KR970059814U - Semiconductor manufacturing equipment - Google Patents

Semiconductor manufacturing equipment

Info

Publication number
KR970059814U
KR970059814U KR2019960006985U KR19960006985U KR970059814U KR 970059814 U KR970059814 U KR 970059814U KR 2019960006985 U KR2019960006985 U KR 2019960006985U KR 19960006985 U KR19960006985 U KR 19960006985U KR 970059814 U KR970059814 U KR 970059814U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
equipment
semiconductor
manufacturing
Prior art date
Application number
KR2019960006985U
Other languages
Korean (ko)
Other versions
KR200157596Y1 (en
Inventor
이영출
정우성
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to KR2019960006985U priority Critical patent/KR200157596Y1/en
Publication of KR970059814U publication Critical patent/KR970059814U/en
Application granted granted Critical
Publication of KR200157596Y1 publication Critical patent/KR200157596Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019960006985U 1996-04-02 1996-04-02 Semiconductor fabricating apparatus KR200157596Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960006985U KR200157596Y1 (en) 1996-04-02 1996-04-02 Semiconductor fabricating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960006985U KR200157596Y1 (en) 1996-04-02 1996-04-02 Semiconductor fabricating apparatus

Publications (2)

Publication Number Publication Date
KR970059814U true KR970059814U (en) 1997-11-10
KR200157596Y1 KR200157596Y1 (en) 1999-10-01

Family

ID=19453173

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960006985U KR200157596Y1 (en) 1996-04-02 1996-04-02 Semiconductor fabricating apparatus

Country Status (1)

Country Link
KR (1) KR200157596Y1 (en)

Also Published As

Publication number Publication date
KR200157596Y1 (en) 1999-10-01

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20070612

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee