KR960005747A - 개선된 지지 포스트를 구비한 미소-기계 장치 및 그 제조 방법과, 디지탈 미소-미러 장치 - Google Patents

개선된 지지 포스트를 구비한 미소-기계 장치 및 그 제조 방법과, 디지탈 미소-미러 장치 Download PDF

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KR960005747A
KR960005747A KR1019950022444A KR19950022444A KR960005747A KR 960005747 A KR960005747 A KR 960005747A KR 1019950022444 A KR1019950022444 A KR 1019950022444A KR 19950022444 A KR19950022444 A KR 19950022444A KR 960005747 A KR960005747 A KR 960005747A
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가에리야마 도시유끼
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윌리엄 이. 힐러
텍사스 인스트루먼츠 인코포레이티드
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

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  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
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  • Manufacturing & Machinery (AREA)
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Abstract

본 발명의 목적은 미소-기계 장치(10)에 대해 개선된 지지 포스트(16,23,25)를 제공하는데 있다. 지지 포스트(16)의 외면을 한정하는 비어(34a)는 스페이서 층(34)내에서 에칭된다. 산화물 층(41)을 스페이서 층(34)상과 비어(34a)내에 정합적으로 침착시킨 후 스페이서 층(34)의 상부면까지 에치백하여 비어(34a)의 내면 상에 측벽 링(23a)을 남겨 놓는다. 다음에, 측벽링(23a)을 피복하기 위해 스페이서 층(34) 상과 비어(34a)내에 금속 층(61)을 침착시킨다. 다음에 이 금속 층(61)을 비어(34a)내에 지지 포스트 스템(23)이 형성되도록 에칭시킨다. 스페이서 층(34)이 제거되어 지지 포스트 스템(23)이 이 스템(23) 주변의 측벽 링(23a)이 남겨진다.

Description

개선된 지지 포스트를 구비한 미소-기계 장치 및 그 제조 방법과, 디지탈 미소-미러 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1 및 제2도는 본 발명에 따라 제조된 디지탈 미소-미러 장치(DMD)의 도면이다.

Claims (20)

  1. 기계 소자용 지지 포스트들을 갖는 형의 개선된 미소-기계 장치에 있어서, 지지 포스트 스템과, 상기 스템의 외주면 둘레에 측벽링을 갖고 있는 포스트를 포함하며, 상기 스템은 나중에 제거될 스페이서 층에 있는 비어 내에 스템 물질을 침착시켜 형성되며, 상기 측벽 링은 상기 스템 물질의 침착 전에 상기 스페이서층상과 상기 비어 내에 산화물 층을 침착시키고 상기 산화물 층을 에칭 백 시킴으로써 형성되어지는 것을 특징으로 하는 개선된 미소-기계 장치.
  2. 제1항에 있어서, 상기 측벽 링은 상기 스템의 내면을 피복시키고, 상기 스템 물질을 침착 후에 상기 산화물 층을 침착시킴으로써 형성되어지는 것을 특징으로 하는 장치.
  3. 제1항에 있어서, 상기 스템은 상기 비어 내에 침착되어진 상기 스템 물질의 두 층으로 형성되며, 상기 측벽링은 상기 두 층 사이에 위치하는 것을 특징으로 하는 개선된 미소-기계 장치.
  4. 제1항에 있어서, 상기 지지 포스트의 내부 프로필은 상기 비어의 상부 엣지에서 원형으로 되어 있는 것을 특징으로 하는 개선된 미소-기계 장치.
  5. 제1항에 있어서, 상기 지지 포스트의 내부 프로필은 약간 볼록한 형태인 것을 특징으로 하는 개선된 미소-기계 장치.
  6. 제1항에 있어서, 상기 지지 포스트의 내부 프로필은 하부에서 90° 이상의 각을 갖는 것을 특징으로 하는 개선된 미소-기계 장치.
