LT3238277T - Saulės elementų gamybos būdas - Google Patents

Saulės elementų gamybos būdas

Info

Publication number
LT3238277T
LT3238277T LTEP15804483.4T LT15804483T LT3238277T LT 3238277 T LT3238277 T LT 3238277T LT 15804483 T LT15804483 T LT 15804483T LT 3238277 T LT3238277 T LT 3238277T
Authority
LT
Lithuania
Prior art keywords
manufacture
solar cells
solar
cells
Prior art date
Application number
LTEP15804483.4T
Other languages
English (en)
Inventor
Michael Pittroff
Thomas Schwarze
Original Assignee
Solvay Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solvay Sa filed Critical Solvay Sa
Publication of LT3238277T publication Critical patent/LT3238277T/lt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Drying Of Semiconductors (AREA)
LTEP15804483.4T 2014-12-22 2015-12-03 Saulės elementų gamybos būdas LT3238277T (lt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP14199551.4A EP3038169A1 (en) 2014-12-22 2014-12-22 Process for the manufacture of solar cells
PCT/EP2015/078463 WO2016102165A1 (en) 2014-12-22 2015-12-03 Process for the manufacture of solar cells

Publications (1)

Publication Number Publication Date
LT3238277T true LT3238277T (lt) 2019-01-10

Family

ID=52130124

Family Applications (1)

Application Number Title Priority Date Filing Date
LTEP15804483.4T LT3238277T (lt) 2014-12-22 2015-12-03 Saulės elementų gamybos būdas

Country Status (10)

Country Link
US (1) US20170345953A1 (lt)
EP (3) EP3038169A1 (lt)
JP (1) JP6740246B2 (lt)
KR (1) KR20170097734A (lt)
CN (1) CN107251235B (lt)
DE (1) DE202015009541U1 (lt)
LT (1) LT3238277T (lt)
SG (1) SG11201705095VA (lt)
TW (1) TWI676674B (lt)
WO (1) WO2016102165A1 (lt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017219312A1 (de) 2017-10-27 2019-05-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. 2-stufiger Trockenätzprozess zur Texturierung kristalliner Siliziumscheiben
DE102021200627A1 (de) 2021-01-25 2022-08-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren zur Herstellung einer Solarzelle

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4249957A (en) 1979-05-30 1981-02-10 Taher Daud Copper doped polycrystalline silicon solar cell
EP0542148B1 (de) 1991-11-11 1997-01-22 SIEMENS SOLAR GmbH Verfahren zum Erzeugen feiner Elektrodenstruckturen
US5476553A (en) * 1994-02-18 1995-12-19 Ase Americas, Inc. Solar cell modules and method of making same
US6660643B1 (en) * 1999-03-03 2003-12-09 Rwe Schott Solar, Inc. Etching of semiconductor wafer edges
WO2007035460A1 (en) * 2005-09-20 2007-03-29 Air Products And Chemicals, Inc. Apparatus and process for surface treatment of substrate using an activated reactive gas
JP2006332427A (ja) * 2005-05-27 2006-12-07 Mitsubishi Electric Corp 光起電力装置の製造方法およびそれに用いるエッチング装置
KR20150063581A (ko) * 2008-01-23 2015-06-09 솔베이 플루오르 게엠베하 태양전지의 제조 방법
CN101478013A (zh) * 2008-12-30 2009-07-08 无锡尚德太阳能电力有限公司 一种反应离子刻蚀制备太阳电池硅片绒面的方法以及用该方法制造的太阳电池
KR20110138142A (ko) * 2009-03-17 2011-12-26 로트 운트 라우 악치엔게젤샤프트 기판 처리 장치 및 기판 처리 방법
JP2010245405A (ja) * 2009-04-08 2010-10-28 Sekisui Chem Co Ltd シリコンの表面粗化方法
JP5434970B2 (ja) * 2010-07-12 2014-03-05 セントラル硝子株式会社 ドライエッチング剤
CN103140918A (zh) * 2011-03-03 2013-06-05 松下电器产业株式会社 半导体基板的表面蚀刻装置、以及使用该表面蚀刻装置制造在表面形成有凹凸形状的半导体基板的方法
WO2012145473A1 (en) * 2011-04-21 2012-10-26 Linde Aktiengesellschaft Dry fluorine texturing of crystalline silicon surfaces for enhanced photovoltaic production efficiency
JP2013030531A (ja) * 2011-07-27 2013-02-07 Central Glass Co Ltd ドライエッチング剤
CN102255002A (zh) * 2011-08-09 2011-11-23 陈必雄 用于太阳能电池晶硅材料的制绒方法
CN103594314B (zh) * 2012-08-17 2015-11-18 晶呈科技股份有限公司 具有多腔体的气相蚀刻设备
CN103000763B (zh) * 2012-11-29 2015-11-25 苏州阿特斯阳光电力科技有限公司 一种晶体硅太阳能电池的绒面结构及其制备方法
US20140213016A1 (en) * 2013-01-30 2014-07-31 Applied Materials, Inc. In situ silicon surface pre-clean for high performance passivation of silicon solar cells
JP2014204052A (ja) * 2013-04-09 2014-10-27 パナソニック株式会社 ノンプラズマドライエッチング装置

Also Published As

Publication number Publication date
JP6740246B2 (ja) 2020-08-12
KR20170097734A (ko) 2017-08-28
EP3238277B1 (en) 2018-09-26
CN107251235A (zh) 2017-10-13
TW201627474A (zh) 2016-08-01
TWI676674B (zh) 2019-11-11
EP3467883A1 (en) 2019-04-10
JP2018503267A (ja) 2018-02-01
DE202015009541U1 (de) 2018-03-13
US20170345953A1 (en) 2017-11-30
EP3238277A1 (en) 2017-11-01
CN107251235B (zh) 2020-05-12
EP3038169A1 (en) 2016-06-29
SG11201705095VA (en) 2017-07-28
WO2016102165A1 (en) 2016-06-30

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