KR970059843U - Wafer Etching Equipment - Google Patents

Wafer Etching Equipment

Info

Publication number
KR970059843U
KR970059843U KR2019960009649U KR19960009649U KR970059843U KR 970059843 U KR970059843 U KR 970059843U KR 2019960009649 U KR2019960009649 U KR 2019960009649U KR 19960009649 U KR19960009649 U KR 19960009649U KR 970059843 U KR970059843 U KR 970059843U
Authority
KR
South Korea
Prior art keywords
etching equipment
wafer etching
wafer
equipment
etching
Prior art date
Application number
KR2019960009649U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960009649U priority Critical patent/KR970059843U/en
Publication of KR970059843U publication Critical patent/KR970059843U/en

Links

KR2019960009649U 1996-04-29 1996-04-29 Wafer Etching Equipment KR970059843U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960009649U KR970059843U (en) 1996-04-29 1996-04-29 Wafer Etching Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960009649U KR970059843U (en) 1996-04-29 1996-04-29 Wafer Etching Equipment

Publications (1)

Publication Number Publication Date
KR970059843U true KR970059843U (en) 1997-11-10

Family

ID=60927955

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960009649U KR970059843U (en) 1996-04-29 1996-04-29 Wafer Etching Equipment

Country Status (1)

Country Link
KR (1) KR970059843U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11087999B2 (en) 2016-12-30 2021-08-10 Snw Company Limited Buffer chamber unit for wafer processing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11087999B2 (en) 2016-12-30 2021-08-10 Snw Company Limited Buffer chamber unit for wafer processing equipment

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application