KR970063414A - wafer - Google Patents

wafer Download PDF

Info

Publication number
KR970063414A
KR970063414A KR1019960004442A KR19960004442A KR970063414A KR 970063414 A KR970063414 A KR 970063414A KR 1019960004442 A KR1019960004442 A KR 1019960004442A KR 19960004442 A KR19960004442 A KR 19960004442A KR 970063414 A KR970063414 A KR 970063414A
Authority
KR
South Korea
Prior art keywords
wafer
present
pen
hole
alignment keys
Prior art date
Application number
KR1019960004442A
Other languages
Korean (ko)
Inventor
김광식
최상봉
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960004442A priority Critical patent/KR970063414A/en
Publication of KR970063414A publication Critical patent/KR970063414A/en

Links

Abstract

본 발명은 웨이퍼에 관해 개시한다. 본 발명에 의한 웨이퍼는 정렬키이로써 웨이퍼 상에 펜으로 표시한 마크를 구비하는 웨이퍼에 있어서, 상기 웨이퍼에 펜으로 표시한 마크대신 레이저를 이용하여 복수개의 정렬키이를 구비한다.The present invention relates to a wafer. The wafer according to the present invention has a plurality of alignment keys by using a laser instead of a mark indicated by a pen on the wafer, in a wafer having marks marked with a pen on the wafer as alignment keys.

따라서 본 발명은 정렬수단으로서 웨이퍼 상에 레이저를 이용하여 형성한 복수개의 홀을 구비한다. 본 발명은 이와 같은 홀을 이용하여 웨이퍼에 접근하고자 하는 반도체 장비의 정렬을 쉽게할 수 있으므로 종래방법에 비해 탐색시간을 훨신 줄일 수 있다.Therefore, the present invention has a plurality of holes formed as a sorting means by using a laser on a wafer. The present invention can easily align the semiconductor devices to be accessed to the wafer by using such holes, so that the search time can be further reduced as compared with the conventional method.

Description

웨이퍼wafer

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제1도는 본 발명에 의한 웨이퍼의 평면도.FIG. 1 is a plan view of a wafer according to the present invention. FIG.

Claims (4)

정렬키이로써 웨이퍼 상에 펜으로 표시한 마크를 구비하는 웨이퍼에 있어서, 상기 웨이퍼에 펜으로 표시한 마크대신 레이저를 이용하여 복수개의 정렬키이를 구비하는 것을 특징으로 하는 정렬키이를 구비하는 웨이퍼.Wherein the alignment key comprises a mark displayed on the wafer with a pen, wherein the wafer is provided with a plurality of alignment keys using a laser instead of a mark indicated by a pen. 제1항에 있어서, 상기 정렬키이는 일정한 위치에서 일정한 크기를 갖는 홀인 것을 특징으로 하는 웨이퍼.The wafer of claim 1, wherein the alignment key is a hole having a constant size at a predetermined position. 제2항에 있어서, 상기 홀은 상기 웨이퍼 테두리의 곡선과 직선부분이 만나는 지점에서 상기 직선에 수직한 거리로 10㎜되는 웨이퍼상에 형성된 것을 특징으로 하는 웨이퍼.The wafer according to claim 2, wherein the hole is formed on a wafer having a distance of 10 mm at a distance perpendicular to the straight line at a point where a straight line portion of the edge of the wafer meets the curve. 제2항에 있어서, 상기 홀의 지름은 50㎛인 것을 특징으로 하는 웨이퍼.The wafer according to claim 2, wherein the diameter of the hole is 50 占 퐉. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960004442A 1996-02-24 1996-02-24 wafer KR970063414A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960004442A KR970063414A (en) 1996-02-24 1996-02-24 wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960004442A KR970063414A (en) 1996-02-24 1996-02-24 wafer

Publications (1)

Publication Number Publication Date
KR970063414A true KR970063414A (en) 1997-09-12

Family

ID=66221605

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960004442A KR970063414A (en) 1996-02-24 1996-02-24 wafer

Country Status (1)

Country Link
KR (1) KR970063414A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100782769B1 (en) * 2006-07-14 2007-12-05 연세대학교 산학협력단 Align key, method of forming align key and laser crystalization method using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100782769B1 (en) * 2006-07-14 2007-12-05 연세대학교 산학협력단 Align key, method of forming align key and laser crystalization method using the same

Similar Documents

Publication Publication Date Title
KR970063414A (en) wafer
KR920013637A (en) Cutting system
KR970067550A (en) wafer
KR940005996A (en) Manufacturing method of photomask and semiconductor device
KR900017213A (en) Semiconductor devices
KR940022690A (en) How to improve wafer alignment
KR980005306A (en) Alignment key of the semiconductor device pattern
KR980005380A (en) How to create alignment marks
KR970030390A (en) A wafer structure for a semiconductor device
KR910013463A (en) Opening Method of Semiconductor Device
KR880001358A (en) Slow-away punching tool
KR960035761A (en) Semiconductor device with overlap mark
KR970022589A (en) Vernier key and miss alignment measurement method using the same
ES2064248B1 (en) POSITIONING DEVICE ON CUTTING-SEPARATING MACHINES FOR FLAT CERAMIC AND SIMILAR PIECES.
KR980005307A (en) Pattern alignment method of semiconductor device
KR940022716A (en) Alignment Key Structure
KR960002506A (en) Photomasks for Semiconductor Manufacturing
KR970018313A (en) Overlay pattern structure for measuring alignment
KR970072010A (en) Semiconductor device with alignment key
KR970028813A (en) Reticle for Semiconductor Device Manufacturing
KR980003799A (en) Mask for semiconductor device fabrication
BR8101422U (en) Constructive arrangement on keychain
KR970077407A (en) Method of measuring line width of semiconductor device
KR970071120A (en) Exposure Mask
KR970067847A (en) Bit line formation method

Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination