KR960022313A - 어닐링된 저복사율의 피막 - Google Patents

어닐링된 저복사율의 피막 Download PDF

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KR960022313A
KR960022313A KR1019950056862A KR19950056862A KR960022313A KR 960022313 A KR960022313 A KR 960022313A KR 1019950056862 A KR1019950056862 A KR 1019950056862A KR 19950056862 A KR19950056862 A KR 19950056862A KR 960022313 A KR960022313 A KR 960022313A
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coated article
metal
metal oxide
antireflective
sputtering
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KR1019950056862A
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KR0179463B1 (ko
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아바브 메란
제이. 핀리 제임스
에이. 밀러 래리
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리타 버그스트롬
피피지 인더스트리즈, 인코포레이티드
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639—Multilayers containing at least two functional metal layers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant

Abstract

본 발명은, 반사방지성 금속 산화물, 적외선 반사성 금속, 금속하도막 및 반사방지성 금속 산화물의 연속적인 층을 포함하는 저복사율의 피막; 및 기재를 포함하는 저복사율의 피복된 제품의 화학적 및 기계직 내구성을 개선시키는 방법에 관한 것이다. 이 방법은 피복된 제품을 기재의 변형점 미만의 온도에서 피막을 어닐링시키기에 충분한 시간동안 및 충분한 온도에서 가열하여, 구조적 결합 및 화학 반응을 감소시키는 것을 포함한다. 온도가 기재의 변형점 미만으로 유지되기 때문에, 피막을 어닐링시켜 피막의 화학적 및 기계적 내구성을 개선시키는 것은 기재, 전형적으로는 유리에 영구적인 응력을 도입하지 않는다.

Description

어닐링된 저복사율의 피막
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (18)

  1. 기재상에 반사방지성 금속 산화물, 적외선 반사성 금속, 금속 하도막 및 반사방지 성 금속 산화물의 연속적인 층을 스퍼터링(Sputtering) 시키는 것을 포함하는 저복사율의 피복된 제품을 제조하는 방법에 있어서, 기재의 변형점 미만의 온도에서 피막을 어닐링(annealing) 시키기에 충분할 정도로 피복된 제품을 가열하는 것을 포함하는 개선된 방법.
  2. 제1항에 있어서, 기재가 소다(soda)-석회-실리카 유리이고, 온도가 940℉(504℃) 미만인 방법.
  3. 제2항에 있어서, 온도가 600 내지 940℉(약 315 내지 504℃)인 방법.
  4. 제3항에 있어서, 온도가 700 내지 850℉(약 371 내지 454℃)인 방법.
  5. 제1항에 있어서, 반사방지성 금속 산화물 필름이 아연과 주석의 혼합물을 포함하는 방법.
  6. 제5항에 있어서, 적외선 반사성 금속이 은인 방법.
  7. 제6항에 있어서, 금속 하도막이 티탄인 방법.
  8. 제7항에 있어서, 피복된 제품을 어닐링 리어(lehr) 내에서 가열하는 방법.
  9. 제7항에 있어서, 피복된 제품을 로프트 퍼니스(loft furnace) 내에서 가열하는 방법.
  10. 제7항에 있어서, 피복된 제품을 대류 오븐내에서 가열하는 방법.
  11. 제7항에 있어서, 피복된 제품을 유도 퍼니스내에서 가열하는 방법.
  12. 기재상에 반사방지성 금속 산화물, 적외선 반사성 금속, 금속 하도막 및 반사방지성 금속 산화물의 연속적인 층을 스퍼터링시키는 것을 포함하는 저복사율의 피복된 제품을 제조하는 방법에 있어서, 금속 층을 스퍼터링시킨 후에 피막을 가열한 다음, 반사방지성 금속 산화물을 스퍼터링시키는 것을 포함하는 개선된 방법.
  13. 제12항에 있어서, 복사성 수단에 의해 가열하는 수행하는 방법.
  14. 제12항에 있어서, 유도성 수단에 의해 가열하는 수행하는 방법.
  15. 기재상에 반사방지성 금속 산화물, 적외선 반사성 금속, 금속 하도막 및 반사방지성 금속 산화물의 연속적인 층을 스프터링시키는 것을 포함하는 저복사율의 피복된 제품을 제조하는 방법에 있어서, 기재를 가열한 후 스퍼터링시켜 피막의 어닐링을 촉진시키는 것을 포함하는 개선된 방법.
  16. 제15항에 있어서, 적외선 반사성 금속 및 하도막 금속을 스퍼터링시킨 후 피복된 제품을 더 가열하여 피막을 어닐링시키는 방법.
  17. 제16항에 있어서, 반사방지성 금속 산화물을 스퍼터링시킨 후 피복된 제품을 가열하는 방법.
  18. 제16항에 있어서, 피복된 제품을 낮은 산소 분압중에서 가열하는 방법.
    ※ 참고사항:최초출원 내용에 의하여 공개하는 것임.
KR1019950056862A 1994-12-27 1995-12-26 어닐링된 저복사율의 피막 KR0179463B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US36380594A 1994-12-27 1994-12-27
US8/363,805 1994-12-27
US08/363,805 1994-12-27

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KR960022313A true KR960022313A (ko) 1996-07-18
KR0179463B1 KR0179463B1 (ko) 1999-03-20

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US (1) US6010602A (ko)
EP (1) EP0719876B1 (ko)
JP (1) JPH08225943A (ko)
KR (1) KR0179463B1 (ko)
CN (1) CN1133899A (ko)
AT (1) ATE215620T1 (ko)
AU (1) AU676974B2 (ko)
CA (1) CA2161283A1 (ko)
DE (1) DE69526191T2 (ko)
DK (1) DK0719876T3 (ko)
ES (1) ES2174891T3 (ko)

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DE69526191D1 (de) 2002-05-08
CN1133899A (zh) 1996-10-23
EP0719876A2 (en) 1996-07-03
KR0179463B1 (ko) 1999-03-20
JPH08225943A (ja) 1996-09-03
EP0719876A3 (en) 1996-10-23
DE69526191T2 (de) 2002-10-31
CA2161283A1 (en) 1996-06-28
ATE215620T1 (de) 2002-04-15
ES2174891T3 (es) 2002-11-16
US6010602A (en) 2000-01-04
AU3442795A (en) 1996-07-11
EP0719876B1 (en) 2002-04-03
AU676974B2 (en) 1997-03-27
DK0719876T3 (da) 2002-07-01

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