KR960008901A - 스핀 코팅 장치 - Google Patents

스핀 코팅 장치 Download PDF

Info

Publication number
KR960008901A
KR960008901A KR1019950025824A KR19950025824A KR960008901A KR 960008901 A KR960008901 A KR 960008901A KR 1019950025824 A KR1019950025824 A KR 1019950025824A KR 19950025824 A KR19950025824 A KR 19950025824A KR 960008901 A KR960008901 A KR 960008901A
Authority
KR
South Korea
Prior art keywords
spin coating
rotation
coated
outer cylinder
air flow
Prior art date
Application number
KR1019950025824A
Other languages
English (en)
Korean (ko)
Inventor
노리후미 기따무라
Original Assignee
가네꼬 히사시
닛폰 덴키 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가네꼬 히사시, 닛폰 덴키 가부시끼가이샤 filed Critical 가네꼬 히사시
Publication of KR960008901A publication Critical patent/KR960008901A/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating
    • H01J2209/015—Machines therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating Apparatus (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
KR1019950025824A 1994-08-30 1995-08-22 스핀 코팅 장치 KR960008901A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6205261A JPH0869752A (ja) 1994-08-30 1994-08-30 スピンコーティング装置
JP94-205261 1994-08-30

Publications (1)

Publication Number Publication Date
KR960008901A true KR960008901A (ko) 1996-03-22

Family

ID=16504059

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950025824A KR960008901A (ko) 1994-08-30 1995-08-22 스핀 코팅 장치

Country Status (2)

Country Link
JP (1) JPH0869752A (ja)
KR (1) KR960008901A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19748063A1 (de) * 1997-10-31 1999-05-06 Acr Automation In Cleanroom Vorrichtung zum Aufbringen einer dünnen Schicht auf die Oberfläche eines Bildschirmglaskolbens

Also Published As

Publication number Publication date
JPH0869752A (ja) 1996-03-12

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application