KR960020591U - 트랜스퍼 로보트 시스템의 제어장치 - Google Patents

트랜스퍼 로보트 시스템의 제어장치

Info

Publication number
KR960020591U
KR960020591U KR2019940033008U KR19940033008U KR960020591U KR 960020591 U KR960020591 U KR 960020591U KR 2019940033008 U KR2019940033008 U KR 2019940033008U KR 19940033008 U KR19940033008 U KR 19940033008U KR 960020591 U KR960020591 U KR 960020591U
Authority
KR
South Korea
Prior art keywords
transfer robot
control system
robot system
control
transfer
Prior art date
Application number
KR2019940033008U
Other languages
English (en)
Other versions
KR200173902Y1 (ko
Inventor
최상숙
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940033008U priority Critical patent/KR200173902Y1/ko
Publication of KR960020591U publication Critical patent/KR960020591U/ko
Application granted granted Critical
Publication of KR200173902Y1 publication Critical patent/KR200173902Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940033008U 1994-12-06 1994-12-06 트랜스퍼 로보트 시스템의 제어장치 KR200173902Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940033008U KR200173902Y1 (ko) 1994-12-06 1994-12-06 트랜스퍼 로보트 시스템의 제어장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940033008U KR200173902Y1 (ko) 1994-12-06 1994-12-06 트랜스퍼 로보트 시스템의 제어장치

Publications (2)

Publication Number Publication Date
KR960020591U true KR960020591U (ko) 1996-07-18
KR200173902Y1 KR200173902Y1 (ko) 2000-04-01

Family

ID=19400501

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940033008U KR200173902Y1 (ko) 1994-12-06 1994-12-06 트랜스퍼 로보트 시스템의 제어장치

Country Status (1)

Country Link
KR (1) KR200173902Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100765057B1 (ko) 2006-10-19 2007-10-09 현대제철 주식회사 연속압연 중의 트라프 감시제어 시스템 및 방법

Also Published As

Publication number Publication date
KR200173902Y1 (ko) 2000-04-01

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Legal Events

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Year of fee payment: 10

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