DE69529284D1 - Vorrichtung zum abscheiden von dünnfilm-festkörperbatterien - Google Patents

Vorrichtung zum abscheiden von dünnfilm-festkörperbatterien

Info

Publication number
DE69529284D1
DE69529284D1 DE69529284T DE69529284T DE69529284D1 DE 69529284 D1 DE69529284 D1 DE 69529284D1 DE 69529284 T DE69529284 T DE 69529284T DE 69529284 T DE69529284 T DE 69529284T DE 69529284 D1 DE69529284 D1 DE 69529284D1
Authority
DE
Germany
Prior art keywords
thin film
depositing thin
film solid
solid batteries
batteries
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69529284T
Other languages
English (en)
Inventor
Stanford R Ovshinsky
Herbert Ovshinsky
Rosa Young
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ovonic Battery Co Inc
Original Assignee
Ovonic Battery Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ovonic Battery Co Inc filed Critical Ovonic Battery Co Inc
Application granted granted Critical
Publication of DE69529284D1 publication Critical patent/DE69529284D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H01M10/0585—Construction or manufacture of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
    • H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
    • H01M10/0562—Solid materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00—Primary cells; Manufacture thereof
    • H01M6/14—Cells with non-aqueous electrolyte
    • H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte
    • H01M6/188—Processes of manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/34—Gastight accumulators
    • H01M10/345—Gastight metal hydride accumulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00—Primary cells; Manufacture thereof
    • H01M6/14—Cells with non-aqueous electrolyte
    • H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte
    • H01M6/181—Cells with non-aqueous electrolyte with solid electrolyte with polymeric electrolytes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M6/00—Primary cells; Manufacture thereof
    • H01M6/40—Printed batteries, e.g. thin film batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
DE69529284T 1994-06-06 1995-05-26 Vorrichtung zum abscheiden von dünnfilm-festkörperbatterien Expired - Lifetime DE69529284D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/254,392 US5411592A (en) 1994-06-06 1994-06-06 Apparatus for deposition of thin-film, solid state batteries
PCT/US1995/006737 WO1995033863A1 (en) 1994-06-06 1995-05-26 Apparatus for deposition of thin-film, solid state batteries

Publications (1)

Publication Number Publication Date
DE69529284D1 true DE69529284D1 (de) 2003-02-06

Family

ID=22964129

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69529284T Expired - Lifetime DE69529284D1 (de) 1994-06-06 1995-05-26 Vorrichtung zum abscheiden von dünnfilm-festkörperbatterien

Country Status (7)

Country Link
US (1) US5411592A (de)
EP (1) EP0764221B1 (de)
KR (1) KR100326345B1 (de)
AU (1) AU684192B2 (de)
CA (1) CA2190856C (de)
DE (1) DE69529284D1 (de)
WO (1) WO1995033863A1 (de)

