KR970059843U - Wafer Etching Equipment - Google Patents
Wafer Etching EquipmentInfo
- Publication number
- KR970059843U KR970059843U KR2019960009649U KR19960009649U KR970059843U KR 970059843 U KR970059843 U KR 970059843U KR 2019960009649 U KR2019960009649 U KR 2019960009649U KR 19960009649 U KR19960009649 U KR 19960009649U KR 970059843 U KR970059843 U KR 970059843U
- Authority
- KR
- South Korea
- Prior art keywords
- etching equipment
- wafer etching
- wafer
- equipment
- etching
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960009649U KR970059843U (en) | 1996-04-29 | 1996-04-29 | Wafer Etching Equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960009649U KR970059843U (en) | 1996-04-29 | 1996-04-29 | Wafer Etching Equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970059843U true KR970059843U (en) | 1997-11-10 |
Family
ID=60927955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960009649U KR970059843U (en) | 1996-04-29 | 1996-04-29 | Wafer Etching Equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970059843U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11087999B2 (en) | 2016-12-30 | 2021-08-10 | Snw Company Limited | Buffer chamber unit for wafer processing equipment |
-
1996
- 1996-04-29 KR KR2019960009649U patent/KR970059843U/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11087999B2 (en) | 2016-12-30 | 2021-08-10 | Snw Company Limited | Buffer chamber unit for wafer processing equipment |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |