KR970022589A - Vernier key and miss alignment measurement method using the same - Google Patents

Vernier key and miss alignment measurement method using the same Download PDF

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Publication number
KR970022589A
KR970022589A KR1019950036481A KR19950036481A KR970022589A KR 970022589 A KR970022589 A KR 970022589A KR 1019950036481 A KR1019950036481 A KR 1019950036481A KR 19950036481 A KR19950036481 A KR 19950036481A KR 970022589 A KR970022589 A KR 970022589A
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KR
South Korea
Prior art keywords
grid
key
misalignment
vernier
measuring
Prior art date
Application number
KR1019950036481A
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Korean (ko)
Inventor
박영소
Original Assignee
김광호
삼성전자 주식회사
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Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950036481A priority Critical patent/KR970022589A/en
Publication of KR970022589A publication Critical patent/KR970022589A/en

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Abstract

버니어 키 및 이를 이용한 미스 얼라인먼트 측정방법에 관하여 기재하고 있다. 반도체 소자 제조시, 모눈금과 자눈금의 정렬 위치로서 미스 얼라인먼트 정도를 측정하는 버니어 키에 있어서, 본 발명에 따른 버니어 키는 상기 자눈금은 상기 모눈금에 대해 θ(θ>0)만큼의 기울기를 갖는다. 따라서, 종래의 얼라인 키의 정렬위치판단에 비해 휠씬 용이하게 미스 얼라인먼트 정도를 추정할 수 있다.A vernier key and a method for measuring misalignment using the same are described. In the manufacture of a semiconductor device, a vernier key for measuring a misalignment degree as an alignment position of a grid and a grid, wherein the vernier key according to the present invention has a slope of θ (θ> 0) with respect to the grid Has Therefore, compared with the conventional determination of the alignment position of the alignment key, the degree of misalignment can be estimated more easily.

Description

버니어 키 및 이를 이용한 미스 얼라인먼트 측정방법Vernier key and miss alignment measurement method using the same

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제4도는 본 발명의 일 실시예에 따른 버니어 키의 형태를 도시한 도면,4 is a view showing the shape of the vernier key according to an embodiment of the present invention,

제5도는 본 발명의 일 실시예에 따른 버니어 키를 이용한 미스 얼라인먼트 측정방법을 설명하기 위해 도시한 도면.5 is a view illustrating a misalignment measuring method using a vernier key according to an embodiment of the present invention.

Claims (2)

반도체 소자 제조시, 모눈금과 자눈금의 정렬 위치로서 미스 얼라인먼트 정도를 측정하는 버니어 키에 있어서, 상기 자눈금은 상기 모눈금에 대해 θ(θ>0)만큼의 기울기를 갖는 것을 특징으로 하는 버니어 키.In the manufacture of a semiconductor device, a vernier key for measuring the misalignment degree as the alignment position of the grid and the grid, wherein the scale has a slope of θ (θ> 0) with respect to the grid key. 반도체 소자 제조시, 버니어 키의 모눈금과 자눈금의 정렬 위치를 이용한 미스 얼라인먼트 정도 측정방법에 있어서, 모눈금에 대해 θ(θ>0)만큼의 기울기를 갖는 자눈금의 수평방향으로의 이동시 나타나는 모눈금과 자눈금의 수직방향의 교차점 이동을 이용하여 공정의 미스 얼라인먼트 정도를 측정하는 것을 특징으로 하는미스 얼라인먼트 측정방법.In manufacturing a semiconductor device, in the method of measuring the misalignment degree using the alignment position of the vernier key scale and the vernier key, it appears during the movement of the vernier in the horizontal direction with the inclination of θ (θ> 0) with respect to the grid scale. A method for measuring misalignment, characterized in that for measuring the degree of misalignment of the process using the movement of the intersection of the grid and the vertical scale in the vertical direction. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950036481A 1995-10-20 1995-10-20 Vernier key and miss alignment measurement method using the same KR970022589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950036481A KR970022589A (en) 1995-10-20 1995-10-20 Vernier key and miss alignment measurement method using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950036481A KR970022589A (en) 1995-10-20 1995-10-20 Vernier key and miss alignment measurement method using the same

Publications (1)

Publication Number Publication Date
KR970022589A true KR970022589A (en) 1997-05-30

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950036481A KR970022589A (en) 1995-10-20 1995-10-20 Vernier key and miss alignment measurement method using the same

Country Status (1)

Country Link
KR (1) KR970022589A (en)

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