KR950034042U - Wafer shaking device of wafer etching equipment - Google Patents

Wafer shaking device of wafer etching equipment

Info

Publication number
KR950034042U
KR950034042U KR2019940011989U KR19940011989U KR950034042U KR 950034042 U KR950034042 U KR 950034042U KR 2019940011989 U KR2019940011989 U KR 2019940011989U KR 19940011989 U KR19940011989 U KR 19940011989U KR 950034042 U KR950034042 U KR 950034042U
Authority
KR
South Korea
Prior art keywords
wafer
shaking device
etching equipment
wafer etching
equipment
Prior art date
Application number
KR2019940011989U
Other languages
Korean (ko)
Other versions
KR0116339Y1 (en
Inventor
최원욱
Original Assignee
Lc반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lc반도체 주식회사 filed Critical Lc반도체 주식회사
Priority to KR2019940011989U priority Critical patent/KR0116339Y1/en
Publication of KR950034042U publication Critical patent/KR950034042U/en
Application granted granted Critical
Publication of KR0116339Y1 publication Critical patent/KR0116339Y1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Weting (AREA)
KR2019940011989U 1994-05-27 1994-05-27 Device for shaking a carrier loaded wafer of etching apparatus KR0116339Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940011989U KR0116339Y1 (en) 1994-05-27 1994-05-27 Device for shaking a carrier loaded wafer of etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940011989U KR0116339Y1 (en) 1994-05-27 1994-05-27 Device for shaking a carrier loaded wafer of etching apparatus

Publications (2)

Publication Number Publication Date
KR950034042U true KR950034042U (en) 1995-12-18
KR0116339Y1 KR0116339Y1 (en) 1998-04-20

Family

ID=19384202

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940011989U KR0116339Y1 (en) 1994-05-27 1994-05-27 Device for shaking a carrier loaded wafer of etching apparatus

Country Status (1)

Country Link
KR (1) KR0116339Y1 (en)

Also Published As

Publication number Publication date
KR0116339Y1 (en) 1998-04-20

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Legal Events

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E701 Decision to grant or registration of patent right
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FPAY Annual fee payment

Payment date: 20090102

Year of fee payment: 12

EXPY Expiration of term