Families Citing this family (158)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5651868A (en) * 1994-10-26 1997-07-29 International Business Machines Corporation Method and apparatus for coating thin film data storage disks
US5653811A (en) 1995-07-19 1997-08-05 Chan; Chung System for the plasma treatment of large area substrates
US5652043A (en) * 1995-12-20 1997-07-29 Baruch Levanon Flexible thin layer open electrochemical cell
US20070122997A1 (en) * 1998-02-19 2007-05-31 Silicon Genesis Corporation Controlled process and resulting device
US6013563A (en) 1997-05-12 2000-01-11 Silicon Genesis Corporation Controlled cleaning process
US6291313B1 (en) 1997-05-12 2001-09-18 Silicon Genesis Corporation Method and device for controlled cleaving process
US6033974A (en) * 1997-05-12 2000-03-07 Silicon Genesis Corporation Method for controlled cleaving process
US6027988A (en) * 1997-05-28 2000-02-22 The Regents Of The University Of California Method of separating films from bulk substrates by plasma immersion ion implantation
US6548382B1 (en) 1997-07-18 2003-04-15 Silicon Genesis Corporation Gettering technique for wafers made using a controlled cleaving process
US6103599A (en) * 1997-07-25 2000-08-15 Silicon Genesis Corporation Planarizing technique for multilayered substrates
US6296960B1 (en) 1997-10-06 2001-10-02 Reveo, Inc. System and method for producing electrical power using metal-air fuel cell battery technology
US6472093B2 (en) 1997-10-06 2002-10-29 Reveo, Inc. Metal-air fuel cell battery systems having a metal-fuel card storage cartridge, insertable within a fuel cartridge insertion port, containing a supply of substantially planar discrete metal-fuel cards, and fuel card transport mechanisms therein
US6569555B1 (en) 1997-10-06 2003-05-27 Reveo, Inc. Refuelable and rechargeable metal-air fuel cell battery power supply unit for integration into an appliance
US6306534B1 (en) 1997-10-06 2001-10-23 Reveo, Inc. Metal-air fuel cell battery systems employing means for discharging and recharging metal-fuel cards
US6558829B1 (en) 1997-10-06 2003-05-06 Reveo, Inc. Appliance with refuelable and rechargeable metal-air fuel cell battery power supply unit integrated therein
US6451463B1 (en) 1997-10-06 2002-09-17 Reveo, Inc. Electro-chemical power generation systems employing arrays of electronically-controllable discharging and/or recharging cells within a unity support structure
US6299997B1 (en) * 1997-10-06 2001-10-09 Reveo, Inc. Ionically-conductive belt structure for use in a metal-air fuel cell battery system and method of fabricating the same
US6348277B1 (en) 1997-10-06 2002-02-19 Reveo, Inc. Method of and system for producing and supplying electrical power to an electrical power consuming device using a metal-air fuel cell battery (FCB) module and a supply of metal-fuel cards
US6228176B1 (en) 1998-02-11 2001-05-08 Silicon Genesis Corporation Contoured platen design for plasma immerson ion implantation
US6051073A (en) * 1998-02-11 2000-04-18 Silicon Genesis Corporation Perforated shield for plasma immersion ion implantation
US6274459B1 (en) 1998-02-17 2001-08-14 Silicon Genesis Corporation Method for non mass selected ion implant profile control
US6291326B1 (en) 1998-06-23 2001-09-18 Silicon Genesis Corporation Pre-semiconductor process implant and post-process film separation
US6379835B1 (en) 1999-01-12 2002-04-30 Morgan Adhesives Company Method of making a thin film battery
US6299998B1 (en) 1999-03-15 2001-10-09 Reveo, Inc. Movable anode fuel cell battery
US6398824B1 (en) * 1999-04-02 2002-06-04 Excellatron Solid State, Llc Method for manufacturing a thin-film lithium battery by direct deposition of battery components on opposite sides of a current collector
US6458723B1 (en) 1999-06-24 2002-10-01 Silicon Genesis Corporation High temperature implant apparatus
AU6905000A (en) * 1999-08-10 2001-03-05 Silicon Genesis Corporation A cleaving process to fabricate multilayered substrates using low implantation doses
US6221740B1 (en) 1999-08-10 2001-04-24 Silicon Genesis Corporation Substrate cleaving tool and method
US6263941B1 (en) 1999-08-10 2001-07-24 Silicon Genesis Corporation Nozzle for cleaving substrates
US6500732B1 (en) 1999-08-10 2002-12-31 Silicon Genesis Corporation Cleaving process to fabricate multilayered substrates using low implantation doses
KR100320197B1 (ko) * 1999-08-21 2002-01-10 구자홍 직류전원 플라즈마중합 연속처리장치
US6653003B1 (en) 1999-10-12 2003-11-25 Reveo Inc. Fuel cell support and electrical interconnector
US6511516B1 (en) 2000-02-23 2003-01-28 Johnson Research & Development Co., Inc. Method and apparatus for producing lithium based cathodes
US6621212B1 (en) 1999-12-20 2003-09-16 Morgan Adhesives Company Electroluminescent lamp structure
US6639355B1 (en) 1999-12-20 2003-10-28 Morgan Adhesives Company Multidirectional electroluminescent lamp structures
US6624569B1 (en) 1999-12-20 2003-09-23 Morgan Adhesives Company Electroluminescent labels
