KR970063414A - wafer - Google Patents
wafer Download PDFInfo
- Publication number
- KR970063414A KR970063414A KR1019960004442A KR19960004442A KR970063414A KR 970063414 A KR970063414 A KR 970063414A KR 1019960004442 A KR1019960004442 A KR 1019960004442A KR 19960004442 A KR19960004442 A KR 19960004442A KR 970063414 A KR970063414 A KR 970063414A
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- present
- pen
- hole
- alignment keys
- Prior art date
Links
Abstract
본 발명은 웨이퍼에 관해 개시한다. 본 발명에 의한 웨이퍼는 정렬키이로써 웨이퍼 상에 펜으로 표시한 마크를 구비하는 웨이퍼에 있어서, 상기 웨이퍼에 펜으로 표시한 마크대신 레이저를 이용하여 복수개의 정렬키이를 구비한다.The present invention relates to a wafer. The wafer according to the present invention has a plurality of alignment keys by using a laser instead of a mark indicated by a pen on the wafer, in a wafer having marks marked with a pen on the wafer as alignment keys.
따라서 본 발명은 정렬수단으로서 웨이퍼 상에 레이저를 이용하여 형성한 복수개의 홀을 구비한다. 본 발명은 이와 같은 홀을 이용하여 웨이퍼에 접근하고자 하는 반도체 장비의 정렬을 쉽게할 수 있으므로 종래방법에 비해 탐색시간을 훨신 줄일 수 있다.Therefore, the present invention has a plurality of holes formed as a sorting means by using a laser on a wafer. The present invention can easily align the semiconductor devices to be accessed to the wafer by using such holes, so that the search time can be further reduced as compared with the conventional method.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.
제1도는 본 발명에 의한 웨이퍼의 평면도.FIG. 1 is a plan view of a wafer according to the present invention. FIG.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960004442A KR970063414A (en) | 1996-02-24 | 1996-02-24 | wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960004442A KR970063414A (en) | 1996-02-24 | 1996-02-24 | wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970063414A true KR970063414A (en) | 1997-09-12 |
Family
ID=66221605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960004442A KR970063414A (en) | 1996-02-24 | 1996-02-24 | wafer |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970063414A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100782769B1 (en) * | 2006-07-14 | 2007-12-05 | 연세대학교 산학협력단 | Align key, method of forming align key and laser crystalization method using the same |
-
1996
- 1996-02-24 KR KR1019960004442A patent/KR970063414A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100782769B1 (en) * | 2006-07-14 | 2007-12-05 | 연세대학교 산학협력단 | Align key, method of forming align key and laser crystalization method using the same |
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |