KR960025387U - Particle removal device of semiconductor manufacturing equipment - Google Patents

Particle removal device of semiconductor manufacturing equipment

Info

Publication number
KR960025387U
KR960025387U KR2019940035246U KR19940035246U KR960025387U KR 960025387 U KR960025387 U KR 960025387U KR 2019940035246 U KR2019940035246 U KR 2019940035246U KR 19940035246 U KR19940035246 U KR 19940035246U KR 960025387 U KR960025387 U KR 960025387U
Authority
KR
South Korea
Prior art keywords
removal device
semiconductor manufacturing
manufacturing equipment
particle removal
particle
Prior art date
Application number
KR2019940035246U
Other languages
Korean (ko)
Other versions
KR0133388Y1 (en
Inventor
이규호
Original Assignee
아남반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남반도체주식회사 filed Critical 아남반도체주식회사
Priority to KR2019940035246U priority Critical patent/KR0133388Y1/en
Publication of KR960025387U publication Critical patent/KR960025387U/en
Application granted granted Critical
Publication of KR0133388Y1 publication Critical patent/KR0133388Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
KR2019940035246U 1994-12-23 1994-12-23 Particle eliminating apparatus for fabricating semiconductor equipment KR0133388Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035246U KR0133388Y1 (en) 1994-12-23 1994-12-23 Particle eliminating apparatus for fabricating semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035246U KR0133388Y1 (en) 1994-12-23 1994-12-23 Particle eliminating apparatus for fabricating semiconductor equipment

Publications (2)

Publication Number Publication Date
KR960025387U true KR960025387U (en) 1996-07-22
KR0133388Y1 KR0133388Y1 (en) 1999-03-20

Family

ID=19402360

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035246U KR0133388Y1 (en) 1994-12-23 1994-12-23 Particle eliminating apparatus for fabricating semiconductor equipment

Country Status (1)

Country Link
KR (1) KR0133388Y1 (en)

Also Published As

Publication number Publication date
KR0133388Y1 (en) 1999-03-20

Similar Documents

Publication Publication Date Title
GB9511567D0 (en) Wiring structure of semiconductor device and method for manufacturing the same
EP0700087A3 (en) Semiconductor device and method of manufacturing the same
SG42823A1 (en) Method of manufacturing semiconductor devices
DE69323127T2 (en) Semiconductor device and manufacturing method
KR960015805A (en) Manufacturing Method of Semiconductor Device
KR960025387U (en) Particle removal device of semiconductor manufacturing equipment
KR960009211A (en) Manufacturing Method of Semiconductor Device
KR960019150U (en) Wafer mounting device of semiconductor manufacturing equipment
GB9509196D0 (en) Method of manufacturing semiconductor device
KR960025373U (en) Wafer tape removal device
KR960015587U (en) Semiconductor device manufacturing equipment
KR950021389U (en) Semiconductor wafer particle removal device
KR950031473U (en) Semiconductor wafer drying equipment
KR960025435U (en) Wafer Stage of Semiconductor Device Manufacturing Equipment
KR960019074U (en) Semiconductor device manufacturing equipment
KR970046960U (en) Cooling device of semiconductor manufacturing equipment
KR970025829U (en) Cooling device of semiconductor manufacturing equipment
KR940017859U (en) Filter for semiconductor manufacturing equipment
KR960025356U (en) Wafer charged particle removal device
KR940006476U (en) Semiconductor wafer drying equipment
KR950012596U (en) Semiconductor Wet Clean and Wet Etching Equipment
KR950021382U (en) Exposure device of semiconductor manufacturing equipment
KR970046585U (en) Powder Grinding Device of Semiconductor Manufacturing Equipment
KR960019068U (en) Vent Device of Wafer Manufacturing Equipment
KR950034042U (en) Wafer shaking device of wafer etching equipment

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application
J201 Request for trial against refusal decision

Free format text: TRIAL AGAINST DECISION OF REJECTION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL

B701 Decision to grant
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee