KR980005434U - Transfer device of semiconductor manufacturing equipment - Google Patents

Transfer device of semiconductor manufacturing equipment

Info

Publication number
KR980005434U
KR980005434U KR2019960016331U KR19960016331U KR980005434U KR 980005434 U KR980005434 U KR 980005434U KR 2019960016331 U KR2019960016331 U KR 2019960016331U KR 19960016331 U KR19960016331 U KR 19960016331U KR 980005434 U KR980005434 U KR 980005434U
Authority
KR
South Korea
Prior art keywords
transfer device
semiconductor manufacturing
manufacturing equipment
equipment
semiconductor
Prior art date
Application number
KR2019960016331U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960016331U priority Critical patent/KR980005434U/en
Publication of KR980005434U publication Critical patent/KR980005434U/en

Links

KR2019960016331U 1996-06-19 1996-06-19 Transfer device of semiconductor manufacturing equipment KR980005434U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960016331U KR980005434U (en) 1996-06-19 1996-06-19 Transfer device of semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960016331U KR980005434U (en) 1996-06-19 1996-06-19 Transfer device of semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
KR980005434U true KR980005434U (en) 1998-03-30

Family

ID=60925544

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960016331U KR980005434U (en) 1996-06-19 1996-06-19 Transfer device of semiconductor manufacturing equipment

Country Status (1)

Country Link
KR (1) KR980005434U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application