KR970046839U - 웨이퍼 캐리어의 수평지시장치 - Google Patents

웨이퍼 캐리어의 수평지시장치

Info

Publication number
KR970046839U
KR970046839U KR2019950043142U KR19950043142U KR970046839U KR 970046839 U KR970046839 U KR 970046839U KR 2019950043142 U KR2019950043142 U KR 2019950043142U KR 19950043142 U KR19950043142 U KR 19950043142U KR 970046839 U KR970046839 U KR 970046839U
Authority
KR
South Korea
Prior art keywords
wafer carrier
leveling device
carrier leveling
wafer
leveling
Prior art date
Application number
KR2019950043142U
Other languages
English (en)
Other versions
KR0132215Y1 (ko
Inventor
김웅희
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950043142U priority Critical patent/KR0132215Y1/ko
Publication of KR970046839U publication Critical patent/KR970046839U/ko
Application granted granted Critical
Publication of KR0132215Y1 publication Critical patent/KR0132215Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950043142U 1995-12-18 1995-12-18 웨이퍼 캐리어의 수평지시장치 KR0132215Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950043142U KR0132215Y1 (ko) 1995-12-18 1995-12-18 웨이퍼 캐리어의 수평지시장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950043142U KR0132215Y1 (ko) 1995-12-18 1995-12-18 웨이퍼 캐리어의 수평지시장치

Publications (2)

Publication Number Publication Date
KR970046839U true KR970046839U (ko) 1997-07-31
KR0132215Y1 KR0132215Y1 (ko) 1999-02-01

Family

ID=19435335

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950043142U KR0132215Y1 (ko) 1995-12-18 1995-12-18 웨이퍼 캐리어의 수평지시장치

Country Status (1)

Country Link
KR (1) KR0132215Y1 (ko)

Also Published As

Publication number Publication date
KR0132215Y1 (ko) 1999-02-01

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