KR950015630A - 자동 웨이퍼 핸들러를 구비한 다이싱 머신 - Google Patents

자동 웨이퍼 핸들러를 구비한 다이싱 머신 Download PDF

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Publication number
KR950015630A
KR950015630A KR1019940031393A KR19940031393A KR950015630A KR 950015630 A KR950015630 A KR 950015630A KR 1019940031393 A KR1019940031393 A KR 1019940031393A KR 19940031393 A KR19940031393 A KR 19940031393A KR 950015630 A KR950015630 A KR 950015630A
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
stage
stocker
dicing machine
stockers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019940031393A
Other languages
English (en)
Korean (ko)
Inventor
다다시 아다치
Original Assignee
다카키 도시요시
세이코세이키 가부시기가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다카키 도시요시, 세이코세이키 가부시기가이샤 filed Critical 다카키 도시요시
Publication of KR950015630A publication Critical patent/KR950015630A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • H10P72/00—
    • H10P52/00—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
KR1019940031393A 1993-11-26 1994-11-26 자동 웨이퍼 핸들러를 구비한 다이싱 머신 Withdrawn KR950015630A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5321200A JPH07153720A (ja) 1993-11-26 1993-11-26 ダイシング装置のウェハ自給装置
JP93-321200 1993-11-26

Publications (1)

Publication Number Publication Date
KR950015630A true KR950015630A (ko) 1995-06-17

Family

ID=18129915

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940031393A Withdrawn KR950015630A (ko) 1993-11-26 1994-11-26 자동 웨이퍼 핸들러를 구비한 다이싱 머신

Country Status (4)

Country Link
JP (1) JPH07153720A (enExample)
KR (1) KR950015630A (enExample)
GB (1) GB2284303B (enExample)
TW (1) TW252213B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013049001A (ja) * 2011-08-30 2013-03-14 Panasonic Corp 液剤塗布装置及び液剤塗布方法
JP6435669B2 (ja) * 2014-07-04 2018-12-12 三星ダイヤモンド工業株式会社 基板加工装置
CN111604810B (zh) * 2020-07-24 2020-11-03 杭州众硅电子科技有限公司 一种晶圆传输设备、化学机械平坦化装置及晶圆传输方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4775281A (en) * 1986-12-02 1988-10-04 Teradyne, Inc. Apparatus and method for loading and unloading wafers
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers

Also Published As

Publication number Publication date
GB2284303A (en) 1995-05-31
GB2284303B (en) 1997-10-08
TW252213B (enExample) 1995-07-21
JPH07153720A (ja) 1995-06-16
GB9423850D0 (en) 1995-01-11

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Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PN2301 Change of applicant

St.27 status event code: A-3-3-R10-R13-asn-PN2301

St.27 status event code: A-3-3-R10-R11-asn-PN2301

PC1203 Withdrawal of no request for examination

St.27 status event code: N-1-6-B10-B12-nap-PC1203

WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid
R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000