KR970059832U - Wafer Cleaning Equipment - Google Patents
Wafer Cleaning EquipmentInfo
- Publication number
- KR970059832U KR970059832U KR2019960006860U KR19960006860U KR970059832U KR 970059832 U KR970059832 U KR 970059832U KR 2019960006860 U KR2019960006860 U KR 2019960006860U KR 19960006860 U KR19960006860 U KR 19960006860U KR 970059832 U KR970059832 U KR 970059832U
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning equipment
- wafer cleaning
- wafer
- equipment
- cleaning
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960006860U KR970059832U (en) | 1996-04-01 | 1996-04-01 | Wafer Cleaning Equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960006860U KR970059832U (en) | 1996-04-01 | 1996-04-01 | Wafer Cleaning Equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970059832U true KR970059832U (en) | 1997-11-10 |
Family
ID=60837703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960006860U KR970059832U (en) | 1996-04-01 | 1996-04-01 | Wafer Cleaning Equipment |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970059832U (en) |
-
1996
- 1996-04-01 KR KR2019960006860U patent/KR970059832U/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |