DD113247A1 - - Google Patents

Info

Publication number
DD113247A1
DD113247A1 DD18020974A DD18020974A DD113247A1 DD 113247 A1 DD113247 A1 DD 113247A1 DD 18020974 A DD18020974 A DD 18020974A DD 18020974 A DD18020974 A DD 18020974A DD 113247 A1 DD113247 A1 DD 113247A1
Authority
DD
German Democratic Republic
Application number
DD18020974A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD18020974A priority Critical patent/DD113247A1/xx
Publication of DD113247A1 publication Critical patent/DD113247A1/xx
Priority to DE19752527269 priority patent/DE2527269A1/de
Priority to IT5060375A priority patent/IT1036929B/it
Priority to SU752156945A priority patent/SU652237A1/ru
Priority to BE158832A priority patent/BE831989A/xx
Priority to LU73127A priority patent/LU73127A1/xx
Priority to JP50093665A priority patent/JPS5825739B2/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DD18020974A 1974-07-31 1974-07-31 DD113247A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DD18020974A DD113247A1 (de) 1974-07-31 1974-07-31
DE19752527269 DE2527269A1 (de) 1974-07-31 1975-06-19 Vorrichtung zum bedampfen von substraten mit hohen bedampfungsraten
IT5060375A IT1036929B (it) 1974-07-31 1975-07-21 Dispositivo per il rivestimento di sottostrati con materiali in forma di vapori
SU752156945A SU652237A1 (ru) 1974-07-31 1975-07-25 Устройство дл непрерывного напылени на подвижную подложку в виде полосы
BE158832A BE831989A (fr) 1974-07-31 1975-07-31 Dispositif pour le depot en phase vapeur sur des substrats, a grand taux de depot
LU73127A LU73127A1 (de) 1974-07-31 1975-07-31
JP50093665A JPS5825739B2 (ja) 1974-07-31 1975-07-31 タカイジヨウチヤクリツデキタイニジヨウチヤクオオコナウソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18020974A DD113247A1 (de) 1974-07-31 1974-07-31

Publications (1)

Publication Number Publication Date
DD113247A1 true DD113247A1 (de) 1975-05-20

Family

ID=5496751

Family Applications (1)

Application Number Title Priority Date Filing Date
DD18020974A DD113247A1 (de) 1974-07-31 1974-07-31

Country Status (7)

Country Link
JP (1) JPS5825739B2 (de)
BE (1) BE831989A (de)
DD (1) DD113247A1 (de)
DE (1) DE2527269A1 (de)
IT (1) IT1036929B (de)
LU (1) LU73127A1 (de)
SU (1) SU652237A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4444538A1 (de) * 1994-12-14 1996-06-20 Ardenne Anlagentech Gmbh Einrichtung zur langzeitstabilen Verdampfung von Elementen und Verbindungen für die reaktive Abscheidung auf bewegten Substraten, vorzugsweise breiten Bändern

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5649431B2 (ja) * 2010-12-16 2015-01-07 株式会社神戸製鋼所 プラズマｃｖｄ装置
DE102021103354A1 (de) 2021-02-12 2022-08-18 VON ARDENNE Asset GmbH & Co. KG Verfahren, Steuervorrichtung und Speichermedium

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1308291A (en) * 1968-12-02 1973-02-21 Parsons & Co Sir Howard G Evaporation sources for depositing thin films
JPS5315837B2 (de) * 1974-04-16 1978-05-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4444538A1 (de) * 1994-12-14 1996-06-20 Ardenne Anlagentech Gmbh Einrichtung zur langzeitstabilen Verdampfung von Elementen und Verbindungen für die reaktive Abscheidung auf bewegten Substraten, vorzugsweise breiten Bändern
DE4444538C2 (de) * 1994-12-14 2001-02-01 Ardenne Anlagentech Gmbh Einrichtung zur langzeitstabilen Verdampfung von Elementen und Verbindungen für die reaktive Abscheidung auf bewegten Substraten, vorzugsweise breiten Bändern

Also Published As

Publication number Publication date
JPS5149183A (ja) 1976-04-28
SU652237A1 (ru) 1979-03-15
BE831989A (fr) 1975-11-17
IT1036929B (it) 1979-10-30
DE2527269A1 (de) 1976-02-12
JPS5825739B2 (ja) 1983-05-30
LU73127A1 (de) 1976-04-13

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