KR960025266U - 포토레지스트의 도포장치 - Google Patents

포토레지스트의 도포장치

Info

Publication number
KR960025266U
KR960025266U KR2019940033147U KR19940033147U KR960025266U KR 960025266 U KR960025266 U KR 960025266U KR 2019940033147 U KR2019940033147 U KR 2019940033147U KR 19940033147 U KR19940033147 U KR 19940033147U KR 960025266 U KR960025266 U KR 960025266U
Authority
KR
South Korea
Prior art keywords
coating device
photoresist coating
photoresist
coating
Prior art date
Application number
KR2019940033147U
Other languages
English (en)
Other versions
KR200208173Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940033147U priority Critical patent/KR200208173Y1/ko
Publication of KR960025266U publication Critical patent/KR960025266U/ko
Application granted granted Critical
Publication of KR200208173Y1 publication Critical patent/KR200208173Y1/ko

Links

KR2019940033147U 1994-12-07 1994-12-07 포토레지스트의 도포장치 KR200208173Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940033147U KR200208173Y1 (ko) 1994-12-07 1994-12-07 포토레지스트의 도포장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940033147U KR200208173Y1 (ko) 1994-12-07 1994-12-07 포토레지스트의 도포장치

Publications (2)

Publication Number Publication Date
KR960025266U true KR960025266U (ko) 1996-07-22
KR200208173Y1 KR200208173Y1 (ko) 2001-02-01

Family

ID=60851030

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940033147U KR200208173Y1 (ko) 1994-12-07 1994-12-07 포토레지스트의 도포장치

Country Status (1)

Country Link
KR (1) KR200208173Y1 (ko)

Also Published As

Publication number Publication date
KR200208173Y1 (ko) 2001-02-01

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
LAPS Lapse due to unpaid annual fee