KR970025829U - Cooling device of semiconductor manufacturing equipment - Google Patents

Cooling device of semiconductor manufacturing equipment

Info

Publication number
KR970025829U
KR970025829U KR2019950035603U KR19950035603U KR970025829U KR 970025829 U KR970025829 U KR 970025829U KR 2019950035603 U KR2019950035603 U KR 2019950035603U KR 19950035603 U KR19950035603 U KR 19950035603U KR 970025829 U KR970025829 U KR 970025829U
Authority
KR
South Korea
Prior art keywords
cooling device
semiconductor manufacturing
manufacturing equipment
equipment
semiconductor
Prior art date
Application number
KR2019950035603U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950035603U priority Critical patent/KR970025829U/en
Publication of KR970025829U publication Critical patent/KR970025829U/en

Links

KR2019950035603U 1995-11-24 1995-11-24 Cooling device of semiconductor manufacturing equipment KR970025829U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950035603U KR970025829U (en) 1995-11-24 1995-11-24 Cooling device of semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950035603U KR970025829U (en) 1995-11-24 1995-11-24 Cooling device of semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
KR970025829U true KR970025829U (en) 1997-06-20

Family

ID=60906645

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950035603U KR970025829U (en) 1995-11-24 1995-11-24 Cooling device of semiconductor manufacturing equipment

Country Status (1)

Country Link
KR (1) KR970025829U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination