KR970059832U - Wafer Cleaning Equipment - Google Patents

Wafer Cleaning Equipment

Info

Publication number
KR970059832U
KR970059832U KR2019960006860U KR19960006860U KR970059832U KR 970059832 U KR970059832 U KR 970059832U KR 2019960006860 U KR2019960006860 U KR 2019960006860U KR 19960006860 U KR19960006860 U KR 19960006860U KR 970059832 U KR970059832 U KR 970059832U
Authority
KR
South Korea
Prior art keywords
cleaning equipment
wafer cleaning
wafer
equipment
cleaning
Prior art date
Application number
KR2019960006860U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960006860U priority Critical patent/KR970059832U/en
Publication of KR970059832U publication Critical patent/KR970059832U/en

Links

KR2019960006860U 1996-04-01 1996-04-01 Wafer Cleaning Equipment KR970059832U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960006860U KR970059832U (en) 1996-04-01 1996-04-01 Wafer Cleaning Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960006860U KR970059832U (en) 1996-04-01 1996-04-01 Wafer Cleaning Equipment

Publications (1)

Publication Number Publication Date
KR970059832U true KR970059832U (en) 1997-11-10

Family

ID=60837703

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960006860U KR970059832U (en) 1996-04-01 1996-04-01 Wafer Cleaning Equipment

Country Status (1)

Country Link
KR (1) KR970059832U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination