KR970059844U - Pedestal of Wafer Etching Equipment - Google Patents

Pedestal of Wafer Etching Equipment

Info

Publication number
KR970059844U
KR970059844U KR2019960009650U KR19960009650U KR970059844U KR 970059844 U KR970059844 U KR 970059844U KR 2019960009650 U KR2019960009650 U KR 2019960009650U KR 19960009650 U KR19960009650 U KR 19960009650U KR 970059844 U KR970059844 U KR 970059844U
Authority
KR
South Korea
Prior art keywords
pedestal
etching equipment
wafer etching
wafer
equipment
Prior art date
Application number
KR2019960009650U
Other languages
Korean (ko)
Other versions
KR200232213Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960009650U priority Critical patent/KR200232213Y1/en
Publication of KR970059844U publication Critical patent/KR970059844U/en
Application granted granted Critical
Publication of KR200232213Y1 publication Critical patent/KR200232213Y1/en

Links

KR2019960009650U 1996-04-29 1996-04-29 Pedestal of Wafer Etching Equipment KR200232213Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960009650U KR200232213Y1 (en) 1996-04-29 1996-04-29 Pedestal of Wafer Etching Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960009650U KR200232213Y1 (en) 1996-04-29 1996-04-29 Pedestal of Wafer Etching Equipment

Publications (2)

Publication Number Publication Date
KR970059844U true KR970059844U (en) 1997-11-10
KR200232213Y1 KR200232213Y1 (en) 2001-11-30

Family

ID=60927982

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960009650U KR200232213Y1 (en) 1996-04-29 1996-04-29 Pedestal of Wafer Etching Equipment

Country Status (1)

Country Link
KR (1) KR200232213Y1 (en)

Also Published As

Publication number Publication date
KR200232213Y1 (en) 2001-11-30

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090427

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee