JPH0384943A - Tray retention mechanism - Google Patents

Abstract

PURPOSE:To offer a tray retention mechanism which can comply flexibly with trays whose outer shapes and sizes are different by a method wherein a relative position of a strut on a base stand is constituted so as to be variable according to the outer shapes and the sizes of the trays. CONSTITUTION:A fixed strut 2 whose cross section is L-shaped is fixed to an end part of a base stand 1; a pantagraph mechanism 4 constituted so as to be expanded and contracted freely is installed at a lower part. A movable plate 5 is installed at the tip of the pantagraph mechanism 4; a movable strut 6 whose cross section is L-shaped is installed on the plate 5 so as to retain a tray 3 at its inside face. A position of the movable strut 6 is adjusted in advance and its direction is adjusted according to an outer shape and a size of the tray 3; a plurality of trays 3 are arranged and retained so as to be piled up between the fixed strut 2 and the movable strut 6.

Description

[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a tray holding mechanism.

(Prior art) Conventionally, in the process of inspecting the electrical characteristics of packaged semiconductors, since semiconductor element packages are used frequently, dedicated inspection equipment (IC handlers) are required for each type of package. In response to the recent trend toward high-mix, low-volume production of semiconductor devices, a so-called universal handler is an inspection device that can measure many shapes of semiconductor devices with one device by replacing the measuring unit. is being developed.

As a method of supplying semiconductor elements to such inspection equipment,
In general, the one-track type is often used.

In this one-tray type, a large number of device storage sections are provided on the tray, for example, in a lattice pattern, and packaged semiconductor devices such as QFPs, SOPs, etc. are accommodated in the device storage sections, and the devices are transported in this state.

Therefore, in such an inspection device, as a mechanism for holding a plurality of trays, a plurality of trays of a predetermined shape are arranged in a stacked manner between, for example, two columns provided on a base, and Many of them are equipped with a tray holding mechanism configured to hold the tray by the side surface.

(Problem to be Solved by the Invention) However, in recent years, the production of high-mix, low-volume semiconductor devices has been progressing more and more, and even the trays for accommodating semiconductor devices as described above have their outer dimensions depending on the shape of the semiconductor devices, etc. It is also conceivable to use multiple types of trays with different dimensions. Therefore, it is becoming necessary for the tray holding mechanism to flexibly accommodate a plurality of types of trays having different external shapes and dimensions.

The present invention has been made in response to such conventional circumstances, and aims to provide a highly flexible tray holding mechanism that can flexibly accommodate trays of different shapes and dimensions. .

[Structure of the Invention] (Means for Solving the Problem) That is, the present invention provides a tray holding mechanism configured to be able to hold a plurality of trays of a predetermined shape such that they are stacked between a plurality of supports provided on a base. The apparatus is characterized in that the relative position of the support on the base can be changed depending on the outer shape and dimensions of the tray.

(Function) In the tray holding mechanism of the present invention having the above configuration, by changing the relative positions of the columns on the base according to the outer shape and dimensions of the tray, various outer shapes and dimensions can be provided between these columns. Can hold different trays.

(Example) Hereinafter, a tray holding mechanism according to an example of the present invention will be described with reference to the drawings.

As shown in FIGS. 1 and 2, a fixing column 2 having a roughly L-shaped cross section is fixed to the end of a base 1 of the tray holding mechanism made of, for example, metal. The inner surface is configured to hold one corner of a tray 3 on which a large number of semiconductor devices (not shown) are placed, for example.

Further, a pantograph mechanism 4 which is configured to be extendable and retractable is provided at the lower part of the fixed column 2 so as to be freely rotatable in the horizontal direction. Furthermore, at the tip of this pantograph mechanism 4,
The base 1.
A movable plate 5 is provided, which is configured to be movable to a desired position on the base 1 and configured to be fixed at a desired position on the base 1, for example, by a magnet or a vacuum chuck.

On the movable plate 5, a movable column 6 having a substantially L-shaped cross section is provided so as to be rotatable in the horizontal direction so as to hold one corner of the tray 3 on its inner surface. Further, on the movable plate 5, a presser plate 7 having a roughly L-shaped cross section is fixed so as to be located outside the movable column 6, and two presser screws are inserted through the presser plate 7. 8, the rotational direction rfL (orientation) of the movable support 6 can be adjusted.

The tray holding mechanism of this embodiment having the above-mentioned configuration is disposed, for example, in a tray accommodating section of an inspection apparatus that inspects the electrical characteristics of a packaged semiconductor device.

Then, the tray 3 is movable according to the external shape and dimensions of the tray 3 to be held in advance, such that the corner of the tray 3 located diagonally to the corner held by the fixed support 2 is held by the inner surface of the movable support 6. While adjusting the position of the support column 6,
By tightening or loosening the two holding screws 8 provided in the tray 3, the direction of the movable column 6 is adjusted so that the inner surface of the movable column 6 comes into contact with the corner of the tray 3. A plurality of trays 3 are arranged in a stacked manner between the adjusted fixed column 2 and the movable column 6, and these trays 3 are held by the fixed column 2 and the movable column 6.

In addition, when using trays 3 with different outer diameters and dimensions,
For example, when using the tray 3a or tray 3b as shown by dotted lines in FIG. 1, the position and orientation of the movable support 6 are readjusted to match the tray 3a1) to the tray 3b as described above.

That is, first, the pantograph mechanism 4 is expanded/contracted and rotated to move and fix the movable column 6 to the positions indicated by symbols A and B in FIG. By tightening or loosening the movable support 8, the direction of the movable support 6 is adjusted so that the inner surface of the movable support 6 comes into contact with the corners of the trays 3a1 and 3b.

Note that when using trays 3 that have the same shape but different dimensions, the pantograph mechanism 4 will not be rotated, but its position will be adjusted so that it expands and contracts on the same line. Adjustment of the orientation of 6 is not necessary.

Therefore, for example, multiple types of trays 3, trays 3a1, trays 3b, etc. having different external shapes and dimensions can be used without replacing the tray holding mechanism, etc., and such changes can be easily made in a short time. I can do it.

Note that the present invention is not limited to such embodiments,
Various modifications are possible. For example, in the above embodiment, the movable plate 5 supporting the movable column 6 is the pantograph mechanism 4.
Although the structure is such that the movable column 6 is connected to the base 1 through
It is also possible to have a configuration in which it is not connected to.

[Effects of the Invention] As explained above, according to the tray holding mechanism of the present invention, it is possible to flexibly accommodate multiple types of trays with different external shapes and dimensions, and the flexibility is improved compared to the conventional one. It is possible to improve the

[Brief explanation of drawings]

FIG. 1 is a plan view showing the structure of a tray holding mechanism according to an embodiment of the present invention, and FIG. 2 is a side view of the tray holding mechanism shown in FIG. 1. 1...Base, 2...Fixed support, 3.3
a, 3b...Tray 4...Pantograph mechanism, 5...Movable plate, 6...
・Movable column, 7...pressing plate, 8...pressing screw.

Claims (1)

[Claims] (1) In a tray holding mechanism that is configured to be able to hold a plurality of trays of a predetermined shape by stacking them between a plurality of supports provided on a base, depending on the external shape and dimensions of the tray, A tray holding mechanism characterized in that the relative positions of the pillars are configured to be changeable.