KR970056059U - Etching device for semiconductor manufacturing equipment - Google Patents

Etching device for semiconductor manufacturing equipment

Info

Publication number
KR970056059U
KR970056059U KR2019960003773U KR19960003773U KR970056059U KR 970056059 U KR970056059 U KR 970056059U KR 2019960003773 U KR2019960003773 U KR 2019960003773U KR 19960003773 U KR19960003773 U KR 19960003773U KR 970056059 U KR970056059 U KR 970056059U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
etching device
etching
equipment
Prior art date
Application number
KR2019960003773U
Other languages
Korean (ko)
Other versions
KR200224863Y1 (en
Inventor
서범문
Original Assignee
현대반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체 주식회사 filed Critical 현대반도체 주식회사
Priority to KR2019960003773U priority Critical patent/KR200224863Y1/en
Publication of KR970056059U publication Critical patent/KR970056059U/en
Application granted granted Critical
Publication of KR200224863Y1 publication Critical patent/KR200224863Y1/en

Links

KR2019960003773U 1996-03-02 1996-03-02 Etching Equipment of Semiconductor Manufacturing Equipment KR200224863Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960003773U KR200224863Y1 (en) 1996-03-02 1996-03-02 Etching Equipment of Semiconductor Manufacturing Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960003773U KR200224863Y1 (en) 1996-03-02 1996-03-02 Etching Equipment of Semiconductor Manufacturing Equipment

Publications (2)

Publication Number Publication Date
KR970056059U true KR970056059U (en) 1997-10-13
KR200224863Y1 KR200224863Y1 (en) 2001-11-30

Family

ID=70918109

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960003773U KR200224863Y1 (en) 1996-03-02 1996-03-02 Etching Equipment of Semiconductor Manufacturing Equipment

Country Status (1)

Country Link
KR (1) KR200224863Y1 (en)

Also Published As

Publication number Publication date
KR200224863Y1 (en) 2001-11-30

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20060220

Year of fee payment: 6

LAPS Lapse due to unpaid annual fee