KR970059841U - Support for Wafer Up / Down of Semiconductor Etching Equipment - Google Patents

Support for Wafer Up / Down of Semiconductor Etching Equipment

Info

Publication number
KR970059841U
KR970059841U KR2019960009647U KR19960009647U KR970059841U KR 970059841 U KR970059841 U KR 970059841U KR 2019960009647 U KR2019960009647 U KR 2019960009647U KR 19960009647 U KR19960009647 U KR 19960009647U KR 970059841 U KR970059841 U KR 970059841U
Authority
KR
South Korea
Prior art keywords
wafer
support
etching equipment
semiconductor etching
semiconductor
Prior art date
Application number
KR2019960009647U
Other languages
Korean (ko)
Other versions
KR200232212Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960009647U priority Critical patent/KR200232212Y1/en
Publication of KR970059841U publication Critical patent/KR970059841U/en
Application granted granted Critical
Publication of KR200232212Y1 publication Critical patent/KR200232212Y1/en

Links

KR2019960009647U 1996-04-29 1996-04-29 Support for Wafer Up / Down of Semiconductor Etching Equipment KR200232212Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960009647U KR200232212Y1 (en) 1996-04-29 1996-04-29 Support for Wafer Up / Down of Semiconductor Etching Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960009647U KR200232212Y1 (en) 1996-04-29 1996-04-29 Support for Wafer Up / Down of Semiconductor Etching Equipment

Publications (2)

Publication Number Publication Date
KR970059841U true KR970059841U (en) 1997-11-10
KR200232212Y1 KR200232212Y1 (en) 2001-11-30

Family

ID=60927984

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960009647U KR200232212Y1 (en) 1996-04-29 1996-04-29 Support for Wafer Up / Down of Semiconductor Etching Equipment

Country Status (1)

Country Link
KR (1) KR200232212Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100702835B1 (en) * 2001-05-28 2007-04-03 삼성전자주식회사 Cross arm of wafer lift apparatus

Also Published As

Publication number Publication date
KR200232212Y1 (en) 2001-11-30

Similar Documents

Publication Publication Date Title
EP1132950A4 (en) Wafer support of semiconductor manufacturing system
HK1045402A1 (en) Etching of semiconductor wafer edges
KR970059841U (en) Support for Wafer Up / Down of Semiconductor Etching Equipment
KR970015307U (en) Semiconductor wafer etching equipment
KR970059867U (en) Wafer holder of semiconductor equipment
KR970064182U (en) Semiconductor Wafer Etching Equipment
KR970015296U (en) Semiconductor wafer etching equipment
KR970046761U (en) Wafer Boat of Semiconductor Manufacturing Equipment
KR960019150U (en) Wafer mounting device of semiconductor manufacturing equipment
KR950028650U (en) Semiconductor wafer etching equipment
KR970015297U (en) Semiconductor wafer etching equipment
KR970015295U (en) Semiconductor Wafer Etching Equipment
KR970059844U (en) Pedestal of Wafer Etching Equipment
KR970059843U (en) Wafer Etching Equipment
KR970052818U (en) Etching equipment used for manufacturing semiconductor devices
KR970056082U (en) Semiconductor wafer carrier
KR970003273U (en) Wafer Support for Semiconductor Device Manufacturing Equipment
KR950031473U (en) Semiconductor wafer drying equipment
KR960025435U (en) Wafer Stage of Semiconductor Device Manufacturing Equipment
KR970052804U (en) Wafer Holder of Semiconductor Sputtering Equipment
KR970056059U (en) Etching device for semiconductor manufacturing equipment
KR940027599U (en) Wafer Carrier Flow Unit of Silicon Wet Etching Equipment
KR960032777U (en) Wafer Memory Auxiliary Device of Semiconductor Equipment
KR970046877U (en) Wafer holding mechanism of semiconductor manufacturing equipment
KR970064181U (en) Semiconductor Wafer Cleaning Equipment

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090427

Year of fee payment: 9

LAPS Lapse due to unpaid annual fee