KR970053833A - Cylindrical Capacitor Manufacturing Method - Google Patents
Cylindrical Capacitor Manufacturing Method Download PDFInfo
- Publication number
- KR970053833A KR970053833A KR1019950057176A KR19950057176A KR970053833A KR 970053833 A KR970053833 A KR 970053833A KR 1019950057176 A KR1019950057176 A KR 1019950057176A KR 19950057176 A KR19950057176 A KR 19950057176A KR 970053833 A KR970053833 A KR 970053833A
- Authority
- KR
- South Korea
- Prior art keywords
- conductive layer
- conductive
- storage electrode
- forming
- pattern
- Prior art date
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- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
원통형 커패시터 제조방법에 관하여 기재하고 있다. 이는 스토리지 전극 콘택홀이 형성된 반도체 기판 상에 도전물을 2회로 나누어 증착하여 제1도전층, 자연산화막 및 제2도전층을 적층하여 형성하고, 상기 제2도전층을 패터닝하여 제2도전층을 패턴을 형성한 다음, 상기 제2도전층 패턴 측벽에 절연물 스페이서를 형성하고, 상기 스페이서를 마스크로 사용하여 상기 제1 및 제2도전층을 식각하여 원통형 스토리지 전극을 형성하는 것을 특징으로 한다. 따라서 종래에 비해 보다 용이하게 원통형 스토리지 전극을 형성할 수 있다.A cylindrical capacitor manufacturing method is described. The conductive material is formed by depositing two conductive materials twice on a semiconductor substrate on which a storage electrode contact hole is formed, and stacking a first conductive layer, a natural oxide film, and a second conductive layer, and patterning the second conductive layer to form a second conductive layer. After forming a pattern, an insulator spacer is formed on sidewalls of the second conductive layer pattern, and the first and second conductive layers are etched using the spacers as a mask to form cylindrical storage electrodes. Therefore, the cylindrical storage electrode can be formed more easily than in the related art.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2A도 내지 제2E도는 본 발명의 일 실시예에 따른 원통형 커패시터 제조방법을 설명하기 위해 도시한 단면도들이다.2A through 2E are cross-sectional views illustrating a method of manufacturing a cylindrical capacitor according to an embodiment of the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950057176A KR970053833A (en) | 1995-12-26 | 1995-12-26 | Cylindrical Capacitor Manufacturing Method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950057176A KR970053833A (en) | 1995-12-26 | 1995-12-26 | Cylindrical Capacitor Manufacturing Method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970053833A true KR970053833A (en) | 1997-07-31 |
Family
ID=66619064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950057176A KR970053833A (en) | 1995-12-26 | 1995-12-26 | Cylindrical Capacitor Manufacturing Method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970053833A (en) |
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1995
- 1995-12-26 KR KR1019950057176A patent/KR970053833A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |