KR950023949U - 가스 노즐 일체형 수직 저압 화학 기상 증착장치 - Google Patents

가스 노즐 일체형 수직 저압 화학 기상 증착장치

Info

Publication number
KR950023949U
KR950023949U KR2019940001437U KR19940001437U KR950023949U KR 950023949 U KR950023949 U KR 950023949U KR 2019940001437 U KR2019940001437 U KR 2019940001437U KR 19940001437 U KR19940001437 U KR 19940001437U KR 950023949 U KR950023949 U KR 950023949U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
gas nozzle
pressure chemical
Prior art date
Application number
KR2019940001437U
Other languages
English (en)
Other versions
KR0117114Y1 (ko
Inventor
김범규
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019940001437U priority Critical patent/KR0117114Y1/ko
Publication of KR950023949U publication Critical patent/KR950023949U/ko
Application granted granted Critical
Publication of KR0117114Y1 publication Critical patent/KR0117114Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45568—Porous nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
KR2019940001437U 1994-01-26 1994-01-26 가스 노즐 일체형 수직 저압 화학 기상 증착장치 KR0117114Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940001437U KR0117114Y1 (ko) 1994-01-26 1994-01-26 가스 노즐 일체형 수직 저압 화학 기상 증착장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940001437U KR0117114Y1 (ko) 1994-01-26 1994-01-26 가스 노즐 일체형 수직 저압 화학 기상 증착장치

Publications (2)

Publication Number Publication Date
KR950023949U true KR950023949U (ko) 1995-08-23
KR0117114Y1 KR0117114Y1 (ko) 1998-04-27

Family

ID=19376308

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940001437U KR0117114Y1 (ko) 1994-01-26 1994-01-26 가스 노즐 일체형 수직 저압 화학 기상 증착장치

Country Status (1)

Country Link
KR (1) KR0117114Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100340910B1 (ko) * 1999-11-12 2002-06-20 박종섭 저압화학기상증착용 확산로

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100340910B1 (ko) * 1999-11-12 2002-06-20 박종섭 저압화학기상증착용 확산로

Also Published As

Publication number Publication date
KR0117114Y1 (ko) 1998-04-27

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