KR960025266U - 포토레지스트의 도포장치 - Google Patents
포토레지스트의 도포장치Info
- Publication number
- KR960025266U KR960025266U KR2019940033147U KR19940033147U KR960025266U KR 960025266 U KR960025266 U KR 960025266U KR 2019940033147 U KR2019940033147 U KR 2019940033147U KR 19940033147 U KR19940033147 U KR 19940033147U KR 960025266 U KR960025266 U KR 960025266U
- Authority
- KR
- South Korea
- Prior art keywords
- coating device
- photoresist coating
- photoresist
- coating
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940033147U KR200208173Y1 (ko) | 1994-12-07 | 1994-12-07 | 포토레지스트의 도포장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940033147U KR200208173Y1 (ko) | 1994-12-07 | 1994-12-07 | 포토레지스트의 도포장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960025266U true KR960025266U (ko) | 1996-07-22 |
KR200208173Y1 KR200208173Y1 (ko) | 2001-02-01 |
Family
ID=60851030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940033147U KR200208173Y1 (ko) | 1994-12-07 | 1994-12-07 | 포토레지스트의 도포장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200208173Y1 (ko) |
-
1994
- 1994-12-07 KR KR2019940033147U patent/KR200208173Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200208173Y1 (ko) | 2001-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
LAPS | Lapse due to unpaid annual fee |