KR960003957B1 - Method for making the mass of acceleration sensor and vibration sensor using metal paste dispensing - Google Patents

Method for making the mass of acceleration sensor and vibration sensor using metal paste dispensing Download PDF

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Publication number
KR960003957B1
KR960003957B1 KR93020962A KR930020962A KR960003957B1 KR 960003957 B1 KR960003957 B1 KR 960003957B1 KR 93020962 A KR93020962 A KR 93020962A KR 930020962 A KR930020962 A KR 930020962A KR 960003957 B1 KR960003957 B1 KR 960003957B1
Authority
KR
South Korea
Prior art keywords
mass
metal paste
making
sensor
paste dispensing
Prior art date
Application number
KR93020962A
Other languages
Korean (ko)
Other versions
KR950012077A (en
Inventor
Jong-Hyun Lee
Original Assignee
Mando Machine Co Ltd
Kyung Buk University Sensor Te
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mando Machine Co Ltd, Kyung Buk University Sensor Te filed Critical Mando Machine Co Ltd
Priority to KR93020962A priority Critical patent/KR960003957B1/en
Priority to US08/319,498 priority patent/US5905044A/en
Priority to JP6271789A priority patent/JP2828914B2/en
Publication of KR950012077A publication Critical patent/KR950012077A/en
Application granted granted Critical
Publication of KR960003957B1 publication Critical patent/KR960003957B1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration

Abstract

The method involves forming a pressure resistor(2) on a Si wafer(1) after cleaning it. Then vacuum deposition of Ni thin film(3) as a mass paddle are formed over the Si wafer. The patterning of the Ni thin film(3) is carried out by wet etching, and a heat treatment is carried out to form Ni silicide(3'). The Ni surface oxide layer is removed in NH4OH aq. solution. A metal paste(4) of fixed quantity is formed over the Ni silicide(3') using a dispenser, and is heat treated and stiffened. The method facilitates mass production, and manufacture of various sensors with differing weights.
KR93020962A 1993-10-09 1993-10-09 Method for making the mass of acceleration sensor and vibration sensor using metal paste dispensing KR960003957B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR93020962A KR960003957B1 (en) 1993-10-09 1993-10-09 Method for making the mass of acceleration sensor and vibration sensor using metal paste dispensing
US08/319,498 US5905044A (en) 1993-10-09 1994-10-07 Mass manufacturing method of semiconductor acceleration and vibration sensors
JP6271789A JP2828914B2 (en) 1993-10-09 1994-10-11 Method for manufacturing weight of semiconductor acceleration sensor and vibration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93020962A KR960003957B1 (en) 1993-10-09 1993-10-09 Method for making the mass of acceleration sensor and vibration sensor using metal paste dispensing

Publications (2)

Publication Number Publication Date
KR950012077A KR950012077A (en) 1995-05-16
KR960003957B1 true KR960003957B1 (en) 1996-03-25

Family

ID=19365565

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93020962A KR960003957B1 (en) 1993-10-09 1993-10-09 Method for making the mass of acceleration sensor and vibration sensor using metal paste dispensing

Country Status (1)

Country Link
KR (1) KR960003957B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100282435B1 (en) * 1998-03-13 2001-04-02 김영환 Method for manufacturing of acceleration sensor
KR101105085B1 (en) * 2009-12-31 2012-01-16 중앙대학교 산학협력단 Accelerometer using Fe-polymer electret

Also Published As

Publication number Publication date
KR950012077A (en) 1995-05-16

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