KR970023757A - Reticle for Semiconductor Device Manufacturing - Google Patents
Reticle for Semiconductor Device Manufacturing Download PDFInfo
- Publication number
- KR970023757A KR970023757A KR1019950037820A KR19950037820A KR970023757A KR 970023757 A KR970023757 A KR 970023757A KR 1019950037820 A KR1019950037820 A KR 1019950037820A KR 19950037820 A KR19950037820 A KR 19950037820A KR 970023757 A KR970023757 A KR 970023757A
- Authority
- KR
- South Korea
- Prior art keywords
- reticle
- semiconductor device
- contact hole
- hole pattern
- device manufacturing
- Prior art date
Links
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
원하는 콘택홀 패턴이 형성된 반도체소자 제조용 레티클이 개시되어 있다.A reticle for manufacturing a semiconductor device having a desired contact hole pattern is disclosed.
본 발명의 레티클은 반도체 웨이퍼상에 전사하기 위하여 레티클상에 형성하는 콘택홀 패턴이 사각형의 각 꼭지점 부근이 외부로 확장된 꽃무늬 형상으로 된 것을 특징으로 한다.The reticle of the present invention is characterized in that the contact hole pattern formed on the reticle in order to be transferred onto the semiconductor wafer has a floral pattern in which the vicinity of each vertex of the rectangle is extended to the outside.
따라서 웨이퍼상에 원하는 사각형의 콘택홀 패턴을 정확히 전사할 수 있어 콘택의 신뢰성이 향상되는 효과가 있다.Therefore, the desired rectangular contact hole pattern can be accurately transferred onto the wafer, thereby improving the reliability of the contact.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 벌명의 일 실시예에 따른 꽃무늬형 콘택홀 패턴이 형성된 레티클을 나타낸 도면이다.2 is a view showing a reticle formed with a floral contact hole pattern according to an embodiment of the present invention.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950037820A KR970023757A (en) | 1995-10-28 | 1995-10-28 | Reticle for Semiconductor Device Manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950037820A KR970023757A (en) | 1995-10-28 | 1995-10-28 | Reticle for Semiconductor Device Manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970023757A true KR970023757A (en) | 1997-05-30 |
Family
ID=66584287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950037820A KR970023757A (en) | 1995-10-28 | 1995-10-28 | Reticle for Semiconductor Device Manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970023757A (en) |
-
1995
- 1995-10-28 KR KR1019950037820A patent/KR970023757A/en not_active Application Discontinuation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Withdrawal due to no request for examination |