KR970009008B1 - 대형고순도 석영글라스판, 그 제조방법 및 제조장치 - Google Patents

대형고순도 석영글라스판, 그 제조방법 및 제조장치 Download PDF

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Publication number
KR970009008B1
KR970009008B1 KR1019940701006A KR19940071006A KR970009008B1 KR 970009008 B1 KR970009008 B1 KR 970009008B1 KR 1019940701006 A KR1019940701006 A KR 1019940701006A KR 19940071006 A KR19940071006 A KR 19940071006A KR 970009008 B1 KR970009008 B1 KR 970009008B1
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KR
South Korea
Prior art keywords
quartz glass
glass tube
tube
glass plate
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1019940701006A
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English (en)
Korean (ko)
Inventor
요시아끼 아세
가즈오 아사지마
신니찌 오꼬시
기무라히로유끼
Original Assignee
신에쯔 세끼에이 가부시끼가이샤
스께하라다로유
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Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=14042458&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR970009008(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 신에쯔 세끼에이 가부시끼가이샤, 스께하라다로유 filed Critical 신에쯔 세끼에이 가부시끼가이샤
Application granted granted Critical
Publication of KR970009008B1 publication Critical patent/KR970009008B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/047—Re-forming tubes or rods by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/02—Re-forming glass sheets
    • C03B23/037—Re-forming glass sheets by drawing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B23/00—Re-forming shaped glass
    • C03B23/04—Re-forming tubes or rods
    • C03B23/06—Re-forming tubes or rods by bending
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/08—Quartz
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/09—Tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
KR1019940701006A 1992-07-31 1992-07-31 대형고순도 석영글라스판, 그 제조방법 및 제조장치 Expired - Fee Related KR970009008B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1992/000976 WO1994003404A1 (fr) 1992-07-31 1992-07-31 Plaque en verre de quartz de grandes dimensions et a haute purete, et procede et appareil de fabrication

Publications (1)

Publication Number Publication Date
KR970009008B1 true KR970009008B1 (ko) 1997-06-03

Family

ID=14042458

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1019940701006A Expired - Fee Related KR970009008B1 (ko) 1992-07-31 1992-07-31 대형고순도 석영글라스판, 그 제조방법 및 제조장치
KR1019940701006A Granted KR940702469A (ko) 1992-07-31 1992-07-31 대형고순도 석영글라스판, 그 제조방법 및 제조장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1019940701006A Granted KR940702469A (ko) 1992-07-31 1992-07-31 대형고순도 석영글라스판, 그 제조방법 및 제조장치

Country Status (7)

Country Link
US (1) US5683483A (enExample)
EP (1) EP0607433B2 (enExample)
JP (1) JP2825977B2 (enExample)
KR (2) KR970009008B1 (enExample)
DE (1) DE69227521T3 (enExample)
TW (1) TW309511B (enExample)
WO (1) WO1994003404A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990008146A (ko) * 1995-04-28 1999-01-25 미우라아끼라 합성 석영 분말의 제조방법 및 석영 유리 성형체의 제조방법
US6143676A (en) * 1997-05-20 2000-11-07 Heraeus Quarzglas Gmbh Synthetic silica glass used with uv-rays and method producing the same
US6782716B2 (en) 1999-02-12 2004-08-31 Corning Incorporated Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
US6319634B1 (en) 1999-03-12 2001-11-20 Corning Incorporated Projection lithography photomasks and methods of making
US6682859B2 (en) 1999-02-12 2004-01-27 Corning Incorporated Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass
US6242136B1 (en) 1999-02-12 2001-06-05 Corning Incorporated Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
US6783898B2 (en) 1999-02-12 2004-08-31 Corning Incorporated Projection lithography photomask blanks, preforms and method of making
US6265115B1 (en) 1999-03-15 2001-07-24 Corning Incorporated Projection lithography photomask blanks, preforms and methods of making
EP1088789A3 (en) * 1999-09-28 2002-03-27 Heraeus Quarzglas GmbH & Co. KG Porous silica granule, its method of production and its use in a method for producing quartz glass
US7797966B2 (en) 2000-12-29 2010-09-21 Single Crystal Technologies, Inc. Hot substrate deposition of fused silica
US20070059533A1 (en) * 2005-09-12 2007-03-15 Burdette Steven R Thermal reflow of glass and fused silica body
JP2010192679A (ja) * 2009-02-18 2010-09-02 Shinetsu Quartz Prod Co Ltd 石英ガラス製ウエハー処理槽及びその製造方法
RU2433090C1 (ru) * 2010-05-19 2011-11-10 Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток" (ФГУП "НПП "Исток") Способ изготовления листового стекла из полого стеклянного цилиндра
CN102826751B (zh) * 2012-09-17 2014-11-05 东海县圣达石英制品有限公司 一种低羟基黑色石英管及其制备方法
US11572300B2 (en) * 2015-04-24 2023-02-07 Nipro Corporation Method for manufacturing medical glass container and fire blast device provided with rotator
CN118084309B (zh) * 2024-03-04 2025-11-28 浙江富乐德石英科技有限公司 一种圆弧形石英板的自动化生产设备及其加工方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1283333A (en) * 1918-03-07 1918-10-29 William G Shaw Process for forming glass sheets.
GB257590A (enExample) * 1925-08-27 1927-03-24 Societe Anonyme Des Manufactures Des Glaces Et Produits Chimiques De St. Gobain, Chauny Et Cirey
FR20600E (fr) * 1970-07-22 1918-07-02 Philippe Adolphe Cauet Bras et avant-bras artificiels articulés et leur dispositif de commande
DE2443556C3 (de) † 1974-09-11 1982-05-06 Corning Ltd., Sunderland, Durham Vorrichtung zum Biegen von Glas
DE3226451C2 (de) * 1982-07-15 1984-09-27 Heraeus Quarzschmelze Gmbh, 6450 Hanau Verfahren zur Herstellung von schlierenfreien, blasenfreien und homogenen Quarzglasplatten und Vorrichtung zur Durchführung des Verfahrens
JPS62235223A (ja) * 1986-04-03 1987-10-15 Toshiba Ceramics Co Ltd 高珪酸ガラス部材の製造方法および製造装置
JPH0441148Y2 (enExample) † 1986-12-15 1992-09-28
KR950014690B1 (ko) † 1988-02-22 1995-12-13 닛뽄 덴기 가라스 가부시기가이샤 박판(薄板)글라스의 제조방법 및 장치

Also Published As

Publication number Publication date
WO1994003404A1 (fr) 1994-02-17
JP2825977B2 (ja) 1998-11-18
DE69227521D1 (de) 1998-12-10
TW309511B (enExample) 1997-07-01
EP0607433B1 (en) 1998-11-04
US5683483A (en) 1997-11-04
KR940702469A (ko) 1994-08-20
EP0607433B2 (en) 2003-03-05
EP0607433A1 (en) 1994-07-27
DE69227521T2 (de) 1999-07-15
EP0607433A4 (en) 1995-03-01
DE69227521T3 (de) 2003-12-24

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