KR970023946A - Wafer Clamp for Semiconductor Manufacturing Equipment - Google Patents

Wafer Clamp for Semiconductor Manufacturing Equipment Download PDF

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Publication number
KR970023946A
KR970023946A KR1019950037806A KR19950037806A KR970023946A KR 970023946 A KR970023946 A KR 970023946A KR 1019950037806 A KR1019950037806 A KR 1019950037806A KR 19950037806 A KR19950037806 A KR 19950037806A KR 970023946 A KR970023946 A KR 970023946A
Authority
KR
South Korea
Prior art keywords
clamp
wafer
semiconductor manufacturing
manufacturing equipment
wafer clamp
Prior art date
Application number
KR1019950037806A
Other languages
Korean (ko)
Inventor
박지순
김상범
최길현
김병준
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950037806A priority Critical patent/KR970023946A/en
Publication of KR970023946A publication Critical patent/KR970023946A/en

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  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

본 발명은 스퍼터링 공정중 웨이퍼의 가장자리부를 고정하도록 구성된 반도체 제조장치의 클램프에 관한 것으로, 상기 웨이퍼와 직접 맞닿는 안착부를 세정시 화학약품과 반응하지 않는 이종의 물질로 코팅처리하여 구성하고, 상기 클램프의 재질이 스테인레스 스틸 계열인 경우, 안착부는 세라믹으로 코팅하여 구성된 것이다. 따라서 클램프 세정에 따른 표면 거칠어짐이 억제됨으로써 웨이퍼 가장자리부에서의 파티클 발생과 웨이퍼 깨짐이 방지되는 것이고, 이로써 클램프의 사용주기가 연장되는 효과가 있다.The present invention relates to a clamp of a semiconductor manufacturing apparatus configured to fix an edge portion of a wafer during a sputtering process. If the material is stainless steel, the seating portion is made of a ceramic coating. Therefore, surface roughness due to clamp cleaning is suppressed, thereby preventing particle generation and wafer cracking at the wafer edge, thereby extending the use period of the clamp.

Description

반도체 제조장치의 웨이퍼 클램프Wafer Clamp for Semiconductor Manufacturing Equipment

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제 2A 도는 본 발명에 따른 웨이퍼 클램프를 나타낸 부분 절결 사시도로서 세정전의 상태도,2A is a partially cutaway perspective view showing a wafer clamp according to the present invention, showing a state before cleaning;

제 2B 도는 본 발명에 따른 웨이퍼 클램프를 나타낸 부분 절결 사시도로서 세정후의 상태도이다.2B is a partially cutaway perspective view of the wafer clamp according to the present invention, showing a state diagram after cleaning.

Claims (2)

스퍼터링 공정중 웨이퍼의 가장자리부를 고정하도록 구성된 반도체 제조장치의 클램프에 있어서, 상기 웨이퍼와 직접 맞닿는 안착부를 세정시 화학약품과 반응하지 않는 이종의 물질로 코팅 처리하여 구성됨을 특징으로 하는 반도체 제조장치의 웨이퍼 클램프.A clamp of a semiconductor manufacturing apparatus configured to fix an edge portion of a wafer during a sputtering process, wherein the mounting portion directly contacting the wafer is coated with a heterogeneous material that does not react with a chemical during cleaning. clamp. 제 1 항에 있어서, 상기 클램프의 재질이 스테인레스 스틸 계열인 경우, 안착부는 세라믹으로 코팅하여 됨을 특징으로 하는 상기 반도체 제조장치의 웨이퍼 클램프.The wafer clamp of claim 1, wherein when the clamp is made of stainless steel, the seating portion is coated with ceramic. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950037806A 1995-10-28 1995-10-28 Wafer Clamp for Semiconductor Manufacturing Equipment KR970023946A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950037806A KR970023946A (en) 1995-10-28 1995-10-28 Wafer Clamp for Semiconductor Manufacturing Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950037806A KR970023946A (en) 1995-10-28 1995-10-28 Wafer Clamp for Semiconductor Manufacturing Equipment

Publications (1)

Publication Number Publication Date
KR970023946A true KR970023946A (en) 1997-05-30

Family

ID=66584876

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950037806A KR970023946A (en) 1995-10-28 1995-10-28 Wafer Clamp for Semiconductor Manufacturing Equipment

Country Status (1)

Country Link
KR (1) KR970023946A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220116938A (en) 2021-02-16 2022-08-23 김순훈 Antistatic metal member for semiconductor and display panel manufacturing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220116938A (en) 2021-02-16 2022-08-23 김순훈 Antistatic metal member for semiconductor and display panel manufacturing device

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