KR970018484A - Apparatus for external inspection of semiconductor device and external lead-proofing device of semiconductor device - Google Patents

Apparatus for external inspection of semiconductor device and external lead-proofing device of semiconductor device Download PDF

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Publication number
KR970018484A
KR970018484A KR1019960029094A KR19960029094A KR970018484A KR 970018484 A KR970018484 A KR 970018484A KR 1019960029094 A KR1019960029094 A KR 1019960029094A KR 19960029094 A KR19960029094 A KR 19960029094A KR 970018484 A KR970018484 A KR 970018484A
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South Korea
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pitch
semiconductor device
lead
ring
outer lead
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KR1019960029094A
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Korean (ko)
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KR100236872B1 (en
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가즈히토 요네미츠
야스시 이데타
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기타오카 다카시
미쓰비시덴키 주식회사
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Publication of KR100236872B1 publication Critical patent/KR100236872B1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/50Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01004Beryllium [Be]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01005Boron [B]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

반도체장치의 외부리이드 수정기 및 이것을 구비한 반도체 장치의 외관검사장치에 관한 것으로써, 종래보다 구성을 소형화하며, 저코스트로하기 위해, 반도체방치의 외부리이드 수정기는 외부리이드의 각 리이드 사이의 각 간극을 삽입통과할 수 있는 고리부를 각 간극의 1피치건너 배열한 제1의 피치수정고리와 외부리이드의 각 리이드사이의 각 간극을 삽입통과할 수 있는 고리부를 상기 제1의 피치수정고리의 각 고리부가 대응하고 있지 않은 1피치건너의 각 간극에 대응하도록 배열한 제2의 피치수정고리를 구비하고, 제1의 피치수정고리와 제2의 피치수정고리는 반도체장치의 외부리이드에 대해서 서로 거리가 다르게 배치되고, 서로 연속적인 동작에 의해 각 간극을 통과하도록 구성되어 있다. 상기에 의해, 종래보다 구성을 소형화하며, 저코스트로 할 수 있다.The present invention relates to an external lead modifier for a semiconductor device and an apparatus for inspecting an external appearance of a semiconductor device having the same. In order to miniaturize the structure and reduce the cost, A ring portion capable of passing through a gap between a first pitch correction ring arranged across one gap of the clearances and each lead of the outer lead and a ring portion capable of passing through the gap can be inserted into the first pitch correction ring And a second pitch correction ring arranged so as to correspond to each of the gaps opposite to each other by one pitch not supported by the loop, wherein the first pitch correction ring and the second pitch correction ring are spaced apart from each other with respect to the outer lead of the semiconductor device Are arranged differently from each other, and are configured to pass through the respective gaps by a continuous operation. With this arrangement, the structure can be made smaller and the cost can be reduced.

Description

반도체장치의 외부리이드 수정기 및 이것을 구비한 반도체 장치의 외관검사 장치Apparatus for external inspection of semiconductor device and external lead-proofing device of semiconductor device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

도1은 실시형태1에 의한 반도체리이드 수정기의 개략 구성도1 is a schematic diagram of a semiconductor lid holder according to Embodiment 1

Claims (8)

반도체장치의 외부리이드 수정기에 있어서, 외부리이드의 각 리이드사이의 각 간극을 통과할 수 있는 고리부를 상기 각 간극의 1피치건너 배열한 제1의 피치수정고리와 외부리이드 각 리이드사이의 각 간극을 통과할 수 있는 고리부를 상기 제1의 피치 수정고리의 각 고리부가 대응하고 있지 않은 1피치건너의 각 간극에 대응하도록 배열한 제2의 피치수정고리를 구비하고, 상기 제1의 피치수정고리와 상기 제2의 피치수정고리는 반도체장치의 외부리이드에 대해서 서로 거리가 다르게 배치되고, 또한 서로 연속한 동작에 의해 상기 각 간극을 통과하도록 구성되어 있는 반도체장치의 외부리이드 수정기.A semiconductor device according to any one of claims 1 to 3, wherein an outer lead modifier of the semiconductor device is a semiconductor device having a plurality of outer leads, each of the outer leads having a first pitch correction collar And a second pitch correcting ring arranged so that a through hole can be formed so as to correspond to each of the gaps crossing one pitch not corresponding to each hook of the first pitch correcting ring, And the second pitch correction ring is arranged to be spaced apart from the outer leads of the semiconductor device and to pass through the gaps by a continuous operation. 제1항에 있어서, 1개의 다이세트에 상기 제1의 피치수정고리 및 상기 제2의 피치수정고리와 이들 제1 및 제2의 피치수정고리의 동작과 연속적으로 동작하도록 구비된 외부리이드 평탄도 수정부를 구비하고, 1개의 다이세트의 동작에 의해 외부리이드의 피치수정과 평탄도수정을 연속적으로 실행할 수 있도록 한 반도체장치의 외부리이드 수정기.2. A method according to claim 1, wherein one die set is provided with an outer lead flatness degree < RTI ID = 0.0 > And an external lead modifier for a semiconductor device which is provided with a modifying section and can continuously perform pitch correction and flatness correction of an external lead by the operation of one die set. 제1항에 있어서, 1개의 다이세트에 상기 제1의 피치수정고리 및 상기 제2의 피치수정고리, 이들 제1 및 제2의 피치수정고리의 동작과 연속적으로 동작하도록 배치된 외부리이드의 평탄도수정을 위한 리이드누픔부와 상기 제1 및 제2의 피치수정고리와는 별개의 장소에 구비된 외부리이드의 평탄도수정을 위한 리이드밀어올림부를 구비하고, 1개의 다이세트의 동작에 의해 외부리이드의 피치수정동작과 평탄도수정을 위한 리이드누름동작을 연속적으로 실행함과 동시에 외부리이드의 평탄수정을 위한 리이드밀어올림동작도 실행할 수 있도록한 반도체장치의 외부리이드 수정기.2. The method of claim 1, further comprising the steps of: providing a first set of pitch modifying rings and a second pitch modifying ring on the set of one die, the flatness of the outer leads arranged to operate successively with the operation of the first and second pitch modifying rings, And a lead pushing up portion for correcting the flatness of the outer lead provided at a place different from the first and second pitch modifying rings, Wherein the lead pivoting operation for flattening the outer lead is performed while continuously executing the lead pushing operation for correcting the pitch of the lead and correcting the flatness. 제1항에 있어서, 상기 제1 및 제2의 피치수정고리를 반도체장치의 외부리이드에 통과시킨 후에 원래의 위치로 복귀이동시키는 과정에서 상기 제1 및 제2의 피치수정고리가 외부리이드에 접촉하지 않도록 상기 제1 및 제2의 피치수정고리를 외부리이드에서 떨어지는 방향으로 이동시키는 이동기구가 더 구비되어 있는 반도체장치의 외부리이드 수정기.2. The method of claim 1, wherein the first and second pitch correction loops contact the outer lead in a process of returning the first and second pitch correction loops to their original position after passing through the outer lead of the semiconductor device, Further comprising a moving mechanism for moving said first and second pitch correction loops in a direction away from said outer lead. 반도체장의 외부리이드 수정기에 있어서, 외부리이드의 각 리이드사이의 각 간극을 통고할 수 있는 고리부를 상기 각 간극의 1피치건너 배열한 피치수정고리. 이 피치수정고리를 상기 피치수정고리가 상기 각 리이드 사이의 각 간극에 통과시켜서 제1의 피치수정을 실행하는 제1의 피치수정부, 이 제1의 피치수정이 종료한후 상기 피치수정고리를 상기 제1의 피치수정시에 상기 피치수정고리가 통과하지 않았던 1피치 건너의 각 간극에 대응하도록 1피치만큼 시프트시키는 1피치시프트와 이 시프트된 피치구정고리를 상기 각 리이드사이의 각 간극에 통과시켜서 제2의 피치수정을 실행하는 제2의 피치수정고리가 구비한 반도체장치의 외부리이드 수정기.An outer lead modifier of a semiconductor chip, wherein a ring portion capable of communicating each gap between the respective leads of the outer lead is arranged across one pitch of the gaps. A first pitch correction section for causing the pitch correction ring to pass through the respective gaps between the respective pitches to perform a first pitch modification; A first pitch shift which shifts by one pitch so as to correspond to each gap of one pitch opposite to the pitch correction ring at the time of the first pitch modification and a second pitch shift which shifts the shifted pitch ring to each gap between the respective leads And a second pitch correction ring for performing a second pitch correction by performing the second pitch correction. 제1항 내지 제4항중 어느 한항에 있어서, 외부리이드 수정을 위해 반도체장치의 패키지를 지지하는 지지대에 패키지에 접촉하는 링형상의 돌출부를 구비한 반도체장치의 외부리이드 수정기.5. The outer lead modifier of a semiconductor device according to any one of claims 1 to 4, having a ring-shaped protrusion in contact with the package on a support for supporting a package of the semiconductor device for external lead modification. 제1하 내지 제4항중 어는 한항에 있어서, 외부리이드의 평탄도수정을 위해 사용되는 밀어올림대는 그 외부리이드에 맞닿는 부분이 리이드의 선단각도에 대해서 서로 대향하는 각도로 형성되어 있는 반도체장치의 외부리이드 수정기.In one of the first to fourth aspects, the push-up bar used for correcting the flatness of the outer lead is formed in such a manner that a portion of the push-up bar abutting the outer lead is formed at an angle, Lead regulator. 반도체장치의 외과검사장치로써, 청구항1내지 6항중 어느 한항의 반도체장치의 외부리이드 수정기가 그 주변부에 배치되어 있는 반도체장치의 외관검사장치.An apparatus for inspecting the appearance of a semiconductor device in which an outer lead modifier of a semiconductor device according to any one of claims 1 to 6 is disposed at a peripheral portion thereof, as a surgical inspection apparatus for a semiconductor device.
KR1019960029094A 1995-09-19 1996-07-19 Outer lead corrector of semiconductor device and outside survey instrument of semiconductor device having it KR100236872B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-239738 1995-09-19
JP7239738A JPH0982868A (en) 1995-09-19 1995-09-19 Outer lead corrector of semiconductor device and visual inspection device of semiconductor device equipped therewith

Publications (2)

Publication Number Publication Date
KR970018484A true KR970018484A (en) 1997-04-30
KR100236872B1 KR100236872B1 (en) 2000-01-15

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KR1019960029094A KR100236872B1 (en) 1995-09-19 1996-07-19 Outer lead corrector of semiconductor device and outside survey instrument of semiconductor device having it

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JP (1) JPH0982868A (en)
KR (1) KR100236872B1 (en)
CN (1) CN1132237C (en)
TW (1) TW295715B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06163782A (en) * 1992-11-17 1994-06-10 Sanyo Silicon Denshi Kk Bend correction apparatus of ic lead

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TW295715B (en) 1997-01-11
JPH0982868A (en) 1997-03-28
CN1132237C (en) 2003-12-24
CN1180241A (en) 1998-04-29
KR100236872B1 (en) 2000-01-15

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