KR970008484A - Device Separation Method of Semiconductor Device - Google Patents
Device Separation Method of Semiconductor Device Download PDFInfo
- Publication number
- KR970008484A KR970008484A KR1019950023185A KR19950023185A KR970008484A KR 970008484 A KR970008484 A KR 970008484A KR 1019950023185 A KR1019950023185 A KR 1019950023185A KR 19950023185 A KR19950023185 A KR 19950023185A KR 970008484 A KR970008484 A KR 970008484A
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor device
- device isolation
- separation method
- isolation method
- etching process
- Prior art date
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- Element Separation (AREA)
Abstract
반도체 장치의 소자분리 방법에 관하여 기재되어 있다. 식각 선택비를 가진 두 물질층을 패턴 사이에 적층시킨 후, 평탄화 공정과 식각 공정을 이용하여 두개의 트랜치를 형성하는 반도체 장치의 소자분리 방법을 제공한다. 다결정실리콘과 산화물로 만들 수 있는 가장 얇은 두께의 폭을 가진 트랜치를 형성하면, 고집적의 메모리 소자에서도 효과적인 소자 분리가 가능하다.A device isolation method of a semiconductor device is described. The present invention provides a device isolation method for a semiconductor device in which two material layers having an etch selectivity are stacked between patterns, and then two trenches are formed using a planarization process and an etching process. Forming a trench with the thinnest thickness that can be made of polycrystalline silicon and oxide enables effective device isolation even in highly integrated memory devices.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제5도 내지 제9도는 본 발명의 제1실시예에 따른 소자분리방법의 제공정을 순서대로 도시한 단면도.5 to 9 are cross-sectional views sequentially showing the provision of the device isolation method according to the first embodiment of the present invention.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950023185A KR970008484A (en) | 1995-07-31 | 1995-07-31 | Device Separation Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950023185A KR970008484A (en) | 1995-07-31 | 1995-07-31 | Device Separation Method of Semiconductor Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970008484A true KR970008484A (en) | 1997-02-24 |
Family
ID=66541377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950023185A KR970008484A (en) | 1995-07-31 | 1995-07-31 | Device Separation Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970008484A (en) |
-
1995
- 1995-07-31 KR KR1019950023185A patent/KR970008484A/en not_active Application Discontinuation
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