KR970007225U - Wafer cleaning equipment - Google Patents

Wafer cleaning equipment

Info

Publication number
KR970007225U
KR970007225U KR2019950019680U KR19950019680U KR970007225U KR 970007225 U KR970007225 U KR 970007225U KR 2019950019680 U KR2019950019680 U KR 2019950019680U KR 19950019680 U KR19950019680 U KR 19950019680U KR 970007225 U KR970007225 U KR 970007225U
Authority
KR
South Korea
Prior art keywords
cleaning equipment
wafer cleaning
wafer
equipment
cleaning
Prior art date
Application number
KR2019950019680U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950019680U priority Critical patent/KR970007225U/en
Publication of KR970007225U publication Critical patent/KR970007225U/en

Links

KR2019950019680U 1995-07-31 1995-07-31 Wafer cleaning equipment KR970007225U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950019680U KR970007225U (en) 1995-07-31 1995-07-31 Wafer cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950019680U KR970007225U (en) 1995-07-31 1995-07-31 Wafer cleaning equipment

Publications (1)

Publication Number Publication Date
KR970007225U true KR970007225U (en) 1997-02-21

Family

ID=60895791

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950019680U KR970007225U (en) 1995-07-31 1995-07-31 Wafer cleaning equipment

Country Status (1)

Country Link
KR (1) KR970007225U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application