KR970703442A - 박막의 솔리드 스테이트 전지를 디포지트시키는 장치(apparatus for de-position of thin-film, solid state batteries) - Google Patents

박막의 솔리드 스테이트 전지를 디포지트시키는 장치(apparatus for de-position of thin-film, solid state batteries) Download PDF

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KR970703442A
KR970703442A KR1019960706934A KR19960706934A KR970703442A KR 970703442 A KR970703442 A KR 970703442A KR 1019960706934 A KR1019960706934 A KR 1019960706934A KR 19960706934 A KR19960706934 A KR 19960706934A KR 970703442 A KR970703442 A KR 970703442A
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스탠보드 알. 오브쉰스키
허버트 오브쉰스키
로사 영
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마빈 에스. 시스킨드
오보닉 배터리 컴퍼니, 아이엔씨.
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    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
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Abstract

고상의 박막 배터리 물질을 기판 물질위에 디포지트시키는 복수개의 챔버로 이루어지는 디포지션 장치. 이 장치는 적어도 세 개의 개별적인 배출가능한 디포지션 챔버(8,9,10)를 포함하는데, 이들은 일렬로 물리적으로 상호 연결되어 있다. 첫번째 챔버(8)는 기판상에 일차 극성을 갖는 배터리 전극 물질을 디포지트시키기에 적합하고, 두번째 챔버(9)는 첫번째 챔버(8) 내에서 디포지트된 배터리 전극 물질위에 고상 전해질 물질을 디포지트시키기에 적합하여, 세번째 챔버(10)는 첫번째 챔버(8)에서 디포지트된 것과는 극성이 반대인 배터리 전극 물질을 디포지트시키기에 적합하다. 가스 게이트(12)는 디포지션 챔버(8,9,10)를 상호 연결시켜 챔버간에는 가스 분리가 되게 하면서 기판 물질이 하나의 디포지션 챔버로부터 다음으로 진행할 수 있도록 해준다.

Description

박막의 솔리드 스테이트 전지를 디포지트시키는 장치(APPARATUS FOR DEPOSITION OF THIN-FILM, SOLID STATE BATTERIES)
[도면의 간단한 설명]
제1도는 본 발명의 디포지션 장치로 얻어지는 형태의 솔리드 스테이트 전지에 대한 제1실시예의 단면도로서 개개층들을 구체적으로 도시함,
제2도는 본 발명의 디포지션 장치로 얻어지는 형태의 솔리드 스테이트 전지에 대한 제2실시예의 단면도로서 복수개의 전기화학적 셀 및 전류 컬렉터를 포함한 개개 층들을 구체적으로 도시함.
제3도는 본 발명의 제1실시예의 보다 도시적인 도면으로서, 구체적으로 양극 및 음극 디포지션 챔버, 고상 전해질 디포지션 챔버, 및 상호 연결된 가스게이트를 나타냄.
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (15)

  1. 일렬로 물리적으로 상호연결되어 있는 적어도 하나의 개별적인 방출가능한 디포지션 챔버; 기판상에 일차극성을 갖는 배터리 전극 물질을 디포지트시키기에 적합한 상기 디포지션 챔버들중 첫번째 챔버 첫번재 챔버내에서 디포지트된 배터리 전극 물질위에 고상 전해질 물질을 디포지트시키기에 적합한 상기 디포지션 챔버들 중 두번째 챔버; 첫번째 챔버들내에서 디포지트된 것과는 극성이 반대인 배터리 전극 물질을 디포지트시키기에 적합한 상기 디포지션 챔버들중 세번째 챔버; 및 각각은 상기 디포지션 챔버들중 둘을 상호연결시켜 챔버들간의 가스는 분리되도록 하면서 기판 물질이 하나의 디포지션 챔버에서 다음으로 진행되게 하는 적어도 두개의 가스 게이트를 구비하는, 기판 물질상에 고상의 박막 배터리 물질을 디포지트시키기 위한 복수개의 챔버로 이루어진 디포지션 장치.
  2. 제1항에 있어서, 상기 첫번째 디포지션 챔버에 일렬로 물리적으로 상호 연결되고 기판 물질을 롤을 유지시켜주는 배출가능한 방출 챔버를 추가로 포함하는 디포지션 장치로서, 상기 기판 물질은 롤이 펴지면서 상기 첫번째 디포지션 챔버를 통과하고 가스 게이트는 상기 방출 챔버와 상기 첫번째 디포지션 챔버간을 상호연결하는 디포지션 장치.
  3. 제2항에 있어서, 상기 세번째 디포지션 챔버에 일렬로 물리적으로 상호 연결되고 솔리드 스테이트 전기 물질이 디포지트된 기판 물질의 롤을 감아올리는 맨드릴을 지지해주는 배출가능한 감아올리는(take-up) 챔버를 추가로 포함하는 디포지션 장치로서, 기판은 상기 세번째 디포지션 챔버에서 상기 감아올리는 챔버로 통과하고, 가스 게이트는 상기 감아올리는 챔버 및 상기 세번째 디포지션 챔버를 상호연결하는 디포지션 장치.
  4. 제3항에 있어서, 상기 디포지션 장치가 상기 기판상에 복수개의 솔리드 스테이트 전지 셀을 디포지트시키기에 적합하고, 이러한 목적을 이루기 위해 상기 첫번째와 세번째 디포지션 챔버 및 방출 챔버와 감아올리는 챔버가 각각 가역적이어서 상기 기판 물질의 롤이 상기 디포지션 챔버를 한번 통과한 다음에 기판의 방향이 역전될 수 있고 상기 기판은 디포지션 챔버를 또다시 통과할 수 있게 되며, 이렇게 역전되면 1) 감아올리는 챔버가 방출 챔버가 되고, 2) 방출 챔버는 감아올리는 챔버가 되고, 3) 세 번째 디포지션 챔버는 첫번째 디포지션 챔버가 되어 상기 첫 번째 극성을 갖는 상기 배터리 전극 물질을 기판상에 디포지트시키며; 4)첫번째 디포지션 챔버는 세번째 디포지션 챔버가 되어 상기 반대 극성의 배터리 전극 물질을 상기 기판에 디포지트시키는 디포지션 장치.
  5. 제3항에 있어서, 이차 배터리 전극 층위에 최상단의 전도성 배터리 단자를 디포지트시키기에 적합하며 상기 세번째 챔버 및 상기 감아올리는 챔버사이에 네번째 배출가능한 디포지션 챔버를 추가로 포함하는 디포지션 장치.
  6. 제4항에 있어서, 상기 첫번째 디포지션 챔버와 상기 방출 챔버사이에 네번째의 배출가능한 디포지션 챔버, 및 상기 세번째 디포지션 챔버와 상기 감아올니는 챔버사이에 다섯 번째의 배출가능한 디포지션 챔버를 추가로 포함하며, 상기 네번째 및 다섯번째 챔버가 첫번재 디포지트된 배터리의 이차 전극 층과 다음에 디포지트된 배터리의 일차 전극 사이에 전류 컬렉터 층을 디포지트시키고, 가장 나중에 디포지트된 배터리의 이차 배터리 전극 층위에 최상단 전도성 배터리 물질을 디포지트시키기에 적합한 디포지션 장치.
  7. 제1항에 있어서, 상기 첫번째 디포지션 챔버에 일렬로 물리적으로 상호 연결되고 하나 이상의 개개 기판을 지지하고 이들을 상기 첫번째 디포지션 챔버로 통과시키기에 적합한 배출가능한 기판 삽입 챔버를 추가로 포함하고 가스 게이트가 상기 삽입 챔버와 상기 첫번재 디포지션 챔버를 상호연결하는 디포지션 장치.
  8. 제7항에 있어서, 상기 세번째 디포지션 챔버에 일렬로 물리적으로 상호연결되고 하나 이상의 개개 기판을 지지하고 이들을 상기 세번째 디포지션 챔버로부터 제거하기에 적합한 배출가능한 기판 제거 챔버(retraction chamber)를 추가로 포함하고 가스 게이트가 상기 제거 챔버와 상기 세번째 디포지션 챔버를 상호 연결하는 디포지션 장치.
  9. 제8항에 있어서, 이미 디포지트된 기판이 제거 챔버로부터 삽입 챔버로 재순환됨으로써 기판이 다중 디포지트될 수 있도록 상기 제거 챔버와 상기 삽입 챔버를 연결시키는 상호연결 통로를 추가로 포함하는 디포지션 장치.
  10. 제8항에 있어서, 상기 세번째 디포지션 챔버와 상기 제거 챔버사이에, 이차 배터리 전극 층위에 최상단의 전도성 배터리 단자를 디포지트시키기에 적합한 네 번째의 배출가능한 디포지션 챔버를 추가로 포함하는 디포지션 장치.
  11. 제3항에 있어서, 상기 디포지션 장치는 복수개의 솔리드 스테이트 전지 셀 물질을 상기 기판위에 디포지트시키기에 적합하고, 상기 기판물질의 롤이 상기 디포지션 챔버를 한번 통과하면 상기 기판의 이동 방향을 역전시킬 수 있어, 상기 기판이 디포지션 챔버를 또다시 통과할 수 있도록 상기 방출 챔버 및 감아올리는 챔버는 가역적이며, 상기와 같은 목적을 이루기 위해 상기 첫번째 및 세번째 디포지션 챔버와 동일한 두개의 부가적인 디포지션 챔버들을 장치내에 포함시키고, 이러한 부가적인 챔버들은 상기 기판롤의 이동방향이 역전될 때 작동되며 부가적인 역전 방향의 디포지션 챔버는 상기 두번째 챔버가 전진하는 방향의 대응부로부터 맞은편에 위치하는 디포지션 장치.
  12. 제11항에 있어서, 부가적인 배출가능한 디포지션 챔버 세트를 추가로 포함하는 디포지션 장치로서, 이러한 세트의 각 챔버는 상기 두번째 디포지션 챔버의 반대편에 위치하고 디포지트된 배터리 셀의 상단에 전도층을 디포지트시키기에 적합하며, 한 챔버는 기판이 전진 방향으로 이동할 때 전도층을 디포지트하도록 배치하고 나머지 다른 챔버는 기판이 역방향으로 이동할 때 전도층을 디포지트하도록 배치된 디포지션 장치.
  13. 제1항에 있어서, 상기 디포지션 챔버는 증발법, 화학적 증착법, 물리적증착법, 극초단파 플라즈마 향상된 화학적 증착법, 스퍼터링(sputtering), 레이저 박리법, 분사피복법, 또는 플라즈마 분사법으로 이루어지는 그룹에서 선택된 적어도 하나의 방법으로 물질을 디포지트시키기에 적합한 디포지션 방법.
  14. 제1항에 있어서, 상기 첫번째 디포지션 챔버가 양극 물질을 디포지트하기에 적합한 디포지션 장치.
  15. 제1항에 있어서, 상기 첫번째 디포지션 챔버가 음극 물질을 디포지트하기에 적합한 디포지션 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960706934A 1994-06-06 1995-05-26 박막의솔리드스테이트전지를디포지트시키는장치 KR100326345B1 (ko)

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US08/254,392 1994-06-06
US08/254,392 US5411592A (en) 1994-06-06 1994-06-06 Apparatus for deposition of thin-film, solid state batteries
PCT/US1995/006737 WO1995033863A1 (en) 1994-06-06 1995-05-26 Apparatus for deposition of thin-film, solid state batteries

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