  7. 미소-기계 장치용 지지 포스트를 제조하는 개선된 방법에 있어서, 기판 상에 스페이서 층을 침착시키는 단계와, 지지 포스트의 외면을 각각 한정하고 있는 상기 스페이서 층 내의 비어들을 에칭하는 단계와, 상기스페이서 층상과 상기 비어들 내에, 상기 비어들의 내면과 거의 정합으로 피복되도록 산화물 층을 침착시키는 단계와, 상기 산화물 층을 상기 스페이서 층의 상부면까지 에칭백하는 단계로서, 상기 산화물 층에서 남아있는 측벽 링이 각 비어의 내면을 피복하게 되는 단계와, 상기 스페이서 층 상에, 상기 측벽 링의 내면을 피복하도록 포스트 금속 층을 침착시키는 단계와, 상기 지지 포스트가 형성되도록 상기 포스트 금속 층을 에칭하는 단계를 포함하는 것을 특징으로 하는 지지 포스트 제조 방법.
  8. 제7항에 있어서, 상기 산화물 층의 침착 단계는 실온에서 행해지는 것을 특징으로 하는 지지 포스트 제조 방법.
  9. 제7항에 있어서, 상기 산화물 층의 침착 단계는 실온과 120℃의 온도 사이에서 행해지는 것을 특징으로 하는 지지 포스트 제조 방법.
  10. 제7항에 있어서, 상기 산화물 층의 침착 단계는 플루오로트리에톡시시레인 원에 의해 산화물을 침착시켜 행해지는 것을 특징으로 하는 지지 포스트 제조 방법.
  11. 제7항에 있어서, 상기 침착 단계는 테트라메틸 실록산(TMDS)원에 의해 산화물을 침착시켜 행해지는 것을 특징으로 하는 지지 포스트 제조 방법.
  12. 제7항에 있어서, 상기 에칭 백 단계는 이방성 에칭으로 행해지는 것을 특징으로 하는 지지 포스트 제조 방법.
  13. 제7항에 있어서, 상기 포스트 금속 층의 침착 단계는 스퍼터링에 의해 행해지는 것을 특징으로 하는 지지 포스트 제조 방법.
  14. 디지탈 미소-미러 장치에 있어서, 적어도 하나의 어드레스 전극, 지지 포스트, 상기 지지 포스트로부터 연장하는 힌지 및, 상기 힌지에 부착된 미러가 제조되어지는 기판을 포함하고 있으며, 상기 힌지는 인가된 힘을 받을시에 상기 미러를 틸트시틸 정도로 변형되어지며, 상기 지지 포스트는 나중에 제거될 스페이서 층내에서 에칭되어지는 비어에 물질을 침착시켜 형성되어지는 스템과 측벽 링으로 형성되어 지는 것을 특징으로 하는 디지탈 미소-미러 장치.
  15. 제14항에 있어서, 상기 측벽 링은 상기 지지 포스트의 외면에 위치해 있는 것을 특징으로 하는 디지탈 미소-미러 장치.
  16. 제14항에 있어서, 상기 측벽 링은 상기 스템으로 둘러싸여지는 상기 지지 포스트의 내면에 위치해 있는 것을 특징으로 하는 디지탈 미소-미러 장치.
  17. 제14항에 있어서, 상기 측벽 링은 산화물로 형성되어지는 것을 특징으로 하는 디지탈 미소-미러 장치.
  18. 제14항에 있어서, 상기 지지 포스트의 내부 프로필은 상기 비어의 상부 엣지에서 원형으로 되어 있는 것을 특징으로 하는 디지탈 미소-미러 장치.
  19. 제14항에 있어서, 상기 지지 포스트의 내부 프로필은 약간 볼록하게 되어 있는 것을 특징으로 하는 디지탈 미소-미러 장치.
  20. 제14항에 있어서, 상기 지지 포스트의 내부 프로필은 하부에서 90°이상의 각을 갖는 것을 특징으로 하는 디지탈 미소-미러 장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950022444A 1994-07-29 1995-07-27 개선된지지포스트를구비한마이크로기계장치및그제조방법과,디지털마이크로미러장치 KR100413014B1 (ko)

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US08/283,486 US5485304A (en) 1994-07-29 1994-07-29 Support posts for micro-mechanical devices
US08/283,486 1994-07-29

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KR960005747A true KR960005747A (ko) 1996-02-23
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US (3) US5485304A (ko)
EP (1) EP0694801B1 (ko)
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Families Citing this family (234)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6219015B1 (en) 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US6674562B1 (en) * 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US6044705A (en) * 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
US6426013B1 (en) 1993-10-18 2002-07-30 Xros, Inc. Method for fabricating micromachined members coupled for relative rotation
US6467345B1 (en) 1993-10-18 2002-10-22 Xros, Inc. Method of operating micromachined members coupled for relative rotation
US20030199179A1 (en) * 1993-11-16 2003-10-23 Formfactor, Inc. Contact tip structure for microelectronic interconnection elements and method of making same
US7073254B2 (en) * 1993-11-16 2006-07-11 Formfactor, Inc. Method for mounting a plurality of spring contact elements
US20020053734A1 (en) 1993-11-16 2002-05-09 Formfactor, Inc. Probe card assembly and kit, and methods of making same
US7852545B2 (en) 1994-05-05 2010-12-14 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7808694B2 (en) * 1994-05-05 2010-10-05 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US7297471B1 (en) * 2003-04-15 2007-11-20 Idc, Llc Method for manufacturing an array of interferometric modulators
US8014059B2 (en) 1994-05-05 2011-09-06 Qualcomm Mems Technologies, Inc. System and method for charge control in a MEMS device
US7550794B2 (en) * 2002-09-20 2009-06-23 Idc, Llc Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer
US7776631B2 (en) * 1994-05-05 2010-08-17 Qualcomm Mems Technologies, Inc. MEMS device and method of forming a MEMS device
KR100209401B1 (ko) * 1994-07-21 1999-07-15 전주범 광로조절장치의 제조방법
US5650881A (en) * 1994-11-02 1997-07-22 Texas Instruments Incorporated Support post architecture for micromechanical devices
US5703728A (en) * 1994-11-02 1997-12-30 Texas Instruments Incorporated Support post architecture for micromechanical devices
US7898722B2 (en) 1995-05-01 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical device with restoring electrode
US5841579A (en) 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
KR100213026B1 (ko) * 1995-07-27 1999-08-02 윤종용 디엠디 및 그 제조공정
US5757536A (en) * 1995-08-30 1998-05-26 Sandia Corporation Electrically-programmable diffraction grating
US5907425A (en) * 1995-12-19 1999-05-25 The Board Of Trustees Of The Leland Stanford Junior University Miniature scanning confocal microscope
US8033838B2 (en) * 1996-02-21 2011-10-11 Formfactor, Inc. Microelectronic contact structure
US7929197B2 (en) * 1996-11-05 2011-04-19 Qualcomm Mems Technologies, Inc. System and method for a MEMS device
US7830588B2 (en) * 1996-12-19 2010-11-09 Qualcomm Mems Technologies, Inc. Method of making a light modulating display device and associated transistor circuitry and structures thereof
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
US5851302A (en) * 1997-02-19 1998-12-22 Vlsi Technology, Inc. Method for dry etching sidewall polymer
US5925577A (en) * 1997-02-19 1999-07-20 Vlsi Technology, Inc. Method for forming via contact hole in a semiconductor device
US5982553A (en) 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
DE69806846T2 (de) * 1997-05-08 2002-12-12 Texas Instruments Inc Verbesserungen für räumliche Lichtmodulatoren
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
WO1999052006A2 (en) * 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US6271808B1 (en) 1998-06-05 2001-08-07 Silicon Light Machines Stereo head mounted display using a single display device
US6101036A (en) 1998-06-23 2000-08-08 Silicon Light Machines Embossed diffraction grating alone and in combination with changeable image display
US6130770A (en) 1998-06-23 2000-10-10 Silicon Light Machines Electron gun activated grating light valve
US6215579B1 (en) 1998-06-24 2001-04-10 Silicon Light Machines Method and apparatus for modulating an incident light beam for forming a two-dimensional image
US6303986B1 (en) 1998-07-29 2001-10-16 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
WO2000077556A1 (en) * 1999-06-11 2000-12-21 University Of Hawaii Mems optical components
US6850353B1 (en) 1999-06-11 2005-02-01 University Of Hawaii MEMS optical components
US6859299B1 (en) 1999-06-11 2005-02-22 Jung-Chih Chiao MEMS optical components
US6220561B1 (en) * 1999-06-30 2001-04-24 Sandia Corporation Compound floating pivot micromechanisms
US6198180B1 (en) * 1999-06-30 2001-03-06 Sandia Corporation Micromechanisms with floating pivot
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US6813053B1 (en) * 2000-05-19 2004-11-02 The Regents Of The University Of California Apparatus and method for controlled cantilever motion through torsional beams and a counterweight
EP1180848B1 (en) * 2000-08-09 2010-01-20 STMicroelectronics S.r.l. Microelectromechanical structure comprising distinct parts mechanically connected through a translation/rotation conversion assembly
US6522454B2 (en) * 2000-09-29 2003-02-18 Texas Instruments Incorporated Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio
US6962771B1 (en) * 2000-10-13 2005-11-08 Taiwan Semiconductor Manufacturing Company, Ltd. Dual damascene process
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
FR2820833B1 (fr) * 2001-02-15 2004-05-28 Teem Photonics Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir
FR2820834B1 (fr) * 2001-02-15 2004-06-25 Teem Photonics Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede
US6429033B1 (en) * 2001-02-20 2002-08-06 Nayna Networks, Inc. Process for manufacturing mirror devices using semiconductor technology
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6608712B2 (en) * 2001-05-15 2003-08-19 Network Photonics, Inc. Hidden flexure ultra planar optical routing element
US7209274B2 (en) * 2001-06-02 2007-04-24 Capella Photonics, Inc. High fill-factor bulk silicon mirrors
US6747781B2 (en) 2001-06-25 2004-06-08 Silicon Light Machines, Inc. Method, apparatus, and diffuser for reducing laser speckle
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6639722B2 (en) 2001-08-15 2003-10-28 Silicon Light Machines Stress tuned blazed grating light valve
US6785001B2 (en) * 2001-08-21 2004-08-31 Silicon Light Machines, Inc. Method and apparatus for measuring wavelength jitter of light signal
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
KR100431581B1 (ko) * 2002-05-28 2004-05-17 한국과학기술원 미소거울 구동기
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US7057795B2 (en) * 2002-08-20 2006-06-06 Silicon Light Machines Corporation Micro-structures with individually addressable ribbon pairs
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US7781850B2 (en) 2002-09-20 2010-08-24 Qualcomm Mems Technologies, Inc. Controlling electromechanical behavior of structures within a microelectromechanical systems device
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
TW570896B (en) 2003-05-26 2004-01-11 Prime View Int Co Ltd A method for fabricating an interference display cell
TWI223855B (en) * 2003-06-09 2004-11-11 Taiwan Semiconductor Mfg Method for manufacturing reflective spatial light modulator mirror devices
US7221495B2 (en) * 2003-06-24 2007-05-22 Idc Llc Thin film precursor stack for MEMS manufacturing
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
US6861277B1 (en) 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US6914709B2 (en) * 2003-10-02 2005-07-05 Hewlett-Packard Development Company, L.P. MEMS device and method of forming MEMS device
US7352053B2 (en) * 2003-10-29 2008-04-01 Taiwan Semiconductor Manufacturing Company, Ltd. Insulating layer having decreased dielectric constant and increased hardness
US7933060B2 (en) * 2003-11-01 2011-04-26 Silicon Quest Kabushiki-Kaisha Three states of micro mirror device
US7760415B2 (en) * 2003-11-01 2010-07-20 Silicon Quest Kabushiki-Kaisha Micro mirror device
US7755830B2 (en) * 2003-11-01 2010-07-13 Silicon Quest Kabushiki-Kaisha Micro mirror device
US7643195B2 (en) * 2003-11-01 2010-01-05 Silicon Quest Kabushiki-Kaisha Mirror device
US7876488B2 (en) 2003-11-01 2011-01-25 Silicon Quest Kabushiki-Kaisha Mirror device having vertical hinge
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7720148B2 (en) * 2004-03-26 2010-05-18 The Hong Kong University Of Science And Technology Efficient multi-frame motion estimation for video compression
US7476327B2 (en) 2004-05-04 2009-01-13 Idc, Llc Method of manufacture for microelectromechanical devices
US7164520B2 (en) 2004-05-12 2007-01-16 Idc, Llc Packaging for an interferometric modulator
US6974219B1 (en) * 2004-07-09 2005-12-13 Bae Systems Information And Electronic Systems Integration Inc Zero reflectance design for tilted devices
KR101354520B1 (ko) * 2004-07-29 2014-01-21 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7408179B2 (en) * 2004-08-10 2008-08-05 Intel Corporation Transition radiation apparatus and method therefor
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7560299B2 (en) * 2004-08-27 2009-07-14 Idc, Llc Systems and methods of actuating MEMS display elements
US7602375B2 (en) * 2004-09-27 2009-10-13 Idc, Llc Method and system for writing data to MEMS display elements
US7936497B2 (en) 2004-09-27 2011-05-03 Qualcomm Mems Technologies, Inc. MEMS device having deformable membrane characterized by mechanical persistence
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US20060076634A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for packaging MEMS devices with incorporated getter
US8514169B2 (en) 2004-09-27 2013-08-20 Qualcomm Mems Technologies, Inc. Apparatus and system for writing data to electromechanical display elements
US7302157B2 (en) 2004-09-27 2007-11-27 Idc, Llc System and method for multi-level brightness in interferometric modulation
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7893919B2 (en) 2004-09-27 2011-02-22 Qualcomm Mems Technologies, Inc. Display region architectures
US7136213B2 (en) * 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7675669B2 (en) 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7130104B2 (en) * 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
BRPI0509575A (pt) * 2004-09-27 2007-10-09 Idc Llc método e dispositivo para modulação de luz interferométrica de multi-estados
US7321456B2 (en) 2004-09-27 2008-01-22 Idc, Llc Method and device for corner interferometric modulation
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7310179B2 (en) * 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7808703B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. System and method for implementation of interferometric modulator displays
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7692839B2 (en) 2004-09-27 2010-04-06 Qualcomm Mems Technologies, Inc. System and method of providing MEMS device with anti-stiction coating
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7684104B2 (en) * 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US7612932B2 (en) * 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7630119B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing slippage between structures in an interferometric modulator
US7916103B2 (en) * 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7184193B2 (en) * 2004-10-05 2007-02-27 Hewlett-Packard Development Company, L.P. Systems and methods for amorphous flexures in micro-electro mechanical systems
CA2607807A1 (en) 2005-05-05 2006-11-16 Qualcomm Incorporated Dynamic driver ic and display panel configuration
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US7884989B2 (en) 2005-05-27 2011-02-08 Qualcomm Mems Technologies, Inc. White interferometric modulators and methods for forming the same
KR20080041663A (ko) * 2005-07-22 2008-05-13 콸콤 인코포레이티드 Ｍｅｍｓ 장치를 위한 지지 구조물 및 그 방법들
WO2007013992A1 (en) * 2005-07-22 2007-02-01 Qualcomm Incorporated Support structure for mems device and methods therefor
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
CA2616268A1 (en) * 2005-07-22 2007-02-01 Qualcomm Incorporated Mems devices having support structures and methods of fabricating the same
US7522330B2 (en) * 2005-10-28 2009-04-21 Miradia Inc. High fill ratio silicon spatial light modulator
US7675670B2 (en) 2005-10-28 2010-03-09 Miradia Inc. Fabrication of a high fill ratio silicon spatial light modulator
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7795061B2 (en) 2005-12-29 2010-09-14 Qualcomm Mems Technologies, Inc. Method of creating MEMS device cavities by a non-etching process
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7382515B2 (en) 2006-01-18 2008-06-03 Qualcomm Mems Technologies, Inc. Silicon-rich silicon nitrides as etch stops in MEMS manufacture
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US20070205507A1 (en) * 2006-03-01 2007-09-06 Hui-Lin Chang Carbon and nitrogen based cap materials for metal hard mask scheme
US7450295B2 (en) * 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7903047B2 (en) 2006-04-17 2011-03-08 Qualcomm Mems Technologies, Inc. Mode indicator for interferometric modulator displays
US7711239B2 (en) 2006-04-19 2010-05-04 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing nanoparticles
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7761350B1 (en) * 2006-04-26 2010-07-20 Aol Inc. Biasing of search result clustering to ensure more effective point of interest (POI) targeting
US7649671B2 (en) 2006-06-01 2010-01-19 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device with electrostatic actuation and release
US7321457B2 (en) 2006-06-01 2008-01-22 Qualcomm Incorporated Process and structure for fabrication of MEMS device having isolated edge posts
US7702192B2 (en) 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7835061B2 (en) 2006-06-28 2010-11-16 Qualcomm Mems Technologies, Inc. Support structures for free-standing electromechanical devices
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
JP4327183B2 (ja) * 2006-07-31 2009-09-09 株式会社日立製作所 内燃機関の高圧燃料ポンプ制御装置
US7763546B2 (en) 2006-08-02 2010-07-27 Qualcomm Mems Technologies, Inc. Methods for reducing surface charges during the manufacture of microelectromechanical systems devices
KR100729117B1 (ko) 2006-08-28 2007-06-14 동부일렉트로닉스 주식회사 디엘피 소자의 금속 배선 형성 방법
US8023172B2 (en) * 2006-08-30 2011-09-20 Silicon Quest Kabushiki-Kaisha Mirror device
US7652813B2 (en) * 2006-08-30 2010-01-26 Silicon Quest Kabushiki-Kaisha Mirror device
US7629197B2 (en) 2006-10-18 2009-12-08 Qualcomm Mems Technologies, Inc. Spatial light modulator
US7545552B2 (en) * 2006-10-19 2009-06-09 Qualcomm Mems Technologies, Inc. Sacrificial spacer process and resultant structure for MEMS support structure
US7684106B2 (en) 2006-11-02 2010-03-23 Qualcomm Mems Technologies, Inc. Compatible MEMS switch architecture
US20080180783A1 (en) * 2007-01-25 2008-07-31 Li-Ming Wang Critical dimension control for photolithography for microelectromechanical systems devices
US8115987B2 (en) 2007-02-01 2012-02-14 Qualcomm Mems Technologies, Inc. Modulating the intensity of light from an interferometric reflector
US7733552B2 (en) 2007-03-21 2010-06-08 Qualcomm Mems Technologies, Inc MEMS cavity-coating layers and methods
US7742220B2 (en) 2007-03-28 2010-06-22 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing conducting layers separated by stops
US7715085B2 (en) * 2007-05-09 2010-05-11 Qualcomm Mems Technologies, Inc. Electromechanical system having a dielectric movable membrane and a mirror
US7643202B2 (en) 2007-05-09 2010-01-05 Qualcomm Mems Technologies, Inc. Microelectromechanical system having a dielectric movable membrane and a mirror
US7719752B2 (en) 2007-05-11 2010-05-18 Qualcomm Mems Technologies, Inc. MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same
US7643199B2 (en) 2007-06-19 2010-01-05 Qualcomm Mems Technologies, Inc. High aperture-ratio top-reflective AM-iMod displays
US7782517B2 (en) 2007-06-21 2010-08-24 Qualcomm Mems Technologies, Inc. Infrared and dual mode displays
US7569488B2 (en) * 2007-06-22 2009-08-04 Qualcomm Mems Technologies, Inc. Methods of making a MEMS device by monitoring a process parameter
US7630121B2 (en) * 2007-07-02 2009-12-08 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8068268B2 (en) 2007-07-03 2011-11-29 Qualcomm Mems Technologies, Inc. MEMS devices having improved uniformity and methods for making them
KR20100066452A (ko) 2007-07-31 2010-06-17 퀄컴 엠이엠스 테크놀로지스, 인크. 간섭계 변조기의 색 변이를 증강시키는 장치
US8072402B2 (en) 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7773286B2 (en) 2007-09-14 2010-08-10 Qualcomm Mems Technologies, Inc. Periodic dimple array
US7847999B2 (en) 2007-09-14 2010-12-07 Qualcomm Mems Technologies, Inc. Interferometric modulator display devices
JP5302322B2 (ja) 2007-10-19 2013-10-02 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 一体型光起電力を有するディスプレイ
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
KR20100103467A (ko) 2007-10-23 2010-09-27 퀄컴 엠이엠스 테크놀로지스, 인크. 조절가능하게 투과성인 ｍｅｍｓ―기반 장치
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7820063B2 (en) * 2007-11-16 2010-10-26 Texas Instruments Incorporated Micromirror device and a method of making the same
US7715079B2 (en) 2007-12-07 2010-05-11 Qualcomm Mems Technologies, Inc. MEMS devices requiring no mechanical support
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
US7643305B2 (en) * 2008-03-07 2010-01-05 Qualcomm Mems Technologies, Inc. System and method of preventing damage to metal traces of flexible printed circuits
US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
US7898723B2 (en) 2008-04-02 2011-03-01 Qualcomm Mems Technologies, Inc. Microelectromechanical systems display element with photovoltaic structure
US7969638B2 (en) 2008-04-10 2011-06-28 Qualcomm Mems Technologies, Inc. Device having thin black mask and method of fabricating the same
US7851239B2 (en) * 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US7746539B2 (en) 2008-06-25 2010-06-29 Qualcomm Mems Technologies, Inc. Method for packing a display device and the device obtained thereof
US7859740B2 (en) 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US7782522B2 (en) * 2008-07-17 2010-08-24 Qualcomm Mems Technologies, Inc. Encapsulation methods for interferometric modulator and MEMS devices
US7855826B2 (en) 2008-08-12 2010-12-21 Qualcomm Mems Technologies, Inc. Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
US8270056B2 (en) 2009-03-23 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with openings between sub-pixels and method of making same
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US7864403B2 (en) 2009-03-27 2011-01-04 Qualcomm Mems Technologies, Inc. Post-release adjustment of interferometric modulator reflectivity
WO2010138765A1 (en) 2009-05-29 2010-12-02 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
US8488228B2 (en) 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
US8547626B2 (en) * 2010-03-25 2013-10-01 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of shaping the same
US8368153B2 (en) * 2010-04-08 2013-02-05 United Microelectronics Corp. Wafer level package of MEMS microphone and manufacturing method thereof
KR20130100232A (ko) 2010-04-09 2013-09-10 퀄컴 엠이엠에스 테크놀로지스, 인크. 전기 기계 디바이스의 기계층 및 그 형성 방법
WO2012024238A1 (en) 2010-08-17 2012-02-23 Qualcomm Mems Technologies, Inc. Actuation and calibration of a charge neutral electrode in an interferometric display device
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8659816B2 (en) 2011-04-25 2014-02-25 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of making the same
US20130100145A1 (en) * 2011-10-21 2013-04-25 Qualcomm Mems Technologies, Inc. Electromechanical systems device
US9423253B2 (en) * 2011-10-31 2016-08-23 The Charles Stark Draper Laboratory, Inc. MEMS hemispherical resonator gyroscope
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
EP2618201B1 (en) * 2012-01-20 2015-11-04 Imec Calibration of micro-mirror arrays
JP6070860B2 (ja) * 2013-11-27 2017-02-01 株式会社ニコン 空間光変調器、光描画装置、露光装置およびデバイス製造方法
US11131796B2 (en) 2018-09-10 2021-09-28 Texas Instruments Incorporated Optical display with spatial light modulator
US20210111537A1 (en) * 2019-10-15 2021-04-15 Texas Instruments Incorporated Mems-based phase spatial light modulating architecture

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4592628A (en) * 1981-07-01 1986-06-03 International Business Machines Mirror array light valve
EP0139991A3 (en) * 1983-09-08 1986-06-25 Texas Instruments Incorporated Optical system for projection display using spatial light modulator (1111111)
US4638309A (en) * 1983-09-08 1987-01-20 Texas Instruments Incorporated Spatial light modulator drive system
US4710732A (en) * 1984-07-31 1987-12-01 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US4956610A (en) 1988-02-12 1990-09-11 Pgm Diversified Industries, Inc. Current density measurement system by self-sustaining magnetic oscillation
US5083857A (en) * 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5202785A (en) * 1991-12-20 1993-04-13 Texas Instruments Incorporated Method and device for steering light
CA2085961A1 (en) * 1991-12-23 1993-06-24 William E. Nelson Method and apparatus for steering light
US5289172A (en) * 1992-10-23 1994-02-22 Texas Instruments Incorporated Method of mitigating the effects of a defective electromechanical pixel
JPH06260470A (ja) * 1992-12-16 1994-09-16 Texas Instr Inc <Ti> パターンに作成された金属層の清浄化法

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