KR970069111A - 초고순도 헬륨을 전달하는 방법 및 장치 - Google Patents

초고순도 헬륨을 전달하는 방법 및 장치 Download PDF

Info

Publication number
KR970069111A
KR970069111A KR1019970014323A KR19970014323A KR970069111A KR 970069111 A KR970069111 A KR 970069111A KR 1019970014323 A KR1019970014323 A KR 1019970014323A KR 19970014323 A KR19970014323 A KR 19970014323A KR 970069111 A KR970069111 A KR 970069111A
Authority
KR
South Korea
Prior art keywords
helium
filter
liquid
supercritical
storage tank
Prior art date
Application number
KR1019970014323A
Other languages
English (en)
Inventor
카스텔라네 프레데릭
브렝 피에르
브와셍 쟝-끌로드
Original Assignee
띠에리 쉬에르
레르 리뀌드, 소시에떼 아노님 뿌르 레뛰드 에 렉스쁠로와따시옹 데 프로세데 죠르쥬 끌로드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 띠에리 쉬에르, 레르 리뀌드, 소시에떼 아노님 뿌르 레뛰드 에 렉스쁠로와따시옹 데 프로세데 죠르쥬 끌로드 filed Critical 띠에리 쉬에르
Publication of KR970069111A publication Critical patent/KR970069111A/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • C01B23/001—Purification or separation processes of noble gases
    • C01B23/0036—Physical processing only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • B01J4/008—Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B23/00—Noble gases; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0029—Obtaining noble gases
    • C01B2210/0031—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341—Filters
    • F17C2205/0344—Sinter type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0115—Single phase dense or supercritical, i.e. at high pressure and high density
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0337—Heat exchange with the fluid by cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/01—Intermediate tanks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0408—Level of content in the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0421—Mass or weight of the content of the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0447—Composition; Humidity
    • F17C2250/0452—Concentration of a product
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0636—Flow or movement of content
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/84—Processes or apparatus using other separation and/or other processing means using filter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/30—Helium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/54—Improvements relating to the production of bulk chemicals using solvents, e.g. supercritical solvents or ionic liquids
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/902—Apparatus
    • Y10S62/908—Filter or absorber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

본 발명은 초고순도의 헬륨을 사용 라인(1)로 전달하는 방법에 관한 것으로서, 본 발명의 방법에서는 헬륨을 저장 탱크(3)으로부터 액체 또는 초임계 형태로 회구하고, 이를 액체 또는 초임계 형태로 (4에서)여과하며, 여과된 헬륨을 기화시키고, 수득한 헬륨 가스를 사용 라인(1)로 급송한다.
본 발명은 집적 회로 웨이퍼의 냉각에 적용된다.

Description

초고순도 헬륨을 전달하는 방법 및 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 장치를 도시한 개요도이다.

Claims (11)

  1. 초고순도 헬륨을 사용 라인(1)로 전달하는 방법에 있어서, 헬륨을 저장탱크(3)으로부터 액체 또는 초임계 형태로 회수하고, 이를 액체 또는 초임계 형태로 여과하고(4에서), 여과된 헬륨을 기화시킨후에, 수득한 헬륨 가스를 사용 라인(1)로 급송하는 것을 특징으로 하는 방법.
  2. 제1항에 있어서, 여과된 헬륨을 일시적으로 완충 용기(5)에 액체 또는 초이임계 형태로 저장하고, 상기 헬륨 가스를 상기 완충 용기로부터 인출하는 것을 특징으로 하는 방법.
  3. 제2항에 있어서, 저장탱크(3)으로부터 회수된 액체 또는 초임계 헬륨의 유속을 완충 용기(5)에 함유된 액체 또는 초임계 헬륨의 양의 측정치(29에서)를 기준으로 하여 조정하는(21에서)것을 특징으로 하는 방법.
  4. 제3항에 있어서, 상기 필터(4)를 냉각시키는(32에서)것을 특징으로 하는 방법.
  5. 제1항 내지 제4항중 어느 한 항에 있어서, 상기 회수 단계를 개시하기전에 필터(4)를 저장탱크(3)또는 완충 용기(5)로부터 취한 헬륨 스트림으로 세척 및 냉각하며, 상기 세척 및 냉각용 헬륨은 배출시키는(17,22에서)것을 특징으로 하는 방법.
  6. 제1항 내지 제4항중 어느 한 항에 있어서, 액체 또는 초임계 헬륨을 저장 탱크(3)으로부터 필터(4)로 직접 통과시키는 것을 특징으로 하는 방법.
  7. 제1항 내지 제4항중 어느 한 항에 있어서, 예정된 양의 헬륨을 저장 탱크(3)으로부터 회수한 후에, 필터(4)를 가열하고, 이어서 저장탱크(3)또는 완충용기(5)로부터 취한 헬륨 스트림으로 필터를 세척 및 냉각시키고, 세척 및 냉각용 헬륨은 배출시키는(17,22에서)것을 특징으로 하는 방법.
  8. 직렬로 장착된 하기 구성요소들을 포함하는, 초고순도 헬륨을 전달하기 위한 장치; -액체 또는 초임계 헬륨 저장 탱크(3); -저장탱크(3)의 하부에 연결된, 액체 또는 초임계 헬륨을 여과하기에 적합한 필터(4); -상기 필터(4)의 배출구에 연결된, 여과된 헬륨을 기화시키기 위한 수단(5); 및 -기화수단의 배출구에 연결된 사용라인(1).
  9. 제8항에 있어서, 여과된 액체 또는 초임계 헬륨을 일시적으로 저장하기 위한 완충용기(5)를 추가로 포함하며, 상기 용기는 상기 기화 수단을 형성하는것을 특징으로 하는 장치.
  10. 제9항에 있어서, 필터(4)와 완충 용기(5)사이에 배열되고 상기 완충 용기내에 함유된 액체 또는 초임계 헬륨의 양에 의해 제어되는 유속 제어 밸브(21)을 추가로 포함하는 것을 특징으로 하는 장치.
  11. 제10항에 있어서, 상기 필터(4)가 냉각수단(32)을 구비하는 것을 특징으로 하는 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970014323A 1996-04-19 1997-04-18 초고순도 헬륨을 전달하는 방법 및 장치 KR970069111A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9604955 1996-04-19
FR9604955A FR2747595B1 (fr) 1996-04-19 1996-04-19 Procede et installation de fourniture d'helium ultra-pur

Publications (1)

Publication Number Publication Date
KR970069111A true KR970069111A (ko) 1997-11-07

Family

ID=9491392

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970014323A KR970069111A (ko) 1996-04-19 1997-04-18 초고순도 헬륨을 전달하는 방법 및 장치

Country Status (7)

Country Link
US (1) US5916247A (ko)
EP (1) EP0802160B1 (ko)
JP (1) JPH10122491A (ko)
KR (1) KR970069111A (ko)
CA (1) CA2203090A1 (ko)
DE (1) DE69701415T2 (ko)
FR (1) FR2747595B1 (ko)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
FR2774006B1 (fr) * 1998-01-23 2000-02-18 Air Liquide Installation et procede de filtration en phase liquide d'un fluide cryogenique
FR2781868B1 (fr) 1998-07-29 2000-09-15 Air Liquide Installation et procede de fourniture d'helium a plusieurs lignes de production
SG105459A1 (en) * 2000-07-24 2004-08-27 Micron Technology Inc Mems heat pumps for integrated circuit heat dissipation
JP5074433B2 (ja) * 2009-02-20 2012-11-14 大陽日酸株式会社 水素除去装置
US20110023501A1 (en) * 2009-07-30 2011-02-03 Thomas Robert Schulte Methods and systems for bulk ultra-high purity helium supply and usage
KR101103262B1 (ko) 2010-07-23 2012-01-11 한국과학기술원 고압액상화물 비상방출 시스템
RU2477429C2 (ru) * 2010-10-08 2013-03-10 Федеральное государственное унитарное предприятие "Центр эксплуатации объектов наземной космической инфраструктуры" (ФГУП "ЦЭНКИ") Устройство для охлаждения и очистки газообразного гелия
GB201210927D0 (en) 2012-06-20 2012-08-01 Oxford Instr Nanotechnology Tools Ltd Reduction of blockages in a cryogenic refrigerator system
FR3008473B1 (fr) * 2013-07-11 2015-07-17 Air Liquide Procede et station de remplissage de gaz
DE102016006142A1 (de) * 2016-05-18 2017-11-23 Linde Aktiengesellschaft Verfahren und Entnahmevorrichtung zur Entnahme von Helium aus einem Druckbehälter
DE102018127826A1 (de) 2018-11-07 2020-05-07 Linde Aktiengesellschaft Verfahren und Anlage zur Reinigung von Helium
US11629859B2 (en) 2020-06-28 2023-04-18 Marlin Gas Services, Llc Gas control system
US11629887B2 (en) 2020-06-28 2023-04-18 Marlin Gas Services, Llc Gas control system
US11359767B2 (en) * 2020-06-28 2022-06-14 Marlin Gas Services, Llc Gas control system

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL25773C (ko) * 1929-04-19
US3192730A (en) * 1963-02-05 1965-07-06 James E Webb Helium refining by superfluidity
NL6617123A (ko) * 1966-02-04 1967-08-07
US3415069A (en) * 1966-10-31 1968-12-10 Nasa High pressure helium purifier
US3683589A (en) * 1970-09-08 1972-08-15 Us Interior Helium purifier
FR2510539A1 (fr) * 1981-07-28 1983-02-04 Expertises Sa Cie Maritime Procede et installation d'epuration de l'helium contenu dans un melange de gaz
DE3417055C2 (de) * 1984-05-09 1986-05-07 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Helium-II-Phasentrenner
JPS62276388A (ja) * 1986-05-23 1987-12-01 株式会社神戸製鋼所 Ｈｅ精製方法
SU1419241A1 (ru) * 1986-06-19 1991-09-07 Институт химии АН СССР Способ получени высокочистого гели
US4717406A (en) * 1986-07-07 1988-01-05 Liquid Air Corporation Cryogenic liquified gas purification method and apparatus
US4766731A (en) * 1987-09-01 1988-08-30 Union Carbide Corporation Method to deliver ultra high purity helium gas to a use point
JPH0622224B2 (ja) * 1988-03-05 1994-03-23 大阪酸素工業株式会社 パーティクルが少ないか又は含まない液化二酸化炭素の供給
RU2009412C1 (ru) * 1991-06-28 1994-03-15 Санкт-Петербургский технологический институт холодильной промышленности Установка для очистки гелийсодержащих смесей от примесей
FR2694631B1 (fr) * 1992-08-10 1994-11-04 Carrier Sa Procédé et dispositif de détermination de la phase d'un gaz comprimé; procédé et dispositif de transfert d'un gaz comprimé les mettant en Óoeuvre.
US5377491A (en) * 1992-12-11 1995-01-03 Praxair Technology, Inc. Coolant recovery process
US5386707A (en) * 1992-12-31 1995-02-07 Praxair Technology, Inc. Withdrawal of cryogenic helium with low impurity from a vessel
JPH06241654A (ja) * 1993-02-19 1994-09-02 Hitachi Ltd ヘリウム精製装置
JP3404599B2 (ja) * 1993-03-24 2003-05-12 宇宙開発事業団 ヘリウムガス中の微量水分の除去装置
US5557924A (en) * 1994-09-20 1996-09-24 Vacuum Barrier Corporation Controlled delivery of filtered cryogenic liquid

Also Published As

Publication number Publication date
FR2747595B1 (fr) 1998-08-21
US5916247A (en) 1999-06-29
DE69701415T2 (de) 2000-09-07
EP0802160B1 (fr) 2000-03-15
EP0802160A1 (fr) 1997-10-22
JPH10122491A (ja) 1998-05-15
DE69701415D1 (de) 2000-04-20
FR2747595A1 (fr) 1997-10-24
CA2203090A1 (fr) 1997-10-19

Similar Documents

Publication Publication Date Title
KR970069111A (ko) 초고순도 헬륨을 전달하는 방법 및 장치
US5772783A (en) Method for rejuvenating pressurized fluid solvent used in cleaning a fabric article
US9605895B2 (en) Method and apparatus for producing high-purity liquefied carbon dioxide
US4417909A (en) Gas separation process
JP2922791B2 (ja) 液化ガスを使用した安価な洗浄装置
KR100512353B1 (ko) 고압 초고순도 생성물의 생성 및 전달 시스템
JP2000028264A (ja) 気相生成物を使用地点に配送するシステムおよび方法
US4759848A (en) Sterilization of cryogenic liquids by ultrafiltration
JPH0413626B2 (ko)
US7069742B2 (en) High-pressure delivery system for ultra high purity liquid carbon dioxide
IL91391A (en) Process and device for extracting solid materials by using a solvent
JP2001261320A (ja) 精製液化炭酸ガスの供給方法と装置並びにドライアイススノーによる洗浄方法と装置
CN110582836B (zh) 用于在半导体应用中使用超临界流体的方法和设备
JP2016064380A (ja) 固液分離装置
JP2000308862A (ja) 超臨界又は亜臨界流体を用いた洗浄方法及びその装置
KR19980018341A (ko) 기체상 헬륨을 재액화하는 방법 및 장치
US2012080A (en) Method of and apparatus for separating and purifying helium from a gaseous mixture
JPH1015334A (ja) 炭酸ガス精製方法とその装置
JP4231376B2 (ja) 超臨界流体処理装置及びその方法
JP2003088701A (ja) 溶剤再生装置及び方法
US3451196A (en) Gas purification
US682050A (en) Apparatus for separating solvent vapor from air.
JP2012240876A (ja) 高純度液化炭酸ガス製造方法及び装置
JPS63166403A (ja) ガス−樹脂分画方法及び装置
JPS63205102A (ja) 特定成分分離装置

Legal Events

Date Code Title Description
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid