KR970055699U - 포토레지스트 코팅장치 - Google Patents

포토레지스트 코팅장치

Info

Publication number
KR970055699U
KR970055699U KR2019960005015U KR19960005015U KR970055699U KR 970055699 U KR970055699 U KR 970055699U KR 2019960005015 U KR2019960005015 U KR 2019960005015U KR 19960005015 U KR19960005015 U KR 19960005015U KR 970055699 U KR970055699 U KR 970055699U
Authority
KR
South Korea
Prior art keywords
coating device
photoresist coating
photoresist
coating
Prior art date
Application number
KR2019960005015U
Other languages
English (en)
Other versions
KR0134738Y1 (ko
Inventor
권창헌
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019960005015U priority Critical patent/KR0134738Y1/ko
Publication of KR970055699U publication Critical patent/KR970055699U/ko
Application granted granted Critical
Publication of KR0134738Y1 publication Critical patent/KR0134738Y1/ko

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019960005015U 1996-03-16 1996-03-16 포토레지스트 코팅장치 KR0134738Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960005015U KR0134738Y1 (ko) 1996-03-16 1996-03-16 포토레지스트 코팅장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960005015U KR0134738Y1 (ko) 1996-03-16 1996-03-16 포토레지스트 코팅장치

Publications (2)

Publication Number Publication Date
KR970055699U true KR970055699U (ko) 1997-10-13
KR0134738Y1 KR0134738Y1 (ko) 1999-03-20

Family

ID=19452018

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960005015U KR0134738Y1 (ko) 1996-03-16 1996-03-16 포토레지스트 코팅장치

Country Status (1)

Country Link
KR (1) KR0134738Y1 (ko)

Also Published As

Publication number Publication date
KR0134738Y1 (ko) 1999-03-20

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Legal Events

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