KR950003924A - How to remove photoresist scum - Google Patents
How to remove photoresist scum Download PDFInfo
- Publication number
- KR950003924A KR950003924A KR1019930014364A KR930014364A KR950003924A KR 950003924 A KR950003924 A KR 950003924A KR 1019930014364 A KR1019930014364 A KR 1019930014364A KR 930014364 A KR930014364 A KR 930014364A KR 950003924 A KR950003924 A KR 950003924A
- Authority
- KR
- South Korea
- Prior art keywords
- flat plate
- scum
- photoresist scum
- wafer
- remove photoresist
- Prior art date
Links
Abstract
본 발명은 플랫트(4) 위에 놓여있는 웨이퍼상의 현상된 감광막을 제거하는 단계와, 상기 플랫트(4)상에 놓여있는 웨이퍼를 리프터(5)로 상승시켜 상기 플랫트(4)의 온도를 차단하여 잔류되어 있는 감광막 스컴을 제거하는 단계를 포함하여 이루어지는 것을 특징으로 하는 감광막 스컴 제거 방법에 관한것으로, 감광막 스컴을 제거하기 위하여 플랫트의 온도를 낮출 필요가 없고 이후의 웨이퍼에 대한 공정을 계속하기 위해 플랫트의 온도를 다시 환원시킬 필요가 없어 반도체 소자의 생산성을 향상시키는 효과가 있다.The present invention removes the developed photoresist film on the wafer lying on the flat plate 4 and raises the wafer on the flat plate 4 by the lifter 5 to increase the temperature of the flat plate 4. A method for removing a photoresist scum, the method comprising: removing the remaining photoresist scum by blocking the substrate. In order to avoid the need to reduce the temperature of the platform again, there is an effect of improving the productivity of the semiconductor device.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제 1 도는 싱글 스트립퍼의 챔버 내부를 간단히 도시한 단면도.1 is a simplified cross-sectional view of the interior of a chamber of a single stripper.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930014364A KR950003924A (en) | 1993-07-27 | 1993-07-27 | How to remove photoresist scum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930014364A KR950003924A (en) | 1993-07-27 | 1993-07-27 | How to remove photoresist scum |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950003924A true KR950003924A (en) | 1995-02-17 |
Family
ID=67143059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930014364A KR950003924A (en) | 1993-07-27 | 1993-07-27 | How to remove photoresist scum |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950003924A (en) |
-
1993
- 1993-07-27 KR KR1019930014364A patent/KR950003924A/en not_active Application Discontinuation
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