KR970052093A - Dry etching device for semiconductor device manufacturing - Google Patents
Dry etching device for semiconductor device manufacturing Download PDFInfo
- Publication number
- KR970052093A KR970052093A KR1019950066964A KR19950066964A KR970052093A KR 970052093 A KR970052093 A KR 970052093A KR 1019950066964 A KR1019950066964 A KR 1019950066964A KR 19950066964 A KR19950066964 A KR 19950066964A KR 970052093 A KR970052093 A KR 970052093A
- Authority
- KR
- South Korea
- Prior art keywords
- dry etching
- semiconductor device
- manufacturing
- gas supply
- supply plate
- Prior art date
Links
Abstract
본 발명은 내부에 가스 공급 플레이트 및 반도체 기판 장착부재를 구비하고 있는 식각챔버를 포함하는 반도체 소자 제조용 건식식각장치에 있어서, 상기 식각챔버에서 가스 공급 플레이트와 반도체 기판 장착부재 사이에 망구조물이 배치되어 있는 것을 특징으로 하는 반도체 소자 제조용 건식식각장치를 제공한다. 본 발명에 의하면 식각중에 발생되는 부산물을 망구조물에 침적시키고 이 망을 자주 교체해줌으로써 식각챔버내의 오염정도를 감소시킬 수 있다. 따라서 가스 공급 플레이트의 클리닝에 소요되는 노력과 시간을 절감할 수 있다.The present invention provides a dry etching apparatus for manufacturing a semiconductor device including an etching chamber having a gas supply plate and a semiconductor substrate mounting member therein, wherein a network structure is disposed between the gas supply plate and the semiconductor substrate mounting member in the etching chamber. Provided is a dry etching apparatus for manufacturing a semiconductor device. According to the present invention it is possible to reduce the degree of contamination in the etching chamber by depositing the by-products generated during the etching to the network structure and frequently replacing the network. Therefore, the effort and time required for cleaning the gas supply plate can be saved.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제1도는 본 발명에 따른 반도체 소자 제조용 건식긱각챔버의 개략도이다.1 is a schematic diagram of a dry gig chamber for manufacturing a semiconductor device according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950066964A KR970052093A (en) | 1995-12-29 | 1995-12-29 | Dry etching device for semiconductor device manufacturing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950066964A KR970052093A (en) | 1995-12-29 | 1995-12-29 | Dry etching device for semiconductor device manufacturing |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970052093A true KR970052093A (en) | 1997-07-29 |
Family
ID=66638042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950066964A KR970052093A (en) | 1995-12-29 | 1995-12-29 | Dry etching device for semiconductor device manufacturing |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970052093A (en) |
-
1995
- 1995-12-29 KR KR1019950066964A patent/KR970052093A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |