KR960038735U - 반도체 제조장비의 패키지 스톱퍼 - Google Patents

반도체 제조장비의 패키지 스톱퍼

Info

Publication number
KR960038735U
KR960038735U KR2019950010432U KR19950010432U KR960038735U KR 960038735 U KR960038735 U KR 960038735U KR 2019950010432 U KR2019950010432 U KR 2019950010432U KR 19950010432 U KR19950010432 U KR 19950010432U KR 960038735 U KR960038735 U KR 960038735U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
package stopper
stopper
package
Prior art date
Application number
KR2019950010432U
Other languages
English (en)
Other versions
KR0124754Y1 (ko
Inventor
김의태
곽용상
Original Assignee
아남반도체주식회사
아남인스트루먼트
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아남반도체주식회사, 아남인스트루먼트 filed Critical 아남반도체주식회사
Priority to KR2019950010432U priority Critical patent/KR0124754Y1/ko
Publication of KR960038735U publication Critical patent/KR960038735U/ko
Application granted granted Critical
Publication of KR0124754Y1 publication Critical patent/KR0124754Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
KR2019950010432U 1995-05-17 1995-05-17 반도체 제조장비의 패키지 스톱퍼 KR0124754Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950010432U KR0124754Y1 (ko) 1995-05-17 1995-05-17 반도체 제조장비의 패키지 스톱퍼

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950010432U KR0124754Y1 (ko) 1995-05-17 1995-05-17 반도체 제조장비의 패키지 스톱퍼

Publications (2)

Publication Number Publication Date
KR960038735U true KR960038735U (ko) 1996-12-18
KR0124754Y1 KR0124754Y1 (ko) 1999-02-18

Family

ID=19413337

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950010432U KR0124754Y1 (ko) 1995-05-17 1995-05-17 반도체 제조장비의 패키지 스톱퍼

Country Status (1)

Country Link
KR (1) KR0124754Y1 (ko)

Also Published As

Publication number Publication date
KR0124754Y1 (ko) 1999-02-18

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee