KR970048539A - Data Verification Method in Semiconductor Test - Google Patents

Data Verification Method in Semiconductor Test Download PDF

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Publication number
KR970048539A
KR970048539A KR1019950046464A KR19950046464A KR970048539A KR 970048539 A KR970048539 A KR 970048539A KR 1019950046464 A KR1019950046464 A KR 1019950046464A KR 19950046464 A KR19950046464 A KR 19950046464A KR 970048539 A KR970048539 A KR 970048539A
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South Korea
Prior art keywords
verification
data
repeatability
test
chips
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KR1019950046464A
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Korean (ko)
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KR0180213B1 (en
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윤종칠
황용연
전철규
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김광호
삼성전자 주식회사
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Priority to KR1019950046464A priority Critical patent/KR0180213B1/en
Publication of KR970048539A publication Critical patent/KR970048539A/en
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Publication of KR0180213B1 publication Critical patent/KR0180213B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/31718—Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis

Abstract

본 발명은 검증용 테스트 항옴긍 결정한 후 웨이퍼상의 상 하 좌 우 및 중앙부분 등에서 1칩씩 복수 개의 샘플 칩을 선정하고, X, Y좌표로 구분하는 샘플 칩 선정 스텝과, 상기 샘플 칩 선정 스텝에서 선정된 복수개의 칩중 1개에 대해 적어도 30-60회 반복 테스트하여 평균값과 공정에서 허용하는 산포에 대한 실제 공정 산포의 비(CP)를 산출하는 산출 스텝과, 상기 산출 스텝에서 산출된 데이터 등을 이용하여 유의차 항목이 있는가를 판단하는 판단 스텝과, 상기 판단 스텝에서 유의차 항목의 원인이 없으면 반복성에 대한 데이터검증을 완료하는 스텝으로 이루어져, 자동화 테스터에서의 프로그램과 회로 구성 소자 등의 변화에 의한 테스트 데이터가 변화하는 것을 통계적 검정 이론을 테스트 데이터 분석 및 검증에 도입하여 정확하고 신뢰성 있는 데이터 검증 체계를 수립하여 반도체 소자를 제조하는 공정에서 제조의 소율과 반도체 소자의 품질을 균일하게 할수 있는 반도체 테스트에서의 데이터 검증 방법에 관한 것이다.According to the present invention, a plurality of sample chips are selected one by one from the top, bottom, left, right, and center portions of the wafer after determining the verification test term for verification, and are selected in the sample chip selection step divided into X and Y coordinates and the sample chip selection step. A calculation step of calculating a ratio (CP) of the average value and the actual process dispersion to the dispersion allowed by the process by performing at least 30-60 repetition tests on one of the plurality of chips, and the data calculated in the calculating step. A determination step of determining whether there is a significant difference item, and a step of completing data verification for repeatability if there is no cause of the significant difference item in the determination step. Accurate and reliable data by incorporating statistical test theory into test data analysis and validation as data changes The present invention relates to a method of verifying data in a semiconductor test that can establish a verification rate and a uniform quality of a semiconductor device in a process of manufacturing a semiconductor device by establishing a verification system.

Description

반도체 테스트에서의 데이터 검증 방법Data Verification Method in Semiconductor Test

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본 발명에 의한 반도체 테스트에서의 데이터 검증 방법을 설명하는 플로우챠트,1 is a flowchart illustrating a data verification method in a semiconductor test according to the present invention;

제2도는 본 발명에 의해 측정한 반곡성 테이터를 나타낸 표,2 is a table showing the semi-flexible data measured by the present invention,

제3도는 본 발명에 의한 반복성 검증을 나타낸 표.3 is a table showing the repeatability verification according to the present invention.

Claims (4)

검증용 테스트 항목을 결저안 후 웨이퍼상의 상 하 좌 우 및 중앙부분 등에서 1칩씩 복수 개의 샘플 칩을 선정하고, X, Y좌표로 구분하는 샘플 칩 선정 스텝과, 상기 샘플 칩 선정 스텝에서 선정된 복수 개의 칩중 1개에 대해 적어도 30-60회 반복 테스트하여 평균값과 공정에서 허용하는 산포에 대한 실제 공정 산포의 비(CP)를 산출하는 산출 스텝과, 상기 산출 스텝에서 산출된 데이터 등을 이용하여 유의차 항목이 있는가를 판단하는 판단 스텝과, 상기 판단 스텝에서 유의차 항목의 원인이 없으면 반복성에 대한 데이터검증을 완료하는 스텝으로 이루어진 것을 특징으로 하는 반도체 테스트에서의 데이터 검증 방법.After the verification test item is resolved, a plurality of sample chips are selected one by one from the top, bottom, left, right, and center of the wafer, and the sample chip selection step is divided into X and Y coordinates and the plurality of sample chips selected in the sample chip selection step. A calculation step of calculating at least 30 to 60 repetitive tests on one of the two chips to calculate the ratio of the average process spread to the process spread (CP), and the data calculated in the calculation step. And a step of determining whether there is a difference item, and a step of completing data verification for repeatability if there is no cause of the significant difference item in the determination step. 제1항에 있어서, 상기 판단 스텝은 반복성 데이터 검증 전후의 반복성 데이터의 차에 대한 절대치와 동일성 검증 전후의 평균 값 차의 절대치를 각각 구하여 유의치 항목의 원인을 판단하는 것을 특징으로 하는 반도체 테스트에서의 데이터 검증 방법.The semiconductor test according to claim 1, wherein the determining step determines the cause of the significance value item by obtaining the absolute value of the difference between the repeatability data before and after the repeatability data verification and the absolute value of the difference between the average value before and after the identity verification. Data validation method. 제2항에 있어서, 상기 반복성의 데이터 검증은, ① Cp1, Cp2〉30이면 유의차가 없는 것으로 판정 ② Cp1〉Cp2이면 Cp1x0.79〈Cp2을 적용하여 판정 ③Cp1〉Cp2인 경우는(여기서, Cp1:기준 측정 데이터 Cp, Cp2 : 검증용 측정 데이터Cp임) 검증용 Data의 반복성 산포가 작아진 것이므로 유의차가 없는 것으로 판정하는 것을 특징으로 하는 반도체 테스트에서의 데이터 검증 방법.The data verification of the repeatability according to claim 2, wherein the data verification of repeatability is determined as: (1) Cp1, Cp2> 30, and (2) Cp1> Cp2 is determined by applying Cp1x0.79 <Cp2 (3) where Cp1> Cp2 (where Cp1: Reference measurement data Cp, Cp2: Verification measurement data Cp) Since the repeatability distribution of the verification data is reduced, it is determined that there is no significant difference. 제2항에 있어서, 상기 평균값의 동일성에 대한 검증은 검증 통계량 T(x)을 구한 후The method of claim 2, wherein the verification of the equality of the mean values is performed after obtaining a verification statistic T (x). 즉, 신뢰 수준 90%에서 두 모집단 평균이 동일하다고 판단되는 기준으로 아래 식을In other words, at the 90% confidence level, 만족해야 하는 것을 특징으로 하는 반도체 테스트에서의 데이터 검증방법.A data verification method in a semiconductor test, characterized in that it must be satisfied. ※ 참고사항: 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the original application.
KR1019950046464A 1995-12-04 1995-12-04 Method of data verification in semiconductor test KR0180213B1 (en)

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KR0180213B1 KR0180213B1 (en) 1999-04-01

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