KR960015069B1 - Fluid flux sensor - Google Patents

Fluid flux sensor Download PDF

Info

Publication number
KR960015069B1
KR960015069B1 KR93006360A KR930006360A KR960015069B1 KR 960015069 B1 KR960015069 B1 KR 960015069B1 KR 93006360 A KR93006360 A KR 93006360A KR 930006360 A KR930006360 A KR 930006360A KR 960015069 B1 KR960015069 B1 KR 960015069B1
Authority
KR
South Korea
Prior art keywords
flux sensor
fluid flux
fluid
sensor
flux
Prior art date
Application number
KR93006360A
Other languages
English (en)
Other versions
KR930022062A (ko
Inventor
Katsuaki Yasui
Yuji Kishimoto
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of KR930022062A publication Critical patent/KR930022062A/ko
Application granted granted Critical
Publication of KR960015069B1 publication Critical patent/KR960015069B1/ko

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692Thin-film arrangements
KR93006360A 1992-04-30 1993-04-15 Fluid flux sensor KR960015069B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4111535A JP2842729B2 (ja) 1992-04-30 1992-04-30 感熱式流量センサ
JP92-111535 1992-04-30

Publications (2)

Publication Number Publication Date
KR930022062A KR930022062A (ko) 1993-11-23
KR960015069B1 true KR960015069B1 (en) 1996-10-24

Family

ID=14563817

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93006360A KR960015069B1 (en) 1992-04-30 1993-04-15 Fluid flux sensor

Country Status (4)

Country Link
US (1) US5465618A (ko)
JP (1) JP2842729B2 (ko)
KR (1) KR960015069B1 (ko)
DE (1) DE4314364C2 (ko)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11125550A (ja) * 1997-10-22 1999-05-11 Ricoh Co Ltd センサ
DE69714747T2 (de) * 1997-12-30 2003-04-30 Qualiflow S A Verfahren zu Herstellung von einem Sensor für einen thermischen Massendurchflussmesser
JP3484372B2 (ja) 1999-06-10 2004-01-06 三菱電機株式会社 感熱式流量センサ
US6681625B1 (en) * 2000-01-19 2004-01-27 Lockheed Martin Corporation Constant-temperature-difference bidirectional flow sensor
WO2001084518A1 (en) * 2000-05-01 2001-11-08 Isc/Us, Inc. Data capture and logging with passive rf transmission
US6533731B2 (en) * 2001-05-15 2003-03-18 Lifecheck, Llc Method and apparatus for measuring heat flow
US6647779B2 (en) * 2001-06-04 2003-11-18 Ngk Insulators, Ltd. Temperature sensing resistance element and thermal flow sensor using same
US6708561B2 (en) 2002-04-19 2004-03-23 Visteon Global Technologies, Inc. Fluid flow meter having an improved sampling channel
US6826955B2 (en) * 2002-09-20 2004-12-07 Visteon Global Technologies, Inc. Mass fluid flow sensor having an improved housing design
US7049558B2 (en) * 2003-01-27 2006-05-23 Arcturas Bioscience, Inc. Apparatus and method for heating microfluidic volumes and moving fluids
US6973825B2 (en) * 2003-02-24 2005-12-13 Visteon Global Technologies, Inc. Hot-wire mass flow sensor with low-loss bypass passage
US7107835B2 (en) * 2004-09-08 2006-09-19 Honeywell International Inc. Thermal mass flow sensor
ATE547041T1 (de) 2009-04-20 2012-03-15 Belimed Ag Vorrichtung und verfahren zum behandeln und analysieren von kanälen in instrumenten, insbesondere in endoskopen

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3696294A (en) * 1970-01-26 1972-10-03 Ecc Corp Rms voltage or current sensor
DE2720049C3 (de) * 1977-05-04 1980-07-10 Siemens Ag, 1000 Berlin Und 8000 Muenchen Dünnschicht-Heißleiter und Verfahren zu seiner Herstellung
DE3108021C2 (de) * 1981-03-03 1986-02-06 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Konstant-Temperatur-Anemometer mit Temperaturkompensation
US4628743A (en) * 1981-07-06 1986-12-16 The Dow Chemical Company Apparatus and method for metering sub-10 cc/minute liquid flow
JPS59162413A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd 熱式流量計
JPH0244211A (ja) * 1988-08-04 1990-02-14 Sharp Corp フローセンサ
DE4009833C2 (de) * 1989-03-31 1996-09-26 Aisan Ind Luftmengenmeßeinrichtung für Ansaugluft
US5094105A (en) * 1990-08-20 1992-03-10 General Motors Corporation Optimized convection based mass airflow sensor

Also Published As

Publication number Publication date
US5465618A (en) 1995-11-14
KR930022062A (ko) 1993-11-23
DE4314364C2 (de) 1995-07-20
DE4314364A1 (de) 1993-11-04
JPH05306947A (ja) 1993-11-19
JP2842729B2 (ja) 1999-01-06

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