KR960025509U - 반도체 제조장비에 있어서의 패키지 가이드 - Google Patents

반도체 제조장비에 있어서의 패키지 가이드

Info

Publication number
KR960025509U
KR960025509U KR2019940035254U KR19940035254U KR960025509U KR 960025509 U KR960025509 U KR 960025509U KR 2019940035254 U KR2019940035254 U KR 2019940035254U KR 19940035254 U KR19940035254 U KR 19940035254U KR 960025509 U KR960025509 U KR 960025509U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
package guide
package
guide
Prior art date
Application number
KR2019940035254U
Other languages
English (en)
Other versions
KR0127109Y1 (ko
Inventor
이규호
Original Assignee
아남반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남반도체주식회사 filed Critical 아남반도체주식회사
Priority to KR2019940035254U priority Critical patent/KR0127109Y1/ko
Publication of KR960025509U publication Critical patent/KR960025509U/ko
Application granted granted Critical
Publication of KR0127109Y1 publication Critical patent/KR0127109Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940035254U 1994-12-23 1994-12-23 반도체 제조장비에 있어서의 패키지 가이드 KR0127109Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940035254U KR0127109Y1 (ko) 1994-12-23 1994-12-23 반도체 제조장비에 있어서의 패키지 가이드

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940035254U KR0127109Y1 (ko) 1994-12-23 1994-12-23 반도체 제조장비에 있어서의 패키지 가이드

Publications (2)

Publication Number Publication Date
KR960025509U true KR960025509U (ko) 1996-07-22
KR0127109Y1 KR0127109Y1 (ko) 1998-10-01

Family

ID=19402368

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940035254U KR0127109Y1 (ko) 1994-12-23 1994-12-23 반도체 제조장비에 있어서의 패키지 가이드

Country Status (1)

Country Link
KR (1) KR0127109Y1 (ko)

Also Published As

Publication number Publication date
KR0127109Y1 (ko) 1998-10-01

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee