KR960026957A - 반도체소자 - Google Patents
반도체소자Info
- Publication number
- KR960026957A KR960026957A KR1019940039063A KR19940039063A KR960026957A KR 960026957 A KR960026957 A KR 960026957A KR 1019940039063 A KR1019940039063 A KR 1019940039063A KR 19940039063 A KR19940039063 A KR 19940039063A KR 960026957 A KR960026957 A KR 960026957A
- Authority
- KR
- South Korea
- Prior art keywords
- active region
- semiconductor device
- gate electrode
- contact holes
- sides
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 8
- 239000000758 substrate Substances 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 230000005669 field effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823437—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7834—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with a non-planar structure, e.g. the gate or the source or the drain being non-planar
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
본 발명은 반도체소자에 관한 것으로서, 모스 전계효과 트랜지스터에서 게이트전극 양측에 형성되는 활성영역을 채널폭 보다 크게 형성하되, 공정 및 설계여유가 허용하는 방향으로 활성영역을 연장하여 형성하고, 상기 활성영역을 상측 도전배선과 연결하는 콘택홀을 다수개 형성하였으므로, 소오스/드레인 전극의 콘택저항이 감소되고, 콘택홀 형성을 위한 공정 여유도가 증가되어 공정수율 및 소자동작의 신뢰성을 향상시킬 수 있다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명들에 따른 반도체소자들의 레이 아웃도.
Claims (4)
- 반도체기판상에 형성되어 있는 게이트 산화막과, 상기 게이트산화막에 형성되어 있는 게이트전극과, 상기 게이트전극 하부의 채널 보다 넓은 폭을 갖고, 게이트전극 양측의 반도체기판에 형성되어 있는 소오스/드레인 전극이 되는 활성영역과, 상기 양측의 활성영역을 상측의 도전배선과 연결시키는 다수개의 콘택홀을 구비하는 반도체소자.
- 제1항에 있어서, 상기 화성영역이 게이트전극과 동일한 방향으로 연장되어 있는 것을 특징으로 하는 반도세소자.
- 제2항에 있어서, 상기 활성영역이 좌우 대칭으로 연장되어 있는 것을 특징으로 하는 반도체소자.
- 제2항에 있어서, 상기 활성영역이 서로 어긋나는 방향으로 연장되어 있는 것을 특징으로 하는 반도체소자※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940039063A KR100326807B1 (ko) | 1994-12-29 | 1994-12-29 | 반도체소자 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940039063A KR100326807B1 (ko) | 1994-12-29 | 1994-12-29 | 반도체소자 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960026957A true KR960026957A (ko) | 1996-07-22 |
KR100326807B1 KR100326807B1 (ko) | 2002-08-08 |
Family
ID=37478345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940039063A KR100326807B1 (ko) | 1994-12-29 | 1994-12-29 | 반도체소자 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100326807B1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100713499B1 (ko) * | 2006-04-12 | 2007-05-02 | 삼성전자주식회사 | 슬라이딩 모듈을 구비한 휴대용 단말기 |
-
1994
- 1994-12-29 KR KR1019940039063A patent/KR100326807B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR100326807B1 (ko) | 2002-08-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6555883B1 (en) | Lateral power MOSFET for high switching speeds | |
KR940010352A (ko) | 반도체기억장치 | |
KR930020666A (ko) | 수직형 집적 반도체 구조체 | |
KR870005464A (ko) | 반도체장치 | |
KR860003659A (ko) | 반도체집적회로장치 | |
KR840008222A (ko) | 연결패드에서 기저의 실리콘으로 직접 연결된 고전력 금속산화물 반도체 전계효과 트랜지스터 | |
JP2005183661A5 (ko) | ||
JPH0888356A (ja) | Mosゲート型半導体装置 | |
KR960026941A (ko) | 반도체장치 | |
KR910019235A (ko) | 반도체기억장치 | |
KR850007718A (ko) | 반도체 장치 | |
KR930003235A (ko) | 마스터 슬라이스형 반도체 집적회로 장치의 기본셀 형성을 위한 트랜지스터 배치와 마스터 슬라이스형 반도체 집적회로 장치 | |
KR960032771A (ko) | 접합 전계 효과 트랜지스터를 갖는 반도체 장치 | |
KR870005462A (ko) | 감지증폭회로 | |
KR930005353A (ko) | 전력스위칭용모스트랜지스터 | |
KR900015311A (ko) | 반도체장치 및 그 제조방법 | |
KR960026957A (ko) | 반도체소자 | |
KR960001851A (ko) | 박막트랜지스터 어레이 및 액정표시장치 | |
KR910017623A (ko) | 반도체 장치 | |
KR890007406A (ko) | 고밀도 집적회로 | |
KR910017656A (ko) | 반도체장치 | |
KR900015316A (ko) | 반도체장치 | |
KR840005929A (ko) | Mos 트랜지스터 집적회로 | |
KR950010066A (ko) | 박막배선을 갖는 반도체장치와 그의 제조방법 | |
KR910021032A (ko) | 바이씨모스 로직 어레이 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20100126 Year of fee payment: 9 |
|
LAPS | Lapse due to unpaid annual fee |