KR970064179U - 현상 및 세정 장치 - Google Patents

현상 및 세정 장치

Info

Publication number
KR970064179U
KR970064179U KR2019960012871U KR19960012871U KR970064179U KR 970064179 U KR970064179 U KR 970064179U KR 2019960012871 U KR2019960012871 U KR 2019960012871U KR 19960012871 U KR19960012871 U KR 19960012871U KR 970064179 U KR970064179 U KR 970064179U
Authority
KR
South Korea
Prior art keywords
developing
cleaning device
cleaning
Prior art date
Application number
KR2019960012871U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960012871U priority Critical patent/KR970064179U/ko
Publication of KR970064179U publication Critical patent/KR970064179U/ko

Links

KR2019960012871U 1996-05-22 1996-05-22 현상 및 세정 장치 KR970064179U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960012871U KR970064179U (ko) 1996-05-22 1996-05-22 현상 및 세정 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960012871U KR970064179U (ko) 1996-05-22 1996-05-22 현상 및 세정 장치

Publications (1)

Publication Number Publication Date
KR970064179U true KR970064179U (ko) 1997-12-11

Family

ID=60925977

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960012871U KR970064179U (ko) 1996-05-22 1996-05-22 현상 및 세정 장치

Country Status (1)

Country Link
KR (1) KR970064179U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100873152B1 (ko) * 2007-08-03 2008-12-10 세메스 주식회사 기판 세정 장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100873152B1 (ko) * 2007-08-03 2008-12-10 세메스 주식회사 기판 세정 장치

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application