US6962613B2 (en) 2000-03-24 2005-11-08 Cymbet Corporation Low-temperature fabrication of thin-film energy-storage devices
US6387563B1 (en) 2000-03-28 2002-05-14 Johnson Research & Development, Inc. Method of producing a thin film battery having a protective packaging
US6423106B1 (en) 2000-04-05 2002-07-23 Johnson Research & Development Method of producing a thin film battery anode
US6558825B1 (en) 2000-05-12 2003-05-06 Reveo, Inc. Fuel containment and recycling system
US20020110733A1 (en) * 2000-08-07 2002-08-15 Johnson Lonnie G. Systems and methods for producing multilayer thin film energy storage devices
US6402796B1 (en) 2000-08-07 2002-06-11 Excellatron Solid State, Llc Method of producing a thin film battery
AU2002215380A1 (en) 2000-10-23 2002-05-06 University Of Maryland, College Park Nanoscale solid-state polymeric battery system
TW560102B (en) * 2001-09-12 2003-11-01 Itn Energy Systems Inc Thin-film electrochemical devices on fibrous or ribbon-like substrates and methd for their manufacture and design
WO2003022564A1 (en) * 2001-09-12 2003-03-20 Itn Energy Systems, Inc. Apparatus and method for the design and manufacture of multifunctional composite materials with power integration
US20030059526A1 (en) * 2001-09-12 2003-03-27 Benson Martin H. Apparatus and method for the design and manufacture of patterned multilayer thin films and devices on fibrous or ribbon-like substrates
US7319057B2 (en) * 2001-10-30 2008-01-15 Ovonyx, Inc. Phase change material memory device
US7204862B1 (en) 2002-01-10 2007-04-17 Excellatron Solid State, Llc Packaged thin film batteries and methods of packaging thin film batteries
US20070094865A1 (en) * 2002-01-10 2007-05-03 Ji-Guang Zhang Packaged thin film batteries and methods of packaging thin film batteries
US7960054B2 (en) * 2002-01-10 2011-06-14 Excellatron Solid State Llc Packaged thin film batteries
KR100455425B1 (ko) * 2002-03-29 2004-11-06 주식회사 엘지이아이 전원공급이 조절되는 열교환기 표면처리장치
US8445130B2 (en) 2002-08-09 2013-05-21 Infinite Power Solutions, Inc. Hybrid thin-film battery
US6916679B2 (en) * 2002-08-09 2005-07-12 Infinite Power Solutions, Inc. Methods of and device for encapsulation and termination of electronic devices
US8394522B2 (en) 2002-08-09 2013-03-12 Infinite Power Solutions, Inc. Robust metal film encapsulation
US20070264564A1 (en) 2006-03-16 2007-11-15 Infinite Power Solutions, Inc. Thin film battery on an integrated circuit or circuit board and method thereof
US7993773B2 (en) 2002-08-09 2011-08-09 Infinite Power Solutions, Inc. Electrochemical apparatus with barrier layer protected substrate
US8431264B2 (en) 2002-08-09 2013-04-30 Infinite Power Solutions, Inc. Hybrid thin-film battery
US8021778B2 (en) 2002-08-09 2011-09-20 Infinite Power Solutions, Inc. Electrochemical apparatus with barrier layer protected substrate
US8236443B2 (en) 2002-08-09 2012-08-07 Infinite Power Solutions, Inc. Metal film encapsulation
US8404376B2 (en) 2002-08-09 2013-03-26 Infinite Power Solutions, Inc. Metal film encapsulation
US20040048157A1 (en) * 2002-09-11 2004-03-11 Neudecker Bernd J. Lithium vanadium oxide thin-film battery
US8187377B2 (en) * 2002-10-04 2012-05-29 Silicon Genesis Corporation Non-contact etch annealing of strained layers
US7603144B2 (en) * 2003-01-02 2009-10-13 Cymbet Corporation Active wireless tagging system on peel and stick substrate
US7294209B2 (en) * 2003-01-02 2007-11-13 Cymbet Corporation Apparatus and method for depositing material onto a substrate using a roll-to-roll mask
US6906436B2 (en) * 2003-01-02 2005-06-14 Cymbet Corporation Solid state activity-activated battery device and method
US20040131760A1 (en) * 2003-01-02 2004-07-08 Stuart Shakespeare Apparatus and method for depositing material onto multiple independently moving substrates in a chamber
US20040142203A1 (en) * 2003-01-07 2004-07-22 Woolley Christopher P. Hydrogen storage medium
US8728285B2 (en) 2003-05-23 2014-05-20 Demaray, Llc Transparent conductive oxides
US6852139B2 (en) * 2003-07-11 2005-02-08 Excellatron Solid State, Llc System and method of producing thin-film electrolyte
US6886240B2 (en) * 2003-07-11 2005-05-03 Excellatron Solid State, Llc Apparatus for producing thin-film electrolyte
US7211351B2 (en) 2003-10-16 2007-05-01 Cymbet Corporation Lithium/air batteries with LiPON as separator and protective barrier and method
JP2007518246A (ja) * 2004-01-06 2007-07-05 シンベット コーポーレーション 境界を有する１若しくはそれ以上の層を備える層状のバリア構造及び該バリア構造の製造方法
US7691536B2 (en) * 2004-02-20 2010-04-06 Excellatron Solid State, Llc Lithium oxygen batteries and method of producing same
US20080070087A1 (en) * 2004-02-20 2008-03-20 Excellatron Solid State, Llc Non-volatile cathodes for lithium oxygen batteries and method of producing same
US10566669B2 (en) 2004-02-20 2020-02-18 Johnson Ip Holding, Llc Lithium oxygen batteries having a carbon cloth current collector and method of producing same
US7665226B2 (en) * 2004-04-12 2010-02-23 Kitakyushu Foundation For The Advancement Of Industry, Science & Technology Method for drying under reduced pressure using microwaves
US7696089B1 (en) 2004-05-11 2010-04-13 Johnson Research & Development Co., Inc. Passivated thin film and method of producing same
US7478637B2 (en) * 2004-11-09 2009-01-20 Philip Morris Usa Inc. Continuous process for surface modification of cigarette filter materials
CN101087899A (zh) 2004-11-10 2007-12-12 德斯塔尔科技公司 光电装置的垂直生产
JP2008520102A (ja) * 2004-11-10 2008-06-12 デイスター テクノロジーズ，インコーポレイティド アルカリ含有層を用いた方法及び光起電力素子
US20060096536A1 (en) * 2004-11-10 2006-05-11 Daystar Technologies, Inc. Pressure control system in a photovoltaic substrate deposition apparatus
JP2008520101A (ja) * 2004-11-10 2008-06-12 デイスター テクノロジーズ，インコーポレイティド Ｃｉｇｓにおいて現場接合層を作製するための熱プロセス
DE602005017512D1 (de) 2004-12-08 2009-12-17 Symmorphix Inc Abscheidung von licoo2
US7959769B2 (en) 2004-12-08 2011-06-14 Infinite Power Solutions, Inc. Deposition of LiCoO2
US20070012244A1 (en) * 2005-07-15 2007-01-18 Cymbet Corporation Apparatus and method for making thin-film batteries with soft and hard electrolyte layers
WO2007011898A2 (en) * 2005-07-15 2007-01-25 Cymbet Corporation Apparatus and method for making thin-film batteries with soft and hard electrolyte layers
US7776478B2 (en) * 2005-07-15 2010-08-17 Cymbet Corporation Thin-film batteries with polymer and LiPON electrolyte layers and method
EP2000008B1 (de) 2006-03-26 2011-04-27 Lotus Applied Technology, Llc Atomlagenabscheidungssystem und verfahren zur beschichtung von flexiblen substraten
US8993410B2 (en) 2006-09-08 2015-03-31 Silicon Genesis Corporation Substrate cleaving under controlled stress conditions
US9362439B2 (en) 2008-05-07 2016-06-07 Silicon Genesis Corporation Layer transfer of films utilizing controlled shear region
US8293619B2 (en) 2008-08-28 2012-10-23 Silicon Genesis Corporation Layer transfer of films utilizing controlled propagation
US7811900B2 (en) * 2006-09-08 2010-10-12 Silicon Genesis Corporation Method and structure for fabricating solar cells using a thick layer transfer process
US8062708B2 (en) 2006-09-29 2011-11-22 Infinite Power Solutions, Inc. Masking of and material constraint for depositing battery layers on flexible substrates
US8197781B2 (en) 2006-11-07 2012-06-12 Infinite Power Solutions, Inc. Sputtering target of Li3PO4 and method for producing same
JP2008234850A (ja) * 2007-03-16 2008-10-02 Matsushita Electric Ind Co Ltd 電気化学素子とその電極の製造方法、製造装置
US9034525B2 (en) * 2008-06-27 2015-05-19 Johnson Ip Holding, Llc Ionically-conductive amorphous lithium lanthanum zirconium oxide
US8211496B2 (en) * 2007-06-29 2012-07-03 Johnson Ip Holding, Llc Amorphous lithium lanthanum titanate thin films manufacturing method
US20120196189A1 (en) 2007-06-29 2012-08-02 Johnson Ip Holding, Llc Amorphous ionically conductive metal oxides and sol gel method of preparation
US8784512B2 (en) * 2007-08-13 2014-07-22 University Of Virginia Patent Foundation Thin film battery synthesis by directed vapor deposition
US20090092903A1 (en) * 2007-08-29 2009-04-09 Johnson Lonnie G Low Cost Solid State Rechargeable Battery and Method of Manufacturing Same
TWI441937B (zh) 2007-12-21 2014-06-21 Infinite Power Solutions Inc 形成用於電解質薄膜之濺鍍靶材的方法
US8268488B2 (en) 2007-12-21 2012-09-18 Infinite Power Solutions, Inc. Thin film electrolyte for thin film batteries
US8518581B2 (en) 2008-01-11 2013-08-27 Inifinite Power Solutions, Inc. Thin film encapsulation for thin film batteries and other devices
US20090239132A1 (en) * 2008-03-20 2009-09-24 Excellatron Solid State, Llc Oxygen battery system
CN101983469B (zh) 2008-04-02 2014-06-04 无穷动力解决方案股份有限公司 与能量采集关联的储能装置的无源过电压/欠电压控制和保护
WO2009134697A2 (en) * 2008-04-30 2009-11-05 Applied Materials, Inc. Roll to roll oled production system
US7945344B2 (en) * 2008-06-20 2011-05-17 SAKT13, Inc. Computational method for design and manufacture of electrochemical systems
US9249502B2 (en) * 2008-06-20 2016-02-02 Sakti3, Inc. Method for high volume manufacture of electrochemical cells using physical vapor deposition
US8906523B2 (en) * 2008-08-11 2014-12-09 Infinite Power Solutions, Inc. Energy device with integral collector surface for electromagnetic energy harvesting and method thereof
US8330126B2 (en) * 2008-08-25 2012-12-11 Silicon Genesis Corporation Race track configuration and method for wafering silicon solar substrates
WO2010030743A1 (en) 2008-09-12 2010-03-18 Infinite Power Solutions, Inc. Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof
US8508193B2 (en) 2008-10-08 2013-08-13 Infinite Power Solutions, Inc. Environmentally-powered wireless sensor module
EP2351069A4 (de) * 2008-10-10 2014-06-04 Alta Devices Inc Chemische gasphasenabscheidung mit kontinuierlicher zuführung
US8329557B2 (en) 2009-05-13 2012-12-11 Silicon Genesis Corporation Techniques for forming thin films by implantation with reduced channeling
US9368772B1 (en) 2009-06-15 2016-06-14 Sakti3, Inc. Packaging and termination structure for a solid state battery
US8357464B2 (en) 2011-04-01 2013-01-22 Sakti3, Inc. Electric vehicle propulsion system and method utilizing solid-state rechargeable electrochemical cells
US8599572B2 (en) 2009-09-01 2013-12-03 Infinite Power Solutions, Inc. Printed circuit board with integrated thin film battery
BR112012008642A2 (pt) 2009-10-14 2017-06-13 Lotus Applied Tech Llc inibição de transporte de excesso de precursor entre zonas de precursor separadas em um sistema de deposição de camada atômica.
KR101688258B1 (ko) * 2010-01-19 2016-12-20 오보닉 배터리 컴퍼니, 아이엔씨. 저가, 고출력, 고에너지 밀도, 고체형의 바이폴라 금속 수소화물 배터리
CN102947976B (zh) 2010-06-07 2018-03-16 萨普拉斯特研究有限责任公司 可充电、高密度的电化学设备
KR101323812B1 (ko) 2011-02-28 2013-10-31 스템코 주식회사 연성금속적층판을 이용하는 박막 전지, 그의 제조 장치 및 그의 제조 방법
US10770745B2 (en) 2011-11-09 2020-09-08 Sakti3, Inc. Monolithically integrated thin-film solid state lithium battery device having multiple layers of lithium electrochemical cells
US9853325B2 (en) 2011-06-29 2017-12-26 Space Charge, LLC Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices
US10601074B2 (en) 2011-06-29 2020-03-24 Space Charge, LLC Rugged, gel-free, lithium-free, high energy density solid-state electrochemical energy storage devices
US11527774B2 (en) 2011-06-29 2022-12-13 Space Charge, LLC Electrochemical energy storage devices
US8301285B2 (en) 2011-10-31 2012-10-30 Sakti3, Inc. Computer aided solid state battery design method and manufacture of same using selected combinations of characteristics
US9127344B2 (en) 2011-11-08 2015-09-08 Sakti3, Inc. Thermal evaporation process for manufacture of solid state battery devices
IN2014KN01408A (de) 2012-01-05 2015-10-23 Electrovaya Inc
WO2013131005A2 (en) 2012-03-01 2013-09-06 Excellatron Solid State, Llc High capacity solid state composite cathode, solid state composite separator, solid-state rechargeable lithium battery and methods of making same
CN104247132A (zh) * 2012-03-30 2014-12-24 小岛冲压工业株式会社 锂离子二次电池的制造方法及制造装置
US10084168B2 (en) 2012-10-09 2018-09-25 Johnson Battery Technologies, Inc. Solid-state battery separators and methods of fabrication
US9627717B1 (en) 2012-10-16 2017-04-18 Sakti3, Inc. Embedded solid-state battery
US20140166989A1 (en) * 2012-12-17 2014-06-19 Universal Display Corporation Manufacturing flexible organic electronic devices
US9478797B2 (en) * 2013-01-25 2016-10-25 Applejack 199 L.P. System, method and apparatus for forming a thin film lithium ion battery
US20170301958A1 (en) * 2014-10-03 2017-10-19 Su Xiang Deng Plasma deposition to fabricate lithium batteries
US9627709B2 (en) 2014-10-15 2017-04-18 Sakti3, Inc. Amorphous cathode material for battery device
EP4324577A1 (de) 2015-12-16 2024-02-21 6K Inc. Verfahren zur herstellung von kugelförmigen, dehydrierten titanlegierungspartikeln
JP6763965B2 (ja) 2015-12-21 2020-09-30 ジョンソン・アイピー・ホールディング・エルエルシー 固体電池、セパレータ、電極および製造方法
US10218044B2 (en) 2016-01-22 2019-02-26 Johnson Ip Holding, Llc Johnson lithium oxygen electrochemical engine
GB2548361B (en) 2016-03-15 2020-12-02 Dyson Technology Ltd Method of fabricating an energy storage device
EP3475340B1 (de) * 2016-06-22 2021-04-14 The Government of the United States of America, as represented by the Secretary of the Navy P(cn)3-reaktionen mit lithiumdicynamid zur erzeugung erweiterter lithiierter kohlenstoffphosphonitrid-feststoffe
KR102162773B1 (ko) * 2016-10-07 2020-10-07 주식회사 엘지화학 프리-슬리팅 공정을 포함하는 이차전지용 전극의 제조 방법
CN110914469A (zh) * 2017-07-27 2020-03-24 瑞士艾发科技 渗透屏障
GB2566472B (en) 2017-09-14 2020-03-04 Dyson Technology Ltd Magnesium salts
GB2566473B (en) 2017-09-14 2020-03-04 Dyson Technology Ltd Magnesium salts
GB2569388B (en) 2017-12-18 2022-02-02 Dyson Technology Ltd Compound
GB2569390A (en) 2017-12-18 2019-06-19 Dyson Technology Ltd Compound
GB2569387B (en) 2017-12-18 2022-02-02 Dyson Technology Ltd Electrode
GB2569392B (en) 2017-12-18 2022-01-26 Dyson Technology Ltd Use of aluminium in a cathode material
EP3762989A4 (de) 2018-03-07 2021-12-15 Space Charge, LLC Dünnfilm-festkörper-energiespeichervorrichtungen
WO2020102362A1 (en) * 2018-11-13 2020-05-22 Alliance For Sustainable Energy, Llc Solid-state energy storage devices and methods of making the same
SG11202111576QA (en) 2019-04-30 2021-11-29 6K Inc Mechanically alloyed powder feedstock
JP2023512391A (ja) 2019-11-18 2023-03-27 シックスケー インコーポレイテッド 球形粉体用の特異な供給原料及び製造方法
US11590568B2 (en) 2019-12-19 2023-02-28 6K Inc. Process for producing spheroidized powder from feedstock materials
EP4173060A1 (de) 2020-06-25 2023-05-03 6K Inc. Mikroverbundlegierungsstruktur
AU2021349358A1 (en) 2020-09-24 2023-02-09 6K Inc. Systems, devices, and methods for starting plasma
US11919071B2 (en) 2020-10-30 2024-03-05 6K Inc. Systems and methods for synthesis of spheroidized metal powders
CN114427080A (zh) * 2022-01-17 2022-05-03 广州华星光电半导体显示技术有限公司 一种pvd设备镀铜膜工艺

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4172319A (en) * 1977-06-30 1979-10-30 Polaroid Corporation Electrical cells and batteries and methods of making the same
US4579792A (en) * 1982-01-20 1986-04-01 Polaroid Corporation Lithium batteries with organic slurry cathodes
EP0122092A3 (de) * 1983-04-06 1985-07-10 General Engineering Radcliffe Limited Vorrichtung zur Vakuumbeschichtung
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
JPH02148715A (ja) * 1988-11-29 1990-06-07 Canon Inc 半導体デバイスの連続形成装置
US5096667A (en) * 1989-11-24 1992-03-17 Energy Conversion Devices, Inc. Catalytic hydrogen storage electrode materials for use in electrochemical cells and electrochemical cells incorporating the materials
US5090356A (en) * 1991-06-28 1992-02-25 United Solar Systems Corporation Chemically active isolation passageway for deposition chambers
US5326652A (en) * 1993-01-25 1994-07-05 Micron Semiconductor, Inc. Battery package and method using flexible polymer films having a deposited layer of an inorganic material
US5348822A (en) * 1992-11-12 1994-09-20 Ovonic Battery Company, Inc. Chemically and compositionally modified solid solution disordered multiphase nickel hydroxide positive electrode for alkaline rechargeable electrochemical cells
US5344728A (en) * 1992-11-12 1994-09-06 Ovonic Battery Company, Inc. Compositionally and structurally disordered multiphase nickel hydroxide positive electrode for alkaline rechargeable electrochemical cells

Also Published As

Publication number Publication date
US5411592A (en) 1995-05-02
EP0764221A1 (de) 1997-03-26
EP0764221B1 (de) 2003-01-02
AU684192B2 (en) 1997-12-04
WO1995033863A1 (en) 1995-12-14
CA2190856A1 (en) 1995-12-14
AU2814895A (en) 1996-01-04
CA2190856C (en) 2006-05-09
EP0764221A4 (de) 2000-01-26
KR970703442A (ko) 1997-07-03
KR100326345B1 (ko) 2002-09-27

Similar Documents

Publication Publication Date Title
DE69529284D1 (de) Vorrichtung zum abscheiden von dünnfilm-festkörperbatterien
DE59606538D1 (de) Vorrichtung zum Fördern von Packungen
DE69330389T2 (de) Vorrichtung zum Verbinden von Filmen
DE69533052D1 (de) Vorrichtung zum beseitigen statischer ladung
DE69524110T2 (de) Vorrichtung zum verschliessen von giebelpackungen
ATA154394A (de) Vorrichtung zum zeitpunktgerechten einnehmen von medikamenten
DE69013497D1 (de) Vorrichtung zum beschichten von papierbahnen.
DE69518466T2 (de) Vorrichtung zum Zusammenbau von Filmkassetten
DE69535122D1 (de) Vorrichtung zum Abscheiden von dünnen Schichten
DE69733143D1 (de) Fehlertolerante vorrichtung zum vermitteln von atm-zellen
DE69612531T2 (de) Elektrochemische Vorrichtung
DE69617534T2 (de) Vorrichtung zum Überführen von Gegenständen
DE69520018D1 (de) Vorrichtung zum Verbinden von Bändern
DE69423572D1 (de) Vorrichtung zum kontinuierlichen Filmwickeln
DE29620216U1 (de) Vorrichtung zum Verschweißen von Folienrändern
DE59401182D1 (de) Vorrichtung zum Ablegen von Bogen
DE69211319D1 (de) Vorrichtung zum Zuführen von Negativfilmen
DE59501043D1 (de) Vorrichtung zum stapeln von bögen
DE29603583U1 (de) Vorrichtung zum Aufbewahren von Filmen
DE9404520U1 (de) Vorrichtung zum Einstellen von Zweirädern
DE9416639U1 (de) Vorrichtung zum Aufschneiden von Folienrollen
DE9406957U1 (de) Vorrichtung zum Ablegen
ATA31996A (de) Vorrichtung zum aufladen von akkumulatoren
DE69517736D1 (de) Abdeckvorrichtung für Negativfilme
DE59610234D1 (de) Vorrichtung zum Zuführen von Filmpatronen

Legal Events

Date Code Title Description
8332 No legal effect for de