substrates
coating
Prior art date
Application number
IT5060375A
Other languages
English (en)
Italian (it)
Original Assignee
Bandstahlkombinat Matern Veb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bandstahlkombinat Matern Veb filed Critical Bandstahlkombinat Matern Veb
Application granted granted Critical
Publication of IT1036929B publication Critical patent/IT1036929B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT5060375A 1974-07-31 1975-07-21 Dispositivo per il rivestimento di sottostrati con materiali in forma di vapori IT1036929B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18020974A DD113247A1 (de) 1974-07-31 1974-07-31

Publications (1)

Publication Number Publication Date
IT1036929B true IT1036929B (it) 1979-10-30

Family

ID=5496751

Family Applications (1)

Application Number Title Priority Date Filing Date
IT5060375A IT1036929B (it) 1974-07-31 1975-07-21 Dispositivo per il rivestimento di sottostrati con materiali in forma di vapori

Country Status (7)

Country Link
JP (1) JPS5825739B2 (de)
BE (1) BE831989A (de)
DD (1) DD113247A1 (de)
DE (1) DE2527269A1 (de)
IT (1) IT1036929B (de)
LU (1) LU73127A1 (de)
SU (1) SU652237A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4444538C2 (de) * 1994-12-14 2001-02-01 Ardenne Anlagentech Gmbh Einrichtung zur langzeitstabilen Verdampfung von Elementen und Verbindungen für die reaktive Abscheidung auf bewegten Substraten, vorzugsweise breiten Bändern
JP5649431B2 (ja) * 2010-12-16 2015-01-07 株式会社神戸製鋼所 プラズマｃｖｄ装置
DE102021103354A1 (de) 2021-02-12 2022-08-18 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung und Speichermedium

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1308291A (en) * 1968-12-02 1973-02-21 Parsons & Co Sir Howard G Evaporation sources for depositing thin films
JPS5315837B2 (de) * 1974-04-16 1978-05-27

Also Published As

Publication number Publication date
JPS5149183A (ja) 1976-04-28
SU652237A1 (ru) 1979-03-15
BE831989A (fr) 1975-11-17
DD113247A1 (de) 1975-05-20
DE2527269A1 (de) 1976-02-12
JPS5825739B2 (ja) 1983-05-30
LU73127A1 (de) 1976-04-13

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