DE9406044U1 - Reinigungsvorrichtung - Google Patents

Reinigungsvorrichtung

Info

Publication number
DE9406044U1
DE9406044U1 DE9406044U DE9406044U DE9406044U1 DE 9406044 U1 DE9406044 U1 DE 9406044U1 DE 9406044 U DE9406044 U DE 9406044U DE 9406044 U DE9406044 U DE 9406044U DE 9406044 U1 DE9406044 U1 DE 9406044U1
Authority
DE
Germany
Prior art keywords
cleaning device
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9406044U
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIU HSIEN-HSIN TAOYUAN
Original Assignee
CHIU HSIEN-HSIN TAOYUAN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIU HSIEN-HSIN TAOYUAN filed Critical CHIU HSIEN-HSIN TAOYUAN
Priority to DE9406044U priority Critical patent/DE9406044U1/de
Publication of DE9406044U1 publication Critical patent/DE9406044U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/044—Cleaning involving contact with liquid using agitated containers in which the liquid and articles or material are placed
DE9406044U 1994-04-12 1994-04-12 Reinigungsvorrichtung Expired - Lifetime DE9406044U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9406044U DE9406044U1 (de) 1994-04-12 1994-04-12 Reinigungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9406044U DE9406044U1 (de) 1994-04-12 1994-04-12 Reinigungsvorrichtung

Publications (1)

Publication Number Publication Date
DE9406044U1 true DE9406044U1 (de) 1994-06-01

Family

ID=6907207

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9406044U Expired - Lifetime DE9406044U1 (de) 1994-04-12 1994-04-12 Reinigungsvorrichtung

Country Status (1)

Country Link
DE (1) DE9406044U1 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4420604A1 (de) * 1994-06-13 1995-12-14 Mivag Ag Vakuum-Zentrifugiereinrichtung und Reinigungsverfahren
DE10014579A1 (de) * 2000-03-27 2001-10-18 Wilfred Antony Gmbh Verfahren und Vorrichtung zum Entfernen von Beschichtungsmitteln von Teilen
DE102005003093A1 (de) * 2005-01-22 2006-08-10 Dürr Ecoclean GmbH Reinigungsanlage
WO2015074749A1 (de) * 2013-11-21 2015-05-28 Thyssenkrupp Industrial Solutions Ag Waschvorrichtung für rotations-symmetrische maschinenbauteile

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4420604A1 (de) * 1994-06-13 1995-12-14 Mivag Ag Vakuum-Zentrifugiereinrichtung und Reinigungsverfahren
DE4420604C2 (de) * 1994-06-13 2003-05-08 Wmv Appbau Gmbh & Co Kg Vakuum-Zentrifugiereinrichtung und Reinigungsverfahren
DE10014579A1 (de) * 2000-03-27 2001-10-18 Wilfred Antony Gmbh Verfahren und Vorrichtung zum Entfernen von Beschichtungsmitteln von Teilen
DE10014579B4 (de) * 2000-03-27 2007-09-06 Haug Chemie Gmbh Verfahren und Vorrichtung zum Entfernen von Beschichtungsmitteln von Teilen
DE102005003093A1 (de) * 2005-01-22 2006-08-10 Dürr Ecoclean GmbH Reinigungsanlage
DE102005003093B4 (de) * 2005-01-22 2018-12-13 Ecoclean Gmbh Reinigungsanlage
WO2015074749A1 (de) * 2013-11-21 2015-05-28 Thyssenkrupp Industrial Solutions Ag Waschvorrichtung für rotations-symmetrische maschinenbauteile

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