KR960012245B1 - Soft magnetic alloy coating - Google Patents

Abstract

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Description

Soft magnetic alloy film

The present invention relates to a soft magnetic alloy film suitable for a magnetic head or the like.

In the field of magnetic recording, high-magnetization of recording media such as magnetic tape has been promoted in order to increase recording density. However, a high saturation magnetic flux density (Bs) is required as a soft magnetic thin film material for a magnetic head corresponding thereto.

Conventional soft magnetic materials (films) include Ni-Fe (Pharmay) and Co-based amorphous films.

In recent years, in an alloy film containing Fe as a main component (Fe-N, Fe-C, etc.), it has been reduced by miniaturizing the crystal of the adverse effect on the soft magnetic property of the crystal magnetic anisotropy of Fe to have a high saturation magnetic flux density, and There is an example of obtaining a film having excellent soft magnetic properties.

However, devices incorporating magnetic heads tend to be miniaturized and light in weight, and are often used in contact with vibrations associated with movement or under adverse environmental conditions. Therefore, the magnetic head is required to be excellent in magnetic properties, excellent in wear resistance to the magnetic tape, and high in moisture and corrosive atmosphere, that is, high in environmental resistance and vibration resistance. For this reason, it is necessary to perform gap formation, weaving of a case, etc. by glass welding, and the material of a magnetic head also requires the heat stability which withstands the high temperature of the glass welding process in the head manufacturing process.

However, in the conventional soft magnetic alloy film, the Ni-Fe film has a drawback that the soft magnetic properties deteriorate and the electrical resistance is low at high temperatures in the glass welding process.

In the Co-based amorphous film, a high saturation magnetic flux density of 13000 G or more is also obtained. To increase the saturation magnetic flux density of a conventional amorphous alloy, Ti, Zr, Hf, Nb, Ta, Mo, which is an amorphous forming element, can be obtained. It is necessary to reduce the amount of addition of W, etc., but if the amount of addition is low, the stability of the amorphous structure is lowered, and there is a problem of not being able to withstand the temperature (about 500 ° C. or more) required for glass welding. If the saturation magnetic flux density is set to about 9000 G or less, welding by low melting point glass is possible, but welding at 600 degreeC or more is difficult, and medium to high melting point glass excellent in environmental resistance cannot be used.

In addition, alloy films (Fe-N, Fe-C, etc.) made of fine crystals containing Fe as a main component cause crystal growth at high temperatures and deteriorate soft magnetic properties (400 ° C is the highest in Fe-C). Also, it cannot be said that it is suitable for glass welding.

In this background, the inventors of the present application have filed a patent for a soft magnetic alloy film which solved the above problems in Japanese Patent Application Laid-Open No. 1-278220, Japanese Patent Application Laid-Open No. 2-63808, and the like.

In Japanese Patent Application Laid-Open No. 1-278220, one of the patent-pending soft magnetic alloy films has a composition formula represented by Fea Mc Cd, the adjustment ratio a is 50 to 96 in atomic%, c is 2 to 30, and d is 0.5 to 25 and a + c + d = 100 were satisfied.

In addition, the other is represented by the composition formula Fea Qb Mc Cd, the composition ratio a is 50 to 96 in atomic%, b is 0.1 to 10, c is 2 to 30, d is 0.5 to 25, a + b + c + d To satisfy a relationship of = 100.

In addition, one of the soft magnetic alloy films patented in Japanese Patent Application Laid-Open No. 2-63808 has a compositional formula represented by Fea Crc Md Ce, and the composition ratio a is 50 to 95 in atomic%, c is 0.5 to 20, d. Is 2 to 25, e is 0.5 to 25, and a + c + d + e = 100 is satisfied.

The other is represented by the composition formula Fea Qb Crc Md Ce, the composition ratio a is 50 to 95 in atomic%, b is 0.1 to 10, c is 0.5 to 20, d is 2 to 25, e is 0.5 to 25, The relationship of a + b + c + d + e = 100 was satisfied.

The soft magnetic alloy film provided by the patent application has a high saturation magnetic flux density of 15,000 G or more in some compositions, has high thermal stability compared to various materials of the prior art, and has sufficient corrosion resistance and environmental resistance under normal use environment. However, the possible heat treatment temperature is the upper limit of about 700 ℃, soft magnetic properties are weak at this temperature.

In the case of a conventional magnetic head, glass welding is possible at 700 ° C. or lower. However, in the case of a complicated head, for example, a head in which the erasing head and the rust ash head are integrated, a gap between the erase head and the rust ash head is formed by glass welding. It is necessary to carry out glass welding at the temperature which a gap laminated glass does not fuse, and it is necessary to use a thing of high melting | fusing point for a gap laminated glass after performing it. For this reason, it is preferable to perform initial gap formation at the temperature of 700 degreeC or more. Therefore, a soft magnetic thin film having higher heat resistance is required.

In the soft magnetic alloy film filed in Japanese Patent Application Laid-Open No. 1-278220, the electrical resistance is about half as low as that of the conventional amorphous film, which causes a problem that the permeability of the high frequency wave is reduced by the eddy current loss. Moreover, in order to use Fe as a main component, when used in a bad environment, it might cause discoloration or rusting.

In order to solve these problems, the inventors of the present application have filed a patent for a soft magnetic alloy film having a high permittivity, thermally stable properties, and good corrosion resistance (Japanese Patent Application Laid-Open No. 2-116256). .

One of the soft magnetic alloy films has a compositional formula represented by Fea Lc Me Cf, where L is at least one of Al and Si or a mixture thereof, and M is Ti, Zr, Hf, V, Nb, Ta, Mo, W At least one of the metal elements or mixtures thereof, and the composition ratios a, c, e, and f are 50% by atom. a≤95, 0.2 c 25, 2 e 25, 0.5 f While satisfying the relationship of 25, a + c + e + f = 100, the structure is basically a fine grain having an average crystal grain size of 0.08 µm or less, and partly contains the crystal phase of the carbide of the element M. It is.

In other soft magnetic alloy films, the composition formula is represented by Fea Lc Crd Me Cf, and the composition ratios a, c, d, e, and f are 50% by atom. a 95, 0.2 c 25, 0.1 d 20, 2 e 25, 0.5 f While satisfying the relationship of 25, a + c + d + e + f = 100, the structure is basically a fine grain having an average grain size of 0.08 µm or less, and part of the crystal phase of the carbide of element M It contains.

In another soft-crystal alloy film, the compositional formula is represented by Fea Qb Lc Me Cf, Q is at least one of Co and Ni, or a mixture thereof, and the composition ratios a, b, c, e, and f are 50 atomic percent. a 95, 0.1 b 10, 0.2 c 25, 2 e 25, 0.5 f 25, a + b + c + e + f = 100 is satisfied, and the structure is basically a fine grain having an average crystal grain size of 0.08 µm or less, and part of the crystal phase of the carbide of element M It contains.

In another soft-crystal alloy film, the composition formula is represented by Fea Qb Lc Crd Me Cf, and the composition ratios a, b, c, d, e, and f are 50% by atom. a 95, 0.1 b 10, 0.2 c 25, 0.1 d 20, 2 e 25, 0.5 f 25, a + b + c + d + e + f = 100 is satisfied, and the structure is basically a fine grain having an average grain size of 0.08 µm or less, and part of the carbide of element M It contains a crystalline phase.

However, in the case where the soft magnetic alloy film is particularly used for the magnetic head, a smaller value of the absolute value of the saturated ultraviolet lambda s lambda s is preferable, and a soft magnetic alloy film having good soft magnetic properties in total is desired.

In addition, when the heat treatment is performed at a temperature of about 700 ° C. in order to change from positive to negative as the heat treatment temperature increases, ultraviolet light is easily added, and a composition capable of obtaining 10 ⁻⁷ small λ s is extremely low. There was problem to be limited to limited range.

In addition, when applied to a magnetic head, it is advantageous to give the film weak uniaxial magnetic anisotropy in terms of high frequency characteristics, and as a method, it is convenient to use the reverse ultraviolet effect due to the stress applied to the film. In this case, when using the tensile stress acting in the film surface, the ultraviolet light of the film is preferably a small positive value. This is because it creates anisotropic components perpendicular to the block. However, there is a problem that it is difficult to obtain the definition after high temperature heat treatment for the above reason.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and further reduces the absolute value of ultraviolet rays (λs) after heat treatment at high temperature, and widens the heat treatment temperature range in which ultraviolet rays (λs) decreases, and any arbitrary amount even after heat treatment at high temperatures. To get extra definitions.

In order to solve the above problems, the present invention described in claim 1 is represented by Fea Xc Me Cf, and X is at least one of Cu, Pd, Ag, Pt and Au, or a mixture thereof. , M is a metal element or a mixture of at least one of Ti, Zr, Hf, V, Nb, Ta, Mo, and W, the composition ratio a, c, e, f is 50% by atomic a 95, 0.2 c 5, 2 e 25, 0.5 f While satisfying the relationship of 25, a + c + e + f = 100, the structure is basically a fine grain having an average crystal grain size of 0.08 µm or less, and partly contains the crystal phase of the carbide of the element M. It is a soft magnetic alloy film characterized in that.

In order to solve the above problems, the invention described in claim 2 is represented by Fea Qb Xc Me Cf, wherein Q is at least one of Co and Ni, or a mixture thereof, and X is Cu. At least one of metal elements or mixtures thereof, and at least one of Ti, Zr, Hf, V, Nb, Ta, Mo, and W; The composition ratios a, b, c, e and f are 50% by atom a 95, 0.1 b 10, 0.1 c 5, 2 e 25, 0.5 f While satisfying the relationship of 25, a + b + c + e + f = 100, the structure is basically a fine grain having an average grain size of 0.08 µm or less, and part of the crystal phase of the carbide of element M It is a soft magnetic alloy film containing.

In order to solve the above problems, the invention described in claim 3 is a compositional formula represented by Fea Xc Zd Me Cf, wherein X is at least one of a metal element of Cu, Pd, Ag, Pt, Au, or Z is an element or mixture thereof which is at least one of Cr, Y, Ru, Ir, Rh, and N, and M is at least one of Ti, Zr, Hf, V, Nb, Ta, Mo, and W. Is a metal element or mixture thereof, and the composition ratios a, c, d, e, and f are 50% by atom. a 95, 0.1 c 5, 0.5 d 10, 2 e 25, 0.5 f 25, a + c + d + e + f = 100 is satisfied, and the structure is basically a fine grain having an average grain size of 0.08 µm or less, and a portion of the carbide phase of element M It is a soft magnetic alloy film characterized by containing.

In order to solve the above problems, the invention described in claim 4 is represented by Fea Qb Xc Zd Me Cf, wherein Q is at least one of Co and Ni, or a mixture thereof, and X is Cu. , Pd, Ag, Pt, Au, at least one element or a mixture thereof, Z is at least one of Cr, Y, Ru, Ir, Rh, N or a mixture thereof, M is Ti, Zr, At least one of Hf, V, Nb, Ta, Mo, and W, or a mixture thereof, and the composition ratios a, b, c, d, e, and f are 50% by atom. a 95, 0.1 b 10, 0.1 c 5, 0.5 d 10, 2 e 25, 0.5 f 25, a + b + c + d + e + f = 100 is satisfied, and the structure is basically a fine grain having an average grain size of 0.08 µm or less, and part of the element M It is a soft magnetic alloy film containing a crystalline phase of carbide.

In order to solve the above problems, the invention described in claim 5 is a structure in which the composition of the base material of claims 1 to 4 is a mixture of fine grains and amorphous particles having an average grain size of 0.08 μm or less, and fine. It is a soft magnetic alloy film characterized by containing a crystal phase of carbide of element M in a part of crystal.

The present invention will be described again in detail below.

As a method of producing the alloy film, an alloy film is produced by a thin film forming apparatus such as sputtering or vapor deposition. As the sputtering apparatus, conventional ones such as an RF two-pole sputter, a DC sputter, a magnetron sputter, a three-pole sputter, an ion beam sputter, and an opposed target sputter can be used.

As a method of adding C to the film, a graphite pellet is placed on a target plate to form a composite target, and a sputtering method or a target containing no C (Fe-XM system or Fe-QXM system). , Fe-XZM-based or Fe-QXZM-based), and a reactive sputtering method for sputtering in a gas atmosphere in which a hydrocarbon gas such as methane is mixed in an inert gas such as Ar, and the like. Since the C concentration in the film can be easily controlled, an excellent film of the desired C concentration can be obtained.

The film thus produced contains an amorphous phase in a substantial proportion, has a low saturation magnetic flux density and insufficient soft magnetic properties. Thus, microcrystals are precipitated by heat treatment at 400 占 폚 or higher. Although this heat treatment can be performed in a magnetic field, good soft magnetic properties can be obtained, but excellent magnetic properties can be obtained by performing in a sperm or a rotating magnetic field. This heat treatment may also be performed in combination with the glass welding step in the manufacturing process of the magnetic head.

