KR960000307A - 미소 기계 디바이스의 부품을 분리시키는 방법 - Google Patents

미소 기계 디바이스의 부품을 분리시키는 방법 Download PDF

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KR960000307A
KR960000307A KR1019950016369A KR19950016369A KR960000307A KR 960000307 A KR960000307 A KR 960000307A KR 1019950016369 A KR1019950016369 A KR 1019950016369A KR 19950016369 A KR19950016369 A KR 19950016369A KR 960000307 A KR960000307 A KR 960000307A
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critical fluid
active agent
surface active
excess
fluid
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KR1019950016369A
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KR100351077B1 (ko
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에이. 더글라스 몬테
엠. 월레이스 로버트
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윌리엄 이. 힐러
텍사스 인스트루먼츠 인코포레이티드
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B81C1/00968—Methods for breaking the stiction bond
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/117—Using supercritical fluid, e.g. carbon dioxide, for removing sacrificial layers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

본 발명은 미소 기계 디바이스(30)의 접촉 소자(11, 17)를 분리시키는 방법에 관한 것이다. 이 디바이스는 디바이스(30)의 깨지기 쉬운 부품에 대한 손상을 방지하기 위해 표면 활성제(32)를 갖는 낮은 표면 인장 용액 또는 임계 초과 유체(62)에 노출된다. 노출 조건은 디바이스에 대한 손상없이 최적의 결과를 체공하도록 제어된다.
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Description

미소 기계 디바이스의 부품을 분리시키는 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 접촉 소자를 갖고 있는 미소 기계 디바이스 또는 디지탈 마이크로-미러 디바이스PMD)중 어느 하나의 형태의 비 편향(undeflected) 미러 소자의 도면.

Claims (20)

  1. 미소 기계 디바이스의 접촉 소자를 분리시키는 방법에 있어서, 표면 활성제를 포함하는 낮은 인장 용액의 보디(body)에 상기 접촉 소자를 침적시키는 단계, 상기 낮은 표면 인장 용액과 그의 기상 간의 압력 평형이 실질적으로 유지되도록 상기 디바아스를 간조하는 단계를 포함하는 것을 특징으로 하는 접촉 소자 분리 방법.
  2. 제1항에 있어서, 상기 낮은 표면 인장 용려은 플루오로카본 용액인 것을 특징으로 하는 접촉 소자 분리 방법.
  3. 제2항에 있어서, 상기 플루오로카본 용액은 퍼풀루오릭네이트 알칸 (perfluorinated alkane)인 것을 특징으로 하는 접촉 소자 분리 방법.
  4. 제1항에 있어서, 상기 낮은 표면 인장 용액은 퍼플루오로-n-메틸 모르포린(perfluoro-n-methyl-morpholine)인 것을 특징으로 하는 접촉 소자 분리 방법.
  5. 제1항에 있어서, 상기 표면 활성제는 비-이온 표면 활성제 (a non-ionic surfactanB)인 것을 특징으로 하는 접촉 소자 분리 방법.
  6. 제1항에 있어서, 상기 건조 단계는 잔공 건조 단재인 것을 특징으로 하는 접촉 소자 분리 방법.
  7. 제1항에 있어서, 상기 표면 활성제의 잔기(residue)를 제거하는 단계를 더 포함하는 것을 특징으로 하는 접촉 소자 분리 빙법.
  8. 제7항에 있어서. 상기 제거 단계는 상기 잔기가 용해되도록 임계 초과 유체로 행해지는 것을 특징으로 하는 접촉 소자 분리 방법.
  9. 제8항에 있어서, 상기 임계 초과 유체는 카본 디옥사이드/아세톤 바이너리 유체인 것을 특징으로 라는 접촉 소자 분리 방법.
  10. 제7항에 있어서, 상기 제거 단계는 상기 잔기가 휴발성이 있도록 열처리 행해지는 것을 특징으로 하는 접촉 소자 분리 방법.
  11. 미소 기계 디바이스의 접촉 소자를 건조시켜 분리시키는 방법에 있어서, 임계 초과 유체에 상기 접촉 소자를 노출시키는 단계를 포함하는 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  12. 제11항에 있어서, 상기 노출 단계는 배플 임 출 포트를 가진 용기 내에 상기 디바이스를 배치함으로써 행해지는 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  13. 제11항에 있어서, 상기 노출 단계는 상기 노출 단계 후에 제어식 압력 해재 방식으로 높은 압력 조건하에서 행해지는 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  14. 제11항에 있여서, 상기 임계 초과 유체는 카본 디옥사이드인 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  15. 제11항에 있어서, 상기 임계 초과 유체는 카본 디옥사이드/아세톤 바이너리 유체인 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  16. 제11항에 있어서, 상기 임계 초과 유체는 카본 디옥사이드/에탄올 바이어리 유체인 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  17. 제11항에 있어서, 상기 노출 단계는 35도 내지 80도의 온도에서 행해지는 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  18. 제11항에 있어서, 상기 노출 단계는 약 500기압에서 행해지는 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  19. 제11항에 있어서, 상기 임계 초과 유체는 표면 활성제를 포함하는 것을 특징으로 하는 접촉 소자 건조 분리 방법.
  20. 제11항에 있어서, 상기 임계 초과 유체는 표면 활성제를 포함하며. 상기 노출 단계 후에 상기 디바이스로 부터 상기 표면 활성제를 제거하는 단계를 더 포함하는 것을 특징으로 하는 접촉 소자 건조 분리 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950016369A 1994-06-21 1995-06-20 미소기계디바이스부품을분리시키는방법 KR100351077B1 (ko)

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US08/263,292 1994-06-21
US08/263,292 US5482564A (en) 1994-06-21 1994-06-21 Method of unsticking components of micro-mechanical devices

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KR960000307A true KR960000307A (ko) 1996-01-25
KR100351077B1 KR100351077B1 (ko) 2002-12-26

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US (1) US5482564A (ko)
EP (1) EP0689076B1 (ko)
JP (1) JPH0886969A (ko)
KR (1) KR100351077B1 (ko)
CN (1) CN1149190A (ko)
CA (1) CA2149934A1 (ko)
DE (1) DE69524815T2 (ko)
TW (2) TW335561B (ko)

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EP0689076A1 (en) 1995-12-27
JPH0886969A (ja) 1996-04-02
CA2149934A1 (en) 1995-12-22
TW335561B (en) 1998-07-01
EP0689076B1 (en) 2002-01-02
CN1149190A (zh) 1997-05-07
TW302554B (ko) 1997-04-11
KR100351077B1 (ko) 2002-12-26
DE69524815D1 (de) 2002-02-07
US5482564A (en) 1996-01-09

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