KR970077407A - Method of measuring line width of semiconductor device - Google Patents

Method of measuring line width of semiconductor device Download PDF

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Publication number
KR970077407A
KR970077407A KR1019960014858A KR19960014858A KR970077407A KR 970077407 A KR970077407 A KR 970077407A KR 1019960014858 A KR1019960014858 A KR 1019960014858A KR 19960014858 A KR19960014858 A KR 19960014858A KR 970077407 A KR970077407 A KR 970077407A
Authority
KR
South Korea
Prior art keywords
line width
semiconductor device
measurement position
measurement
line
Prior art date
Application number
KR1019960014858A
Other languages
Korean (ko)
Inventor
박동진
이병암
최상봉
문상영
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960014858A priority Critical patent/KR970077407A/en
Publication of KR970077407A publication Critical patent/KR970077407A/en

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

본 발명은 반도체 장치의 각 제조 공정에서 형성되는 패턴의 선폭 측정을 보조선을 이용하여 보다 정확히 이루어질 수 있도록 한 반도체 장치의 선폭 측정 방법에 관한 것으로서, 선폭 측정 위치의 기준이 되는 웨이퍼 상에 형성된 패턴의 모양에 선폭의 측정 위치를 찾기 위한 보조선들을 표시해 주는 단계; 상기 보조선들 사이의 적당한 위치를 측정 위치로 인식시키는 단계; 및, 상기 측정 위치에 측정 커서를 일치시키고 선폭을 측정하는 단계를 구비하여 이루어지며, 이 방법에 의하면 종래 작업자가 임의적으로 측정 위치를 확정하여 선폭을 측정하는 방법에 비해 오류를 줄일 수 있게 된다.The present invention relates to a line width measuring method of a semiconductor device which can more precisely measure a line width of a pattern formed in each manufacturing process of a semiconductor device by using an auxiliary line, A step of displaying auxiliary lines for finding the measurement position of the line width in the shape of the line; Recognizing an appropriate position between the auxiliary lines as a measurement position; And measuring the line width by matching the measurement cursor to the measurement position. According to this method, the error can be reduced compared with a conventional method in which a worker arbitrarily determines a measurement position and measures the line width.

Description

반도체 장치의 선폭 측정 방법Method of measuring line width of semiconductor device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제2도는 본 발명에 따른 반도체 장치의 선폭 측정 방법을 설명하기 위한 단계별 예시도.FIG. 2 is a step-by-step example for explaining a line width measuring method of a semiconductor device according to the present invention;

Claims (1)

선폭 측정 위치의 기준이 되는 웨이퍼 상에 형성된 패턴의 모양에 선폭의 측정 위치를 찾기 위한 보조선들을 표시해 주는 단계; 상기 보조선들 사이의 적당한 위치를 측정 위치로 인식시키는 단계; 및, 상기 측정 위치에 측정 커서를 일치시키고 선폭을 측정하는 단계를 구비하여 이루어진 반도체 장치의 선폭 측정 방법.Displaying auxiliary lines for finding a line width measurement position in the shape of a pattern formed on a wafer as a reference of the line width measuring position; Recognizing an appropriate position between the auxiliary lines as a measurement position; And a step of matching the measurement cursor with the measurement position and measuring the line width. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960014858A 1996-05-07 1996-05-07 Method of measuring line width of semiconductor device KR970077407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960014858A KR970077407A (en) 1996-05-07 1996-05-07 Method of measuring line width of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960014858A KR970077407A (en) 1996-05-07 1996-05-07 Method of measuring line width of semiconductor device

Publications (1)

Publication Number Publication Date
KR970077407A true KR970077407A (en) 1997-12-12

Family

ID=66216945

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960014858A KR970077407A (en) 1996-05-07 1996-05-07 Method of measuring line width of semiconductor device

Country Status (1)

Country Link
KR (1) KR970077407A (en)

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