In addition, the precipitation process of the microcrystals does not need to be carried out completely, and a large number of microcrystals (preferably 50% or more) need to be precipitated, so that some of the amulfos components remain, which is not a problem. It is not an obstacle to improvement.

Hereinafter, the reason for limiting the above components is mentioned.

It is an element in charge of the magnetism which is the main component of Fe. To obtain a saturation magnetic flux density of at least ferrite (Bs 5000G): a 50 atomic percent is required. In addition, in order to obtain good soft magnetic properties, It must be 95 atomic percent.

Elements M (i.e., Ti, Zr, Hf, V, Nb, Ta, and W) are necessary to improve soft magnetic properties, and combine with C to form carbide fine crystals. The fine particles of this carbide play a role of preventing the growth of a crystal containing Fe as a main component, and high heat resistance is obtained.

To maintain good soft magnetic properties, e It is necessary to make it in atomic%. However, if excessive, the saturation magnetic flux density decreases and the soft magnetic properties deteriorate. It is necessary to make it to 25 atomic%.

C is necessary to improve soft magnetic properties and to improve heat resistance, and C combines with element M to form carbide microcrystals.

To maintain good soft magnetic properties and thermal stability, f It is necessary to set it as 0.5 atomic%. However, excessively causes a decrease in saturation magnetic flux density and a decrease in soft magnetic properties. It is necessary to make it to 25 atomic%.

The reason for limiting the components of Fe and the elements M and C in the above description is almost the same as in the case of Japanese Patent Application Laid-Open No. 1-278220.

Element X (i.e., Cu, Pd, Ag, Pt, Au) can have ultraviolet light even when the heat treatment temperature is increased. In a film without addition of element X, ultraviolet light is defined when the heat treatment temperature is low. Value and a negative value when the heat treatment temperature is high. In other words, the element X has the effect of shifting the ultraviolet to the positive side, but at least 0.1 g of no more than 0.1 atomic% does not produce the effect of adjusting the ultraviolet. In addition, when the amount of addition of the element X is too large, the ultraviolet light becomes too large toward the positive side inversely, and the soft magnetic properties are difficult to be obtained. It is necessary to make it into 5 atomic%.

Element Q (ie, Co, Ni) has a role of increasing the induced magnetic anisotropy energy mainly generated by heat treatment in the magnetic field. It is effective when it is added to obtain high frequency characteristics of the flat magnetic susceptibility from the direction of difficult magnetization to high frequency.

The element Q also has the effect of making the ultraviolet light positive, but at the same time, the anisotropic energy is also increased, so that the element X must be added when only the outside is to be controlled. When the element Q is too large, the anisotropic energy and ultraviolet light become too large to make soft magnetic properties difficult to obtain, b It needs to be 10 atomic%.

Element Z (i.e., Cr, Y Ru, Ir, Rh, N) is an element added to improve the corrosion resistance and environmental resistance, but the improvement effect is not sufficient unless 0.5% or more is added. Moreover, when the addition amount exceeds 10 atomic%, since the saturation magnetic flux density becomes too low and a favorable soft magnetic characteristic is not obtained, it is not preferable.

The fine crystals of the carbide of the element M are uniformly dispersed in the film, thereby preventing the microcrystals of Fe from growing and coarsening by heat treatment and losing soft magnetic properties. However, when the grain size of Fe grows and becomes large, the adverse effect of crystal magnetic anisotropy is increased, and the soft magnetic properties deteriorate, or the soft magnetic properties deteriorate due to the microcrystals of carbides of element M acting as barriers to the grain growth of Fe. To prevent.

In addition, since the metal structure is basically microcrystals of 0.08 µm or less, it is excellent in thermal stability as compared to amorphous, and it is possible to reduce additional elements and to increase the saturation magnetic flux density.

In the soft magnetic alloy film, the structure is mainly composed of crystals rich in Fe, and the addition of a component that lowers the saturation magnetic flux density is limited, so that the magnetic moment and curie temperature per iron atom are higher than those in the amorphous state. And a high saturation magnetic flux density is obtained.

In addition, the elements M and C are contained, the metal structure is made of fine grains, and adverse effects on the soft magnetic properties due to crystal magnetic anisotropy are alleviated, so that good soft magnetic properties are obtained.

In addition, since carbides of the element M precipitate and suppress the growth of grains containing Fe as a main component, the grains do not coarsen even when heated in a glass welding factory.

Further, by adding a specific amount of element Z, the corrosion resistance is improved and the environmental resistance is excellent.

In addition, by adding element X (Cu, Pd, Ag, Pt, Au) and adjusting the amount of addition, ultraviolet rays can be reduced in a wide heat treatment temperature range. In particular, since the ultraviolet light is easily adjusted with a small amount of addition, the soft magnetic properties can be maintained, and the decrease in the saturation magnetic flux density can be reduced.

Example

(1) the tabernacle

The alloy film of adjustment shown to the 1st table | surface of a later stage was formed using the RF bipolar sputter | spatter apparatus.

The used target was sputtered in a pure Ar gas atmosphere using a composite target obtained by appropriately arranging various pellets such as Ta, Zr, Cu, Pd, Ag, Pt, Au, and graphite on the Fe target. A thin film having a thickness of 5 to 6 mu m was formed.

(2) heat treatment and measurement

After film formation, an annealing was performed for 20 minutes at 550 ° C. in a static magnetic field, and the superelastic coefficient (at 5 MHz), coercive force (Oe), ultraviolet constant, and saturation magnetic flux density of the prepared alloy were shown in Table 1.

Moreover, the coercive force (Oe) and the ultraviolet constant of the alloy created by carrying out the annealing which hold | maintains at 650 degreeC for 20 minutes in a magnetic field are shown in Table 2.

In addition, as a comparative example, the alloy film (the alloy film according to the invention filed in Japanese Patent Application Laid-Open No. 1-278220) containing no element X formed by sputtering, and the soft magnetic alloy film of the present embodiment, The measured value of the said magnetic property after equivalent annealing was shown.

In addition, the superpermeability and coercive force were measured from the difficult magnetization side.

Magnetic properties after heat treatment at 550 ° C (20 minutes storage)

TABLE 1

Magnetic properties after heat treatment in 650 ° C (20 minutes storage) magnetic-free system

TABLE 2

In Table 1, it can be seen that by adding the elements X (Cu, Pd, Ag, Pt, Au) and the like, ultraviolet rays shift positively. Degradation of other magnetic properties (superelasticity, coercivity, saturation magnetic flux density) is not a problem.

In Table 2, in the film (Comparative Example) in which the element X was not added, the ultraviolet ray at the heat treatment temperature of 650 ° C was lower than that of the heat treatment temperature of 550 ° C and became zero ultraviolet at any temperature lower than 650 ° C. It was found that the added film of the element X shifted toward the positive after the heat treatment at 650 ° C. and adjusted the amount of addition, so that it was possible to obtain zero or any small positive ultraviolet at 650 ° C.

As described above, the present invention is a soft magnetic alloy film mainly containing fine grains containing Fe as a main component, and the amount of addition to the components for decreasing the saturation magnetic flux density is limited, so that a high saturation magnetic flux density is obtained. This makes it possible to provide a magnetic head having high recording characteristics.

In addition, unlike the conventional amorphous alloy film, a film exhibiting a high permittivity even when heat-treated in a magnetic field can be obtained, and the process such as glass fusion at the time of manufacturing the magnetic head is simplified compared with the case of heat-treating the magnetic field.

Moreover, while the components which improve the soft magnetic properties of elements M (Ti, Zr, Hf, V, Nb, Ta, Mo, W) and C are added, the metal structure becomes fine grains and the crystal magnetic anisotropy Since adverse effects on the soft magnetic properties are reduced, good soft magnetic properties are obtained.

In addition, since fine grains form, the added element M forms C and carbides, and the carbides are uniformly dispersed in the film, thereby preventing microcrystals containing Fe as a main component from growing by heat treatment. do. In other words, as the crystal grows, the soft magnetic deterioration is prevented as the adverse effect of crystal magnetic anisotropy increases. Thereby, medium high melting glass can be used as welding glass.

In addition to the above adjustment, by adding the element M (Cu, Pd, Ag, Pt, Au) and adjusting the amount of addition, ultraviolet rays can be reduced in a wide heat treatment temperature range. Therefore, since the ultraviolet light can be easily adjusted with a small amount of addition, the soft magnetic characteristics can be maintained, and the decrease in the saturation magnetic flux density can be suppressed to a small degree.

In addition, element Q (that is, Co, Ni) has a role of increasing the induced magnetic anisotropy energy mainly generated by heat treatment in the magnetic field, and has the effect of obtaining the frequency characteristic of the magnetic flux flattened to higher frequencies in the difficult magnetization direction. .

Further, by adding a specific amount of the element Z (Cr, Y, Ru, Ir, Rh, N) to the above components, the Fe-based alloy is characterized by not discoloring or rusting even in a bad environment, which is excellent in corrosion resistance. .

Claims (8)

The composition formula is represented by Fea Xc Me Cf, X is at least one element or mixture selected from Cu, Pd, Ag, Pt, Au, and M is Ti, Zr, Hf, V, Nb, Ta, Mo, W At least one metal element or mixture to be selected, and the composition ratios a, c, e, and f are 50% by atom. a 95, 0.1 c 5, 2 e 25, 0.5 f While satisfying the relationship of 25, a + c + e + f = 100, the structure is basically composed of fine grains having an average grain size of 0.08 µm or less, and part of which contains the crystal phase of the carbide of element M. Soft magnetic alloy film, characterized in that. The adjustment formula is represented by Fea Qb Xc Me Cf, Q is at least one metal element or mixture selected from Co, Ni, and X is at least one metal element or mixture selected from Cu, Pd, Ag, Pt, Au M is one or more metal elements or mixtures selected from Ti, Zr, Hf, V, Nb, Ta, Mo, and W, and the composition ratios a, b, c, e, and f are 50% by atom. a 95, 0.1 b 10, 0.1 c 5, 2 e 25, 0.5 f While satisfying the relationship of 25, a + b + c + e + f = 100, the structure is basically composed of fine grains with an average grain size of 0.08 µm or less, and part of the crystal phase of the carbide of element M A soft magnetic alloy film containing a. The composition is represented by Fea Xc Zd Me Cf, X is at least one metal element or mixture selected from Cu, Pd, Ag, Pt, Au, and Z is selected from Cr, Y, Ru, Ir, Rh, N At least one element or mixture thereof, M is at least one metal element or mixture selected from Ti, Zr, Hf, V, Nb, Ta, Mo, W, and the composition ratios a, c, d, e, f are atoms 50% a 95, 0.1 c 5, 0.5 d 10, 2 e 25, 0.5 f While satisfying the relationship of 25, a + c + d + e + f = 100, the structure is basically composed of fine grains having an average grain size of 0.08 µm or less, and part of the crystal phase of the carbide of element M A soft magnetic alloy film containing a. The composition is represented by Fea Qb Xc Zd Me Cf, Q is at least one metal element or mixture selected from Co, Ni, and X is at least one metal element or mixture selected from Cu, Pd, Ag, Pt, Au Z is at least one element or mixture selected from Cr, Y, Ru, Ir, Rh, N, and M is at least one metal selected from Ti, Zr, Hf, V, Nb, Ta, Mo, W Element or mixture, and the composition ratios a, b, c, d, e and f are 50 a 95, 0.1 b 10, 0.1 c 5, 0.5 d 10, 2 e 25, 0.5 f While satisfying the relationship of 25, a + b + c + d + e + f = 100, the structure basically consists of fine grains having an average grain size of 0.08 µm or less, and carbides of the element M A soft magnetic alloy film containing a crystal phase of. The soft magnetic alloy film according to claim 1, wherein the structure is a structure in which fine grains and amorphous particles having an average grain size of 0.08 µm or less are mixed, and a part of the fine grains contains a crystalline phase of the carbide of element M. . 3. The soft magnetic alloy film according to claim 2, wherein the structure is a structure in which fine grains and amorphous particles having an average grain size of 0.08 mu m or less are mixed, and a part of the fine grains contains a crystalline phase of the carbide of element M. . 4. The soft magnetic alloy according to claim 3, wherein the structure is a structure in which fine grains and amorphous grains having an average grain size of 0.08 mu m or less are mixed, and a part of the fine grains contains a crystalline phase of carbide of element M. membrane. 5. The soft magnetic alloy film according to claim 4, wherein the structure is a structure in which fine grains and amorphous particles having an average grain size of 0.08 mu m or less are mixed, and a portion of the fine grains contains a crystalline phase of carbide of